Patents by Inventor Akihiko Hiratsuka

Akihiko Hiratsuka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heating part, substrate processing apparatus, and method of manufacturing semiconductor device
    Patent number: 11198935
    Abstract: A heating part of covering and heating a gas pipe includes: a thermal insulation portion disposed outside a heat generation body; an enclosure configured to enclose the thermal insulation portion and the heat generation body; a fastening part installed outside the enclose and configured to fasten one end portion and the other end portion of the enclosure in a state in which the one end portion and the other end portion of the enclosure adjoin each other; and a temperature sensing part disposed at the side of the gas pipe with respect to the enclosure at a position facing a surface of the gas pipe and formed in a plate shape with a major surface thereof oriented toward the gas pipe.
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: December 14, 2021
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Shinobu Sugiura, Yosuke Kuwata, Tomoyasu Miyashita, Atsushi Umekawa, Kazuhiro Kimura, Akihiko Hiratsuka, Kaoru Kataoka, Ryosuke Arai
  • HEATING PART, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20170107620
    Abstract: A heating part of covering and heating a gas pipe includes: a thermal insulation portion disposed outside a heat generation body; an enclosure configured to enclose the thermal insulation portion and the heat generation body; a fastening part installed outside the enclose and configured to fasten one end portion and the other end portion of the enclosure in a state in which the one end portion and the other end portion of the enclosure adjoin each other; and a temperature sensing part disposed at the side of the gas pipe with respect to the enclosure at a position facing a surface of the gas pipe and formed in a plate shape with a major surface thereof oriented toward the gas pipe.
    Type: Application
    Filed: September 22, 2016
    Publication date: April 20, 2017
    Applicants: HITACHI KOKUSAI ELECTRIC INC., TOKYO TECHNOLOGICAL LABO CO., LTD.
    Inventors: Shinobu SUGIURA, Yosuke KUWATA, Tomoyasu MIYASHITA, Atsushi UMEKAWA, Kazuhiro KIMURA, Akihiko HIRATSUKA, Kaoru KATAOKA, Ryosuke ARAI
  • Heater unit for installation on valve
    Patent number: 7849873
    Abstract: A heater unit having a main body constructed in the form of a housing and covers the entire flow path forming sections of the valve and joints, and a heater built in the main body is mounted on the valve. The heater includes a direct heating section and a radiant heating section. The direct heating section heats at least a part of the flow path forming sections of the valve through direct contact heating. The radiant heating section heats the inside of the main body of the heater unit by radiant heat.
    Type: Grant
    Filed: April 19, 2004
    Date of Patent: December 14, 2010
    Assignee: Tokyo Technological Labo Co., Ltd.
    Inventors: Akihiko Hiratsuka, Tsuguhiro Nomoto
  • Heater unit for installation on valve
    Publication number: 20060225788
    Abstract: A heater unit having a main body constructed in the form of a housing and covers the entire flow path forming sections of the valve and joints, and a heater built in the main body is mounted on the valve. The heater includes a direct heating section and a radiant heating section. The direct heating section heats at least a part of the flow path forming sections of the valve through direct contact heating. The radiant heating section heats the inside of the main body of the heater unit by radiant heat.
    Type: Application
    Filed: April 19, 2004
    Publication date: October 12, 2006
    Applicant: Tokyo Technological Labo Co., Ltd.
    Inventors: Akihiko Hiratsuka, Tsuguhiro Nomoto