Abstract: The present invention pertains to an air cylinder (10) in which flow rate controllers (24, 24A) are built into a head cover (14) and a rod cover (16), said flow rate controllers (24, 24A) being provided with a first flow rate adjustment part (28) connected between a port (14a, 16a) and a cylinder chamber (12c), a second flow rate adjustment part (32) provided adjacent to the first flow rate adjustment part (28), and a pilot check valve (38) connected in series to the second flow rate adjustment part (32). In response to the pressure of pilot air, the pilot check valve (38) switches between a state in which the passage of exhaust air from the cylinder chamber (12c) is permitted and a state in which the passage of exhaust air is prevented.

Abstract: A flow rate controller and a drive device are provided with a first flow passage connected between an operation switching valve and an air cylinder, and that supplies air to and discharges air from a cylinder chamber of the air cylinder; a first flow rate adjustment part provided in the first flow passage; a second flow passage adjacent to the first flow passage; a pilot check valve provided at a point along the second flow passage; a second flow rate adjustment part connected in series to the pilot check valve at a point along the second flow passage; a pilot air flow passage, one end of which communicates with the operation switching valve and the other end of which is connected to a pilot port of the pilot check valve; and a third flow rate adjustment part provided in the pilot air flow passage.

Abstract: An apparatus and method for forming an alignment layer with uniform orientation is provided. An alignment layer-forming apparatus includes an ion source for generating ion beams and one or more masks disposed between the ion source and a substrate. The masks each have a reflective face directed to the substrate. The ion beams are reflected between the reflective face of each mask and a thin-film which is disposed on the substrate and which is processed into an alignment layer, whereby the alignment layer is formed with the ion beam finally applied to the thin-film. The orientation of a liquid crystal can be rendered uniform by varying the shape and/or arrangement of the reflective face of the mask. Hence, a liquid crystal display with no brightness or color non-uniformity can be manufactured.

Abstract: An apparatus and method for forming an alignment layer with uniform orientation is provided. An alignment layer-forming apparatus includes an ion source for generating ion beams and one or more masks disposed between the ion source and a substrate. The masks each have a reflective face directed to the substrate. The ion beams are reflected between the reflective face of each mask and a thin-film which is disposed on the substrate and which is processed into an alignment layer, whereby the alignment layer is formed with the ion beam finally applied to the thin-film. The orientation of a liquid crystal can be rendered uniform by varying the shape and/or arrangement of the reflective face of the mask. Hence, a liquid crystal display with no brightness or color non-uniformity can be manufactured.