Abstract: A head clip used in a task of assembly, inspection, and maintenance such as repair or cleaning of a device having a head attached to an actuator, and to a working method using the head clip. The heads are located at an extreme end of the actuator. The head clip includes first and second support units inserted into the actuator so as to support suspensions to which the heads are disposed. The first support units are in contact with adjacent suspensions and support them at a first position which is located nearer to the pivoting fulcrum than to the heads in the longitudinal direction of the actuator. The second support units regulate the adjacent suspensions at a second position located at the extreme end, and the heads are disposed between the first position and the second position on the longitudinal direction.

Abstract: A measuring method and apparatus of a scanning probe microscope which is easy to initially set caused by exchanging a cantilever. A cantilever is effected of Z rough movement while forcibly vibrating a sample. When a contact pressure of the cantilever against the sample becomes a predetermined magnitude, the Z rough movement is ended. The forcible vibrational frequency may be a new resonant frequency caused by contacting the cantilever with the sample, or a shift resonant frequency. Then, XY scanning is effected to measure while putting the cantilever into light contact with a sample surface. It is possible to use, as an apparatus to forcibly vibrate the cantilever, a multi-layer piezoelectric element that responds to an output signal from an oscillator for outputting a signal at a predetermined frequency.