Patents by Inventor Ajith UVAIS

Ajith UVAIS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Boron-doped amorphous carbon hard mask and related methods
    Patent number: 11049728
    Abstract: Described are boron-doped amorphous carbon hard masks, methods of preparing boron-doped amorphous carbon hard masks, methods of using the boron-doped amorphous carbon hard masks, and devices that include the boron-doped amorphous carbon hard masks.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: June 29, 2021
    Assignee: ENTEGRIS, INC.
    Inventors: Ajith Uvais, Steve E. Bishop
  • BORON-DOPED AMORPHOUS CARBON HARD MASK AND RELATED METHODS
    Publication number: 20200135485
    Abstract: Described are boron-doped amorphous carbon hard masks, methods of preparing boron-doped amorphous carbon hard masks, methods of using the boron-doped amorphous carbon hard masks, and devices that include the boron-doped amorphous carbon hard masks.
    Type: Application
    Filed: October 18, 2019
    Publication date: April 30, 2020
    Inventors: Ajith UVAIS, Steve E. BISHOP