Patents by Inventor Akemi Kono

Akemi Kono has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for adjusting optical axis of charged particle radiation and charged particle radiation device
    Patent number: 8294118
    Abstract: Provided are a method for adjusting the optical axis of a charged particle beam and a device therefor, wherein an artificial criterion is quantified, and whether or not the adjustment of the axis of a charged particle beam is necessary is judged on the basis of the quantified criterion.
    Type: Grant
    Filed: January 13, 2010
    Date of Patent: October 23, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Akemi Kono, Osamu Nasu
  • METHOD FOR ADJUSTING OPTICAL AXIS OF CHARGED PARTICLE RADIATION AND CHARGED PARTICLE RADIATION DEVICE
    Publication number: 20110284759
    Abstract: Provided are a method for adjusting the optical axis of a charged particle beam and a device therefor, wherein an artificial criterion is quantified, and whether or not the adjustment of the axis of a charged particle beam is necessary is judged on the basis of the quantified criterion.
    Type: Application
    Filed: January 13, 2010
    Publication date: November 24, 2011
    Inventors: Akemi Kono, Osamu Nasu