Abstract: A charged particle beam device is provided that performs proper beam adjustment while suppressing a decrease in MAM time, with a simple configuration without adding a lens, a sensor, or the like. The charged particle beam device includes: an optical element which adjusts a charged particle beam emitted from a charged particle source; an adjustment element which adjusts an incidence condition of the charged particle beam with respect to the optical element; and a control device which controls the adjustment element, wherein the control device determines a difference between a first feature amount indicating a state of the optical element based on the condition setting of the optical element, and a second feature amount indicating a state where the optical element reaches based on the condition setting and executes adjustment by the adjustment element when the difference is greater than or equal to a predetermined value.

Abstract: A charged particle beam device is provided that performs proper beam adjustment while suppressing a decrease in MAM time, with a simple configuration without adding a lens, a sensor, or the like. The charged particle beam device includes: an optical element which adjusts a charged particle beam emitted from a charged particle source; an adjustment element which adjusts an incidence condition of the charged particle beam with respect to the optical element; and a control device which controls the adjustment element, wherein the control device determines a difference between a first feature amount indicating a state of the optical element based on the condition setting of the optical element, and a second feature amount indicating a state where the optical element reaches based on the condition setting and executes adjustment by the adjustment element when the difference is greater than or equal to a predetermined value.

Abstract: A data generation device 101 transmits communication data bound for a data receiving device 105 from a transmission unit, and a monitoring device 103 receives the communication data. The monitoring device 103 requests retransmission of the communication data to the data generation device 101, and the data generation device 101 retransmits the communication data from a retransmission unit being different from the transmission unit. The monitoring device 103 receives retransmission data retransmitted from the retransmission unit, compares the communication data with the retransmission data. If the communication data and the retransmission data are identical, the monitoring device 103 transmits the communication data to the data receiving device 105. If the communication data and the retransmission data are not identical, the monitoring device 103 transmits a message which notifies that the communication data and the retransmission data are not identical to the data generation device 101.

Abstract: A charged particle beam device is provided that performs proper beam adjustment while suppressing a decrease in MAM time, with a simple configuration without adding a lens, a sensor, or the like. The charged particle beam device includes: an optical element which adjusts a charged particle beam emitted from a charged particle source; an adjustment element which adjusts an incidence condition of the charged particle beam with respect to the optical element; and a control device which controls the adjustment element, wherein the control device determines a difference between a first feature amount indicating a state of the optical element based on the condition setting of the optical element, and a second feature amount indicating a state where the optical element reaches based on the condition setting and executes adjustment by the adjustment element when the difference is greater than or equal to a predetermined value.

Abstract: The invention has an object to provide a charged particle beam device in which it is possible to perform proper beam adjustment while suppressing a decrease in MAM time, with a simple configuration without adding a lens, a sensor, or the like.

Abstract: The invention has an object to provide a charged particle beam device in which it is possible to perform proper beam adjustment while suppressing a decrease in MAM time, with a simple configuration without adding a lens, a sensor, or the like.

Abstract: An authentication setting device includes an authentication setting unit to transmit a setting request requesting setting of instrument authentication information. An authentication execution device includes: an authentication information generation unit which, upon reception of the setting request, sets instrument authentication information; an authentication unit which, upon acquisition of an authentication request, outputs a collection request requesting collection of instrument attribute information; and a collection unit which, upon acquisition of the collection request, collects instrument attribute information of the time the collection request is acquired, and outputs the collected instrument attribute information.

Abstract: A data generation device 101 transmits communication data bound for a data receiving device 105 from a transmission unit, and a monitoring device 103 receives the communication data. The monitoring device 103 requests retransmission of the communication data to the data generation device 101, and the data generation device 101 retransmits the communication data from a retransmission unit being different from the transmission unit. The monitoring device 103 receives retransmission data retransmitted from the retransmission unit, compares the communication data with the retransmission data. If the communication data and the retransmission data are identical, the monitoring device 103 transmits the communication data to the data receiving device 105. If the communication data and the retransmission data are not identical, the monitoring device 103 transmits a message which notifies that the communication data and the retransmission data are not identical to the data generation device 101.

Abstract: A command code extraction part extracts, from among a plurality of command codes included in an instrument control program to be executed by a CPU unit and an input/output unit, a command code that is the same as an extraction target code indicated in an extraction target code list, as an extracted code. A sub-control program creation part creates, as a sub-control program to be executed by the input/output unit, a program including the extracted code that has been extracted. A main control program creation part creates, as a main control program to be executed by the CPU unit, a program which is obtained by removing from the instrument control program, the extracted code that has been extracted.

Abstract: A charged particle radiation apparatus includes a control device that switches between a first charged particle beam and a second charged particle beam, the first charged particle beam being scanned to acquire an image and a waveform signal, the second charged particle beam being scanned over a sample before the scan of the first charged particle beam and used to charge the sample more than the first charged particle beam; wherein the control device is configured to acquire at least one of signal waveform data and image data about a pattern formed on the sample in accordance with a scan performed on the sample by the second charged particle beam, and to stop, when the acquired data has proved to be indicative of a predetermined state, the scan of the second charged particle beam.

Abstract: A charged particle radiation apparatus includes a control device that switches between a first charged particle beam and a second charged particle beam, the first charged particle beam being scanned to acquire an image and a waveform signal, the second charged particle beam being scanned over a sample before the scan of the first charged particle beam and used to charge the sample more than the first charged particle beam; wherein the control device is configured to acquire at least one of signal waveform data and image data about a pattern formed on the sample in accordance with a scan performed on the sample by the second charged particle beam, and to stop, when the acquired data has proved to be indicative of a predetermined state, the scan of the second charged particle beam.

Abstract: It is possible to obtain a clean high-quality circuit board by removing affected material and foreign matter produced when a hole is formed. A manufacturing method of the circuit board includes (a) preparing a film-coated board material by bonding a film material as a mask to a board material, (b) forming a hole in the film-coated board material by applying a laser beam thereto, and (c) selectively removing the unnecessary material sticking to the film-coated board material from the film-coated board material by supersonic cleaning without peeling the film material off the board material. Unnecessary material such as foreign matter is produced when the hole is formed, and the unnecessary material sticks to the board material. After removal of such unnecessary material, a conductive material is disposed in the hole, using the film material as a mask, and the film material is later removed from the board material.

Abstract: A method and system of cleaning to remove cutting dust and the like generated and adhering to a board material (1a) during drilling for electrical connection, and drying the board material, in a process of manufacturing a circuit board for small electronic equipment and the like. A large amount of board materials can be treated without receiving thermal damage by performing the steps of: placing sheets of the board material that have absorbed moisture resulting from cleaning, like a stack in a vacuum chamber (11); and drying the board material by repeating evacuation and pressurization under predetermined conditions while heating the board material.

Abstract: It is possible to obtain a clean high-quality circuit board by removing affected material and foreign matter produced when a hole is formed. A manufacturing method of the circuit board includes (a) preparing a film-coated board material by bonding a film material as a mask to a board material, (b) forming a hole in the film-coated board material by applying a laser beam thereto, and (c) selectively removing the unnecessary material sticking to the film-coated board material from the film-coated board material by supersonic cleaning without peeling the film material off the board material. Unnecessary material such as foreign matter is produced when the hole is formed, and the unnecessary material sticks to the board material. After removal of such unnecessary material, a conductive material is disposed in the hole, using the film material as a mask, and the film material is later removed from the board material.

Abstract: It is possible to obtain a clean high-quality circuit board by removing affected material and foreign matter produced when a hole is formed. A manufacturing method of the circuit board includes (a) preparing a film-coated board material by bonding a film material as a mask to a board material, (b) forming a hole in the film-coated board material by applying a laser beam thereto, and (c) selectively removing the unnecessary material sticking to the film-coated board material from the film-coated board material by supersonic cleaning without peeling the film material off the board material. Unnecessary material such as foreign matter is produced when the hole is formed, and the unnecessary material sticks to the board material. After removal of such unnecessary material, a conductive material is disposed in the hole, using the film material as a mask, and the film material is later removed from the board material.

Abstract: A method and system of cleaning to remove cutting dust and the like generated and adhering to a board material (1a) during drilling for electrical connection, and drying the board material, in a process of manufacturing a circuit board for small electronic equipment and the like. A large amount of board materials can be treated without receiving thermal damage by performing the steps of: placing sheets of the board material that have absorbed moisture resulting from cleaning, like a stack in a vacuum chamber (11); and drying the board material by repeating evacuation and pressurization under predetermined conditions while heating the board material.

Abstract: It is possible to obtain a clean high-quality circuit board by removing affected material and foreign matter produced when a hole is formed. A manufacturing method of the circuit board includes (a) preparing a film-coated board material by bonding a film material as a mask to a board material, (b) forming a hole in the film-coated board material by applying a laser beam thereto, and (c) selectively removing the unnecessary material sticking to the film-coated board material from the film-coated board material by supersonic cleaning without peeling the film material off the board material. Unnecessary material such as foreign matter is produced when the hole is formed, and the unnecessary material sticks to the board material. After removal of such unnecessary material, a conductive material is disposed in the hole, using the film material as a mask, and the film material is later removed from the board material.

Abstract: The signal connecting through vias are provided on an edge side of a multilayer printed circuit board along a longitudinal direction thereof, and the signal wiring of the respective layers of the signal wiring layer is inclined with respected to the arrangement of the through vias.

Abstract: A magnetic field measurement apparatus with high sensitivity and high accuracy in which a Bi-substituted rare-earth iron garnet crystal with a high and no temperature dependent sensitivity constant grown by liquid phase epitaxy is used for a magneto-optic element.

Abstract: A current and voltage detector for a distribution system is provided with a lower section, an upper section and a fastener for combining the lower and upper sections into one body. The lower section comprises: a first groove for receiving an electric wire of the distribution system; an optical type current sensor; an optical type voltage sensor; and a potential divider for supplying a voltage to the voltage sensor. The upper section comprises: a second groove for receiving the electric wire; and a U-shaped magnetic core for applying a magnetic field to the current sensor.