Patents by Inventor Akhiro YAMANAKA

Akhiro YAMANAKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9695815
    Abstract: A pump device and method for stabilizing a suction flow rate irrespective of an outside air temperature. The method includes: outputting a drive signal for driving a motor at a rotation speed for discharging gas of the reference flow rate from the suction port of the pump main body; measuring a temperature of gas discharged from the suction port or a temperature of the pump main body by a temperature sensor attached to the pump main body; calculating an actual flow rate of the gas discharged from the suction port based on a temperature signal relating to the temperature of the gas included in an output of the temperature sensor; and correcting the drive signal such that the actual flow rate equals the reference flow rate and outputting the corrected drive signal to the motor.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: July 4, 2017
    Assignee: Ulvac Kiko, Inc.
    Inventors: Yuji Nonomura, Sachie Suzuki, Ryuji Itoyama, Akhiro Yamanaka
  • Publication number: 20160003251
    Abstract: [Object] To provide a pump device capable of stabilizing a suction flow rate irrespective of an outside air temperature and a control method therefor. [Solving Means] The control method for a pump device includes: outputting a drive signal for driving a motor at a rotation speed for discharging gas of the reference flow rate from the suction port of the pump main body; measuring a temperature of gas discharged from the suction port or a temperature of the pump main body by a temperature sensor attached to the pump main body; calculating an actual flow rate of the gas discharged from the suction port based on a temperature signal relating to the temperature of the gas included in an output of the temperature sensor; and correcting the drive signal such that the actual flow rate equals the reference flow rate and outputting the corrected drive signal to the motor.
    Type: Application
    Filed: February 16, 2012
    Publication date: January 7, 2016
    Applicant: ULVAC KIKO, INC.
    Inventors: Yuji NONOMURA, Sachie SUZUKI, Ryuji ITOYAMA, Akhiro YAMANAKA