Patents by Inventor Akihiro Hisaii

Akihiro Hisaii has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heat-treating apparatus
    Publication number: 20040232136
    Abstract: A heat-treating plate has three balls arranged on an upper surface thereof. Top ends of the balls slightly protrude from the upper surface of the heat-treating plate. A substrate is heated as placed on and supported by the balls of the heating plate such that a minute spacing called a proximity gap is formed between the lower surface of the substrate and the upper surface of the heating plate. The upper surface of the heat-treating plate has a high emissivity of 0.9 to 1.0 to heat the substrate efficiently and with high precision.
    Type: Application
    Filed: May 17, 2004
    Publication date: November 25, 2004
    Applicant: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Akihiro Hisaii, Junichi Yoshida, Shigehiro Goto