Patents by Inventor Akemi Furuki

Akemi Furuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Secondary-ion mass spectrometry apparatus using field limiting method
    Patent number: 5278407
    Abstract: A secondary-ion mass spectrometry apparatus using a field limiting method includes an optical system for primary ions, a sample chamber, and an optical system for secondary ions, and a total ion monitor (TIM) interposed between an electric sector and a magnetic sector of the optical system for secondary ions. A field-limited image (or TIM image) from the TIM can be observed or monitored continually by a CRT, thereby making it possible to grasp quantitatively the charging state of a sample surface. The apparatus may further include an adjuster for adjusting quantatively the charging state of the sample surface.
    Type: Grant
    Filed: April 24, 1992
    Date of Patent: January 11, 1994
    Assignees: Hitachi, Ltd., Hitachi Instrument Engineering Co., Ltd.
    Inventors: Yoshinori Ikebe, Hifumi Tamura, Hiroyuki Sumiya, Akemi Furuki