Abstract: A robot system according to an aspect of the embodiments includes a plurality of work holding units and a heat insulating member. The work holding units each hold a work to be conveyed on one surface and are arranged vertically one over another in some cases during conveying of the work. The heat insulating member is provided on another surface side of at least one of the work holding units.

Abstract: A robot hand according to embodiments includes a holding unit, a bottom end, an optical sensor, and a reflecting member. The holding unit holds a thin-plate-shaped workpiece. In the bottom end, its leading part is coupled to the holding unit and its tail part is rotatably coupled to an arm. The optical sensor is provided in the bottom end and has a projector and a photoreceiver. The reflecting member is provided in the holding unit. The reflecting member reflects light from the projector, makes it pass through the holding area of the workpiece, and makes it reach the photoreceiver to form an optical path.

Abstract: A robot system according to an aspect of the embodiments includes a plurality of work holding units and a heat insulating member. The work holding units each hold a work to be conveyed on one surface and are arranged vertically one over another in some cases during conveying of the work. The heat insulating member is provided on another surface side of at least one of the work holding units.

Abstract: A robot hand according to embodiments includes a holding unit, a bottom end, an optical sensor, and a reflecting member. The holding unit holds a thin-plate-shaped workpiece. In the bottom end, its leading part is coupled to the holding unit and its tail part is rotatably coupled to an arm. The optical sensor is provided in the bottom end and has a projector and a photoreceiver. The reflecting member is provided in the holding unit. The reflecting member reflects light from the projector, makes it pass through the holding area of the workpiece, and makes it reach the photoreceiver to form an optical path.

Abstract: An ultra-precise positioning system includes a movable part, a rolling guide, a fixed part in supporting contact with the rolling guide, and a driving device for driving the movable part. The driving device includes a non-contact motor which applies a force to the movable part without touching engagement with the movable part.

Abstract: The present invention relates to an improvement in a method and an apparatus for magnetic levitation of a linear slider through a PI control action. When the slider is horizontally moved while levitated vertically by two fixed magnetic forces, the angle of inclination of the slider cannot be settled in a preset position because of a control delay caused by integral action, which results in an angle offset. In order to eliminate the offset, a signal which is the sum of an angle deviation and a delay compensation signal that is proportional to the product of the velocity of the slider and an integral time is used as an error signal to settle the angle of inclination. The vertical position of the slider is controlled so that the sum of the magnetic forces applied to the slider balances the weight of the slider.