Abstract: Phosphor color foil 1 comprises glass substrate 2, rotary motor 3 for rotating glass substrate 2, and phosphor (first phosphor) 5 annularly applied on the surface of glass substrate 2. The center of the applied region of phosphor 5 is different from the rotational center of glass substrate 2. The center of one or both of outer boundary line 5a and inner boundary line 5b of the applied region of phosphor 5 is different from the rotational center of glass substrate 2. Center axis 6 of glass substrate 2 is separated from the rotational center. Another phosphor (second phosphor) 9 is annularly applied adjacently to and inside or outside the applied region of phosphor 5.

Abstract: A light source apparatus for illuminating an image formation element, includes: a substrate; a driving source that rotates the substrate; a groove formed on a surface of the substrate so as to surround a rotational axis of the substrate; a phosphor layer formed in the groove; a laser light source that emits laser light delivered to the phosphor layer; and an optical system that guides first light emitted from the phosphor layer excited by the laser light, to the image formation element.

Abstract: An illumination apparatus includes a fluorescence unit, laser light irradiation means, and a beam integration unit. The fluorescence unit has a plurality of phosphors, in which the colors of fluorescence generated due to excitation differ, arranged in different regions. The laser light irradiation means irradiates laser light onto the regions of each color of the fluorescence unit while changing the position at which the laser light strikes the fluorescence unit. The beam integration unit integrates fluorescence from each region of the fluorescence unit on a display panel.

Abstract: An illumination device includes a light source that is configured to emit diffused light, and a plurality of light guiding bodies configured such that the light emitted by light source is entered from one end surface and the light is exited from other end surface. End surface of each light guiding body is arranged into a concave shape, and end surface is arranged into a planar shape.

Abstract: Provided is a fly eye lens capable of preventing the generation of steps on the boundaries between cells. The fly eye lens includes a plurality of cells arranged on first plane ?. The plurality of cells includes a pair of cells adjacent to each other, which have spherical centers on second plane ? parallel to first plane a and parts of spherical surfaces whose spherical radius differ, from each other, those parts being surfaces. The pair of cells satisfies the relationship of RI2?LI2=RO2?LO2, where RI is a spherical radius of the surface of one of the cells, RO is a spherical radius of the surface of the other cell, LI is a distance between the spherical center of the surface of one of the cells and a boundary surface between the pair of cells, and LO is a distance between the spherical center of the surface of the other cell and the boundary surface between the pair of cells.

Abstract: This invention realizes an illumination optical system with a small etendue that has a longer lifetime and a high degree of brightness. The invention includes: a laser light source that generates excitation light having a first wavelength; a phosphor wheel including a blue fluorescent light generation region that generates fluorescent light having a second wavelength by means of the excitation light, and a green fluorescent light generation region that generates fluorescent light having a third wavelength by means of the excitation light; an LED light source that generates light having a fourth wavelength; and a dichroic mirror that reflects fluorescent light having the second wavelength and fluorescent light having the third wavelength and allows light having the fourth wavelength to pass therethrough, to thereby emit each of the lights in the same direction.

Abstract: An illumination apparatus includes a fluorescence unit, laser light irradiation means, and a beam integration unit. The fluorescence unit has a plurality of phosphors, in which the colors of fluorescence generated due to excitation differ, arranged in different regions. The laser light irradiation means irradiates laser light onto the regions of each color of the fluorescence unit while changing the position at which the laser light strikes the fluorescence unit. The beam integration unit integrates fluorescence from each region of the fluorescence unit on a display panel.

Abstract: This invention realizes an illumination optical system with a small etendue that has a longer lifetime and a high degree of brightness. The invention includes: a laser light source that generates excitation light; a phosphor that generates a fluorescent light by means of the excitation light; a light tunnel that projects the excitation light that is incident at one end towards the phosphor from another end, and projects a fluorescent light generated with the phosphor from the one end; and a dichroic mirror that is provided between the laser light source and the light tunnel, and that allows the fluorescent light or the excitation light to pass through, and reflects the remaining excitation or fluorescent light.

Abstract: A three-panel projection display apparatus displays a color image by separating light emitted from a light source into lights of three primaries, i.e., red, green, and blue, with dichroic mirrors, by irradiating liquid crystal light valves with the respective separated lights, by combining the lights modulated by the respective liquid crystal light valves with a cross dichroic prism, and by projecting the combined light through a single projection lens onto a screen. The lengths of the light paths for the separated blue and green lights are equal to each other. The distance between a condenser lens and the liquid crystal light valve in the blue light path is shorter than the distance between a condenser lens and the liquid crystal light valve in the green light path.

Abstract: A three-panel projection display apparatus displays a color image by separating light emitted from a light source into lights of three primaries, i.e., red, green, and blue, with dichroic mirrors, by irradiating liquid crystal light valves with the respective separated lights, by combining the lights modulated by the respective liquid crystal light valves with a cross dichroic prism, and by projecting the combined light through a single projection lens onto a screen. The lengths of the light paths for the separated blue and green lights are equal to each other. The distance between a condenser lens and the liquid crystal light valve in the blue light path is shorter than the distance between a condenser lens and the liquid crystal light valve in the green light path.

Abstract: A three-panel projection display apparatus displays a color image by separating light emitted from a light source into lights of three primaries, i.e., red, green, and blue, with dichroic mirrors, by irradiating liquid crystal light valves with the respective separated lights, by combining the lights modulated by the respective liquid crystal light valves with a cross dichroic prism, and by projecting the combined light through a single projection lens onto a screen. The lengths of the light paths for the separated blue and green lights are equal to each other. The distance between a condenser lens and the liquid crystal light valve in the blue light path is shorter than the distance between a condenser lens and the liquid crystal light valve in the green light path.

Abstract: A three-panel projection display apparatus displays a color image by separating light emitted from a light source into lights of three primaries, i.e., red, green, and blue, with dichroic mirrors, by irradiating liquid crystal light valves with the respective separated lights, by combining the lights modulated by the respective modulating means with a cross dichroic prism, and by projecting the combined light through a single projection lens onto a screen. The lengths of the light paths for the separated blue and green lights are equal to each other. The distance between a condenser lens and the liquid crystal light valve in the blue light path is shorter than the distance between a condenser lens and the liquid crystal light valve in the green light path.

Abstract: Substrate positioning and substrate transporting are processed in parallel, thereby reducing substrate transfer apparatus wait time and improving substrate processing throughput. A substrate transfer apparatus 1 is configured in a single unit, a plural number of wafers W prior to notch alignment is transported at one time from a substrate accommodating container to a substrate alignment apparatus 22, and the plural number of notch aligned wafers is transported from the substrate alignment apparatus 22 to a boat 21. Two stages (upper and lower) of notch alignment units 4 and 5 that configure the substrate alignment apparatus 22 operate independently, and are capable of performing notch alignment, in total, on a number of wafers to be processed that is twice the number of wafers transported at one time by the substrate transfer apparatus 1.

Abstract: A projector apparatus comprises: a light modulation optical system which separates white light into a plurality of light components with respective wavelength bands, controls the intensity of each of the plurality of light components, and then composes the controlled plurality of light components; a projection lens for projecting the light composed in the light modulation optical system; a light source optical system for permitting the white light to exit therefrom, the light source optical system being disposed so that the optical axis of the light source optical system is displaced relative to the optical axis of the light modulation optical system; and a focusing lens which is disposed so that the optical axis of the focusing lens is coincident with the optical axis of the light modulation optical system, for focusing the light output from the light source optical system and inputting the focused light into the light modulation optical system.

Abstract: Particles are prevented from clinging to the back of a wafer in the notch alignment of the wafer, and the problems encountered when a plurality of wafers were aligned all at once are solved. Three support poles 105 are erected on a turntable 103. The substrate outer periphery 104b of wafers 104 is supported by the tapered portions of support pins 107 protruding from the support poles 105. The turntable 103 is driven by a single motor 106, and all of the wafers 104 are rotated at once. During rotation, the notches 104a of all the wafers 104 are detected by an optical sensor 116 provided to a sensor pole 117, and the angular position thereof is stored. The wafers 104 are rotated on the basis of the angular position data, and notch alignment is performed successively, starting with the bottom wafer 104.

Abstract: Particles are prevented from clinging to the back of a water in the notch alignment of the wafer, and the problems encountered when a plurality of wafers were aligned all at once are solved. Three support poles 105 are erected on a turntable 103. The substrate outer periphery 104b of wafers 104 is supported by the tapered portions of support pins 107 protruding from the support poles 105. The turntable 103 is driven by a single motor 106, and all of the wafers 104 are rotated at once. During rotation, the notches 104a of al the wafers 104 are detected by an optical sensor 116 provided to a sensor pole 117, and the angular position thereof is stored. The wafers 104 are rotated an the basis of the angular position data, and notch alignment is performed successively, starting with the bottom wafer 104.

Abstract: Substrate positioning and substrate transporting are processed in parallel, thereby reducing substrate transfer apparatus wait time and improving substrate processing throughput. A substrate transfer apparatus 1 is configured in a single unit, a plural number of wafers W prior to notch alignment is transported at one time from a substrate accommodating container to a substrate alignment apparatus 22, and the plural number of notch aligned wafers is transported from the substrate alignment apparatus 22 to a boat 21. Two stages (upper and lower) of notch alignment units 4 and 5 that configure the substrate alignment apparatus 22 operate independently, and are capable of performing notch alignment, in total, on a number of wafers to be processed that is twice the number of wafers transported at one time by the substrate transfer apparatus 1.

Abstract: An projector apparatus is disclosed which comprises: a light modulation optical system which separates white light into a plurality of light components with respective wavelength bands, controls the intensity of each of the plurality of light components, and then composes the controlled plurality of light components; a projection lens for projecting the light composed in the light modulation optical system; a light source optical system for permitting the white light to exit therefrom, the light source optical system being disposed so that the optical axis of the light source optical system is displaced relative to the optical axis of the light modulation optical system; and a focusing lens which is disposed so that the optical axis of the focusing lens in coincident with the optical axis of the light modulation optical system, for focusing the light output from the light source optical system and inputting the focused light into the light modulation optical system.

Abstract: In order to avoid appearance of indifferent zone of positioning signals obtained from a burst pattern recorded on a magnetic disk because of erase bands derived on outer border lines of burst tracks, width of a magnetic gap of the reproducing head of the invention is designed to be not narrower than width of a pitch of the burst tracks added with width of the erased band and not wider than two times of said width of a pitch of the burst tracks reduced of said width of the erased band.