Abstract: Disclosed is an X-ray apparatus having an X-ray source, an X-ray detector, a divergence slit, and a scattering slit. The incident angle ? of X-ray to be irradiated on a sample is changed at a predetermined angular speed at measurement time and diffracted X-ray detection angle 2? at which the X-ray detector detects X-ray is changed in the opposite direction to the ?-direction at an angular speed double that of the X-ray incident angle ?. The slit width of the divergence slit is changed such that the X-ray irradiation width always coincides with the sample width while the slit width of the scattering slit is retained at a constant value. The width of X-ray received by the X-ray detector is restricted by the narrower one of the divergence slit and the scattering slit. The resolution in the high angle region can be kept at a high level.

Abstract: Disclosed is an X-ray diffraction apparatus that irradiates a sample with X-ray emitted from an X-ray source by resting the X-ray using a divergence slit and detects diffracted X-ray generated from the sample using an X-ray detector. The divergence angle of the divergence slit is a fixed value, and the divergence slit is a slit that restricts the X-ray irradiation width in the sample width direction. The sample is arranged in a longitudinally-elongated manner in which its sample width is smaller than a standard sample width and its sample height is the same as a standard sample height. X-ray intensity calculated based on an output of the X-ray detector is compensated based on an effective divergence angle calculated based on the sample width to thereby obtain true X-ray intensity.

Abstract: Disclosed is an X-ray diffraction apparatus that irradiates a sample with X-ray emitted from an X-ray source by resting the X-ray using a divergence slit and detects diffracted X-ray generated from the sample using an X-ray detector. The divergence angle of the divergence slit is a fixed value, and the divergence slit is a slit that restricts the X-ray irradiation width in the sample width direction. The sample is arranged in a longitudinally-elongated manner in which its sample width is smaller than a standard sample width and its sample height is the same as a standard sample height. X-ray intensity calculated based on an output of the X-ray detector is compensated based on an effective divergence angle calculated based on the sample width to thereby obtain true X-ray intensity.

Abstract: Disclosed is an X-ray apparatus having an X-ray source, an X-ray detector, a divergence slit, and a scattering slit. The incident angle ? of X-ray to be irradiated on a sample is changed at a predetermined angular speed at measurement time and diffracted X-ray detection angle 2? at which the X-ray detector detects X-ray is changed in the opposite direction to the ?-direction at an angular speed double that of the X-ray incident angle ?. The slit width of the divergence slit is changed such that the X-ray irradiation width always coincides with the sample width while the slit width of the scattering slit is retained at a constant value. The width of X-ray received by the X-ray detector is restricted by the narrower one of the divergence slit and the scattering slit. The resolution in the high angle region can be kept at a high level.

Abstract: An attachment 3 mounted on a specimen support portion 2 of an X-ray apparatus 1 includes a cover member 9 covering a specimen S and a scattered ray excluding member 8 provided between the cover member 9 and the specimen S. The scattered ray excluding member 8 takes in the form of a box, a case or enclosure defined by a wall 16. The enclosure has a large opening 14a on the side of the cover member 9 and a small opening 14b on the side of the specimen S. The scattered ray excluding member 8 functions to prevent scattered X-ray emitted from the cover member when X-rays from an X-ray source passes through the cover member 9 and traveling toward an X-ray detector.

Abstract: An attachment 3 mounted on a specimen support portion 2 of an X-ray apparatus 1 includes a cover member 9 covering a specimen S and a scattered ray excluding member 8 provided between the cover member 9 and the specimen S. The scattered ray excluding member 8 takes in the form of a box or a case defined by a wall 16. The box has a large opening 14a on the side of the cover member 9 and a small opening 14b on the side of the specimen S. The scattered ray excluding member 8 functions to prevent scattered X-ray emitted from the cover member when X-rays from an X-ray source passes through the cover member 9 and travelling toward an X-ray detector.

Abstract: An X-ray micro-diffraction measuring method for detecting X-rays diffracted at a minute portion of a specimen upon irradiating the minute portion with X-rays is disclosed. A cylindrical stimulation type fluorescent member is arranged around the specimen. A sample facet of the specimen is tilted by, for example, 45° with respect to the stimulation type fluorescent member such that the stimulation type fluorescent member can receive both diffracted X-rays passing along a direction tangential to the sample facet and diffracted X-rays passing along a direction perpendicular to the sample facet. Diffracted X-ray images can be obtained on the stimulation type fluorescent by merely rotating the specimen about only the &phgr; axis thereof so as to perform the in-plane rotation without a rotation about the &khgr; axis. By eliminating a rotation about one axis from rotations about two axes for the specimen, it may be possible to avoid a degradation of measurement preciseness due to a crossing error of the two axes.