Patents by Inventor Akihiro HAKAMATA

Akihiro HAKAMATA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11899361
    Abstract: Provided is a kit including a curable composition for imprinting which contains a polymerizable compound having an aromatic ring and a composition for forming an underlayer film for imprinting which contains a polymer and a solvent, in which the polymer contains at least one kind of specific constitutional unit and has a polymerizable group, a film formed of the composition for forming an underlayer film for imprinting is a solid film at 23° C., and a portion that has a continuous partial structure containing an aromatic ring which is included in the polymerizable compound and accounts for 60% by mass or more of the polymerizable compound is common to a continuous partial structure containing an aromatic ring which is included in a substituent R in a side chain in the polymer.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: February 13, 2024
    Assignee: FUJIFILM Corporation
    Inventors: Naoya Shimoju, Akinori Shibuya, Yuichiro Goto, Akihiro Hakamata
  • Publication number: 20230383044
    Abstract: Provided are a composition for forming an imprint pattern, containing a polymerizable compound, a polymerization initiator, and a derivative of the polymerization initiator; a cured substance of the composition for forming an imprint pattern; a device including the cured substance; an imprint pattern producing method using the composition for forming an imprint pattern; and a method for manufacturing a device, including the imprint pattern producing method.
    Type: Application
    Filed: July 27, 2023
    Publication date: November 30, 2023
    Applicant: FUJIFILM Corporation
    Inventor: Akihiro HAKAMATA
  • Publication number: 20230250311
    Abstract: Provided are a method for producing a composition for forming an interlayer for nanoimprint, the method including a filtering step of filtering a precursor composition 1 including a resin having a polymerizable group with a filter, a step of adding a solvent to the precursor composition 1 after the step to obtain a precursor composition 2, and a filtering step of filtering the precursor composition 2 with a filter, in which a proportion of a total solid content of the obtained composition is 0.1% to 1.0% by mass; a method for producing a laminate formed of the composition for forming an interlayer; an imprint pattern producing method using the composition for forming an interlayer; and a method for manufacturing a device, which includes the imprint pattern producing method.
    Type: Application
    Filed: March 22, 2023
    Publication date: August 10, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Naoya SHIMOJU, Akihiro HAKAMATA
  • Patent number: 11710641
    Abstract: Provided is a kit including a curable composition for imprinting, and a composition for forming an underlayer film for imprinting, in which the composition for forming an underlayer film for imprinting contains a polymer having a polymerizable functional group, and a compound in which the lower one of a boiling point and a thermal decomposition temperature is 480° C. or higher and ?HSP, which is a Hansen solubility parameter distance from a component with the highest content contained in the curable composition for imprinting, is 2.5 or less. Furthermore, the present invention relates to a composition for forming an underlayer film for imprinting, a pattern forming method, and a method for manufacturing a semiconductor device, which are related to the kit.
    Type: Grant
    Filed: August 13, 2020
    Date of Patent: July 25, 2023
    Assignee: FUJIFILM Corporation
    Inventors: Yuichiro Goto, Naoya Shimoju, Akihiro Hakamata
  • Patent number: 11703759
    Abstract: A transfer film includes a temporary support; and a photosensitive layer, in which the photosensitive layer includes a polymer A containing a constitutional unit represented by Formula A1, a constitutional unit derived from a monomer having an alicyclic structure, and a constitutional unit having a radically polymerizable group, a radically polymerizable compound, and a photopolymerization initiator, a content of the constitutional unit represented by Formula A1 is 10% by mass or more with respect to a total mass of the polymer A, a content of the constitutional unit derived from the monomer having the alicyclic structure is 15% by mass or more with respect to a total mass of the polymer A, and a glass transition temperature of a homopolymer of the monomer having the alicyclic structure is 120° C. or higher.
    Type: Grant
    Filed: May 18, 2020
    Date of Patent: July 18, 2023
    Assignee: FUJIFILM Corporation
    Inventors: Tatsuya Shimoyama, Akihiro Hakamata
  • Publication number: 20230219280
    Abstract: Provided are a method for producing a composition for forming an imprint pattern, including a filtering step of filtering a precursor composition to obtain a composition for forming an imprint pattern, in which in the filtering step, a speed at which the precursor composition passes through a filter does not continuously exceed 0.9 cm per hour for 10 seconds or longer; a method for producing a cured substance formed of the composition for forming an imprint pattern; an imprint pattern producing method using the composition for forming an imprint pattern; and a method for manufacturing a device, which includes the imprint pattern producing method.
    Type: Application
    Filed: March 7, 2023
    Publication date: July 13, 2023
    Applicant: FUJIFILM Corporation
    Inventor: Akihiro HAKAMATA
  • Publication number: 20230109153
    Abstract: There are provided a curable composition for imprinting, the curable composition including an organopolysiloxane having a radical polymerizable group, a radical generator, and a compound that has a monovalent hydrocarbon group having 4 to 11 carbon atoms and a poly(oxyalkylene) group, in which some or all of hydrogen atoms of the monovalent hydrocarbon group are optionally substituted with halogen atoms, a coating film of the composition, a method for producing the film, a cured product of the composition, a method for producing an imprint pattern using the composition, and a method for producing a device, the method including the method for producing an imprint pattern.
    Type: Application
    Filed: August 25, 2022
    Publication date: April 6, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Akihiro Hakamata, Naoya Shimoju
  • Publication number: 20230058755
    Abstract: There are provided a curable composition for imprinting, the curable composition including a polymerizable compound having two or more radical polymerizable groups, a radical polymerization initiator, and at least one compound selected from the group consisting of an organopolysiloxane having only one radical polymerizable group and an organopolysiloxane having no or one radical polymerizable group and having a poly(oxyalkylene) group, a cured product of the curable composition for imprinting, a method for producing an imprint pattern using the curable composition for imprinting, and a method for producing a device, the method including the method for producing an imprint pattern.
    Type: Application
    Filed: August 16, 2022
    Publication date: February 23, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Naoya SHIMOJU, Akihiro HAKAMATA
  • Publication number: 20230004079
    Abstract: Provided are a curable composition used for forming an interlayer existing between a base material and a curable layer, the curable composition including a curable main agent having a polymerizable functional group, a polymerization inhibitor, and a solvent, in which a content of the polymerization inhibitor is 1 part by mass or greater and lower than 1,000 parts by mass with respect to 1,000,000 parts by mass of the curable main agent; a kit including the curable composition; an interlayer formed from the curable composition; a laminate including the interlayer; an imprint pattern producing method using the laminate; and a method for manufacturing a device including the imprint pattern producing method.
    Type: Application
    Filed: August 18, 2022
    Publication date: January 5, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Naoya SHIMOJU, Akihiro HAKAMATA
  • Publication number: 20220380505
    Abstract: Provided are a composition for forming an imprint pattern, containing a polymerizable compound, a polymerization initiator, and a dye, in which the dye is a compound which has no metal element in a chemical structure; a cured substance consisting of the composition for forming an imprint pattern; an imprint pattern producing method using the composition for forming an imprint pattern; and a method for manufacturing a device, including the imprint pattern producing method.
    Type: Application
    Filed: July 27, 2022
    Publication date: December 1, 2022
    Applicant: FUJIFILM Corporation
    Inventor: Akihiro HAKAMATA
  • Publication number: 20220204814
    Abstract: Provided are a composition for forming an adhesive film for imprinting, including a resin having a specific aromatic ring and a polymerizable functional group in a side chain, in which the specific aromatic ring is an unsubstituted aromatic ring, or an aromatic ring having one or more substituents, in which a formula weight of each of the one or more substituents is 1000 or less, and a proportion of a polymerizable functional group including a heterocyclic ring in the polymerizable functional group is less than 3 mol %; an adhesive film to which the composition for forming an adhesive film is applied; a laminate; a method for manufacturing a laminate; a pattern producing method; and a method for manufacturing a semiconductor element.
    Type: Application
    Filed: March 17, 2022
    Publication date: June 30, 2022
    Applicant: FUJIFILM Corporation
    Inventors: Naoya SHIMOJU, Akihiro HAKAMATA
  • Publication number: 20220009152
    Abstract: Provided are: a composition for forming an underlayer film in an imprinting method, which includes a high-molecular-weight compound having a polymerizable functional group and a monomer having a plurality of crosslinking functional groups capable of being bonded to the polymerizable functional group, and in which a Hansen solubility parameter distance, which is a difference between a Hansen solubility parameter of the high-molecular-weight compound and a Hansen solubility parameter of the monomer, is 5.
    Type: Application
    Filed: September 24, 2021
    Publication date: January 13, 2022
    Applicant: FUJIFILM Corporation
    Inventors: Akihiro HAKAMATA, Naoya SHIMOJU, Yuichiro GOTO
  • Publication number: 20220009153
    Abstract: Provided are: a composition for forming a pattern, which contains a polymerizable compound, a photopolymerization initiator, and a sensitizer containing two or more of at least one kind of atom selected from the group consisting of a nitrogen atom and a sulfur atom, in which a length of a specific atom chain from one atom to another atom among the two or more atoms is 2 or 3 in terms of the number of atoms; a kit to which the composition for forming a pattern is applied; a cured film; a laminate; a pattern producing method; and a method for manufacturing a semiconductor element.
    Type: Application
    Filed: September 24, 2021
    Publication date: January 13, 2022
    Applicant: FUJIFILM Corporation
    Inventors: Yuichiro GOTO, Naoya SHIMOJU, Akinori SHIBUYA, Akihiro HAKAMATA
  • Publication number: 20210403630
    Abstract: Provided are: a composition for forming an underlayer film for imprinting, which contains a high-molecular-weight compound having a polymerizable group, a chelating agent, and a solvent, and a method for producing the same; a kit including the composition for forming an underlayer film; a pattern producing method using the composition for forming an underlayer film; and a method for manufacturing a semiconductor element, which includes the pattern producing method as a step.
    Type: Application
    Filed: September 13, 2021
    Publication date: December 30, 2021
    Applicant: FUJIFILM Corporation
    Inventors: Akihiro HAKAMATA, Yuichiro Goto, Naoya Shimoju
  • Publication number: 20210206910
    Abstract: Provided are a composition for forming an underlayer film for imprinting, including a curable component, and a particulate metal which has a particle diameter of 10 nm or larger, as measured by a single particle ICP-MASS method, and contains at least one kind of iron, copper, titanium, or lead, in which a content of the particulate metal is 50 ppt by mass to 10 ppb by mass with respect to the composition; a method for producing a composition for forming an underlayer film for imprinting; a pattern producing method; a method for manufacturing a semiconductor element; a cured product; and a kit.
    Type: Application
    Filed: March 25, 2021
    Publication date: July 8, 2021
    Applicant: FUJIFILM Corporation
    Inventors: Yuichiro GOTO, Akihiro HAKAMATA
  • Publication number: 20210018833
    Abstract: A curable composition for imprinting according to an embodiment of the present invention includes a monofunctional polymerizable compound having the following structure, a photopolymerization initiator, and a release agent represented by the following Formula (I) or Formula (II). The monofunctional polymerizable compound has the following structure: a linear or branched alkyl group, or an alicyclic ring, an aromatic ring, or an aromatic heterocycle that is substituted with a linear or branched alkyl group. The release agent is represented by the following Formula (I) or Formula (II). A1-(B1)x1-(D1)y1-(E1)z1-F1??Formula (I), A2-(B2)x2-(D2)y2-(E2)z2-F2??Formula (II), A1 and A2 represent a linear aliphatic hydrocarbon group having 4 to 11 carbon atoms, D1 and D2 represent an alkylene oxide structure, F1 represents a polar functional group, and F2 represents a hydrogen atom, or a linear, branched, or cyclic aliphatic hydrocarbon group having 4 to 11 carbon atoms.
    Type: Application
    Filed: September 24, 2020
    Publication date: January 21, 2021
    Applicant: FUJIFILM Corporation
    Inventors: Yuichiro GOTO, Akihiro HAKAMATA, Naoya SHIMOJU
  • Publication number: 20200373167
    Abstract: Provided is a kit including a curable composition for imprinting, and a composition for forming an underlayer film for imprinting, in which the composition for forming an underlayer film for imprinting contains a polymer having a polymerizable functional group, and a compound in which the lower one of a boiling point and a thermal decomposition temperature is 480° C. or higher and ?HSP, which is a Hansen solubility parameter distance from a component with the highest content contained in the curable composition for imprinting, is 2.5 or less. Furthermore, the present invention relates to a composition for forming an underlayer film for imprinting, a pattern forming method, and a method for manufacturing a semiconductor device, which are related to the kit.
    Type: Application
    Filed: August 13, 2020
    Publication date: November 26, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Yuichiro GOTO, Naoya SHIMOJU, Akihiro Hakamata
  • Publication number: 20200363718
    Abstract: Provided is a kit including a curable composition for imprinting which contains a polymerizable compound having an aromatic ring and a composition for forming an underlayer film for imprinting which contains a polymer and a solvent, in which the polymer contains at least one kind of specific constitutional unit and has a polymerizable group, a film formed of the composition for forming an underlayer film for imprinting is a solid film at 23° C., and a portion that has a continuous partial structure containing an aromatic ring which is included in the polymerizable compound and accounts for 60% by mass or more of the polymerizable compound is common to a continuous partial structure containing an aromatic ring which is included in a substituent R in a side chain in the polymer.
    Type: Application
    Filed: August 7, 2020
    Publication date: November 19, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Naoya Shimoju, Akinori Shibuya, Yuichiro Goto, Akihiro Hakamata
  • Publication number: 20200278610
    Abstract: A transfer film includes a temporary support; and a photosensitive layer, in which the photosensitive layer includes a polymer A containing a constitutional unit represented by Formula A1, a constitutional unit derived from a monomer having an alicyclic structure, and a constitutional unit having a radically polymerizable group, a radically polymerizable compound, and a photopolymerization initiator, a content of the constitutional unit represented by Formula A1 is 10% by mass or more with respect to a total mass of the polymer A, a content of the constitutional unit derived from the monomer having the alicyclic structure is 15% by mass or more with respect to a total mass of the polymer A, and a glass transition temperature of a homopolymer of the monomer having the alicyclic structure is 120° C. or higher.
    Type: Application
    Filed: May 18, 2020
    Publication date: September 3, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Tatsuya SHIMOYAMA, Akihiro HAKAMATA
  • Patent number: 10487210
    Abstract: Provided are: a coloring composition for dyeing including a compound represented by Formula (1) shown in this specification or a salt thereof; a coloring composition for textile printing in which the coloring composition for dyeing is used for textile printing; a compound which is preferable as a material of the coloring compositions; a textile printing method in which the above-described coloring composition for textile printing is used; an ink for ink jet textile printing including the above-described coloring composition for textile printing; and a dyed fabric.
    Type: Grant
    Filed: May 11, 2017
    Date of Patent: November 26, 2019
    Assignee: FUJIFILM Corporation
    Inventors: Kazunari Yagi, Keiichi Tateishi, Takashi Iizumi, Akihiro Hakamata, Yoshihiko Fujie