Patents by Inventor Aju PHILIP

Aju PHILIP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220076971
    Abstract: Embodiments disclosed herein relate to an apparatus for aligning and securing a transferable substrate support. In one embodiment, a substrate support assembly includes a transferable substrate support. The transferable substrate support includes one or more first separable contact terminals disposed on a surface of the transferable substrate support. Each of the first separable contact terminals includes a detachable connection region and an electrical connection region, and the electrical connection region is coupled to an electrical element disposed within the transferable substrate support. The detachable connection region of each of the one or more first separable contact terminals is configured to detachably connect and disconnect with a corresponding pin of one or more pins of a supporting pedestal by repositioning the supporting pedestal relative to the transferable substrate support in a first direction.
    Type: Application
    Filed: September 4, 2020
    Publication date: March 10, 2022
    Inventors: Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Kaushik VAIDYA, Bhaskar PRASAD, Srinivasa Rao YEDLA, Aju PHILIP, Thomas BREZOCZKY