Patents by Inventor Akihiro Takayama

Akihiro Takayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10959317
    Abstract: An EUV light generating apparatus includes: a chamber device including an inner wall surrounding a space, and a plasma generating region in the space in which plasma is generated from a droplet irradiated with a laser beam; a heat shield including a through-hole and a channel portion, and disposed between the inner wall and the plasma generating region; a gas supply device that supplies gas; a gas introducing cylinder that is provided in the space on a side opposite to the plasma generating region, extends toward the through-hole, and introduces the gas supplied from the gas supply device through the through-hole toward the plasma generating region over the heat shield; and an optical unit optically coupled to the space through an internal space of the gas introducing cylinder and the through-hole. An entire front end surface of the gas introducing cylinder faces the heat shield.
    Type: Grant
    Filed: July 24, 2020
    Date of Patent: March 23, 2021
    Assignee: Gigaphoton Inc.
    Inventor: Akihiro Takayama
  • Publication number: 20210080864
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Application
    Filed: November 24, 2020
    Publication date: March 18, 2021
    Applicant: Ricoh Company, Ltd.
    Inventors: Kentaro NODERA, Emi KITA, Akihiro TAKAYAMA, Susumu TATEYAMA, Shinnosuke KOSHIZUKA, Tatsuya KUBO, Teppei KIKUCHI
  • Publication number: 20210076478
    Abstract: An EUV light generating apparatus includes: a chamber device including an inner wall surrounding a space, and a plasma generating region in the space in which plasma is generated from a droplet irradiated with a laser beam; a heat shield including a through-hole and a channel portion, and disposed between the inner wall and the plasma generating region; a gas supply device that supplies gas; a gas introducing cylinder that is provided in the space on a side opposite to the plasma generating region, extends toward the through-hole, and introduces the gas supplied from the gas supply device through the through-hole toward the plasma generating region over the heat shield; and an optical unit optically coupled to the space through an internal space of the gas introducing cylinder and the through-hole. An entire front end surface of the gas introducing cylinder faces the heat shield.
    Type: Application
    Filed: July 24, 2020
    Publication date: March 11, 2021
    Applicant: Gigaphoton Inc.
    Inventor: Akihiro TAKAYAMA
  • Patent number: 10871729
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Grant
    Filed: February 17, 2020
    Date of Patent: December 22, 2020
    Assignee: Ricoh Company, Ltd.
    Inventors: Kentaro Nodera, Emi Kita, Akihiro Takayama, Susumu Tateyama, Shinnosuke Koshizuka, Tatsuya Kubo, Teppei Kikuchi
  • Patent number: 10716198
    Abstract: An extreme ultraviolet light generation apparatus includes: a chamber; an optical unit; a chamber reference member including a housing space in which the optical unit is housed; a height positioning mechanism configured to position, at a predetermined installation position in the housing space, the optical unit to a predetermined installation height while contacting a first part of the optical unit; and a movement mechanism configured to linearly move the optical unit in the horizontal direction in the housing space while keeping the optical unit at a guide height, and including a guide member and a retraction part, wherein the guide height of the optical unit while being guided to move toward the installation position by the guide surface is substantially equal to the installation height.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: July 14, 2020
    Assignee: Gigaphoton Inc.
    Inventor: Akihiro Takayama
  • Publication number: 20200183302
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Application
    Filed: February 17, 2020
    Publication date: June 11, 2020
    Applicant: Ricoh Company, Ltd.
    Inventors: Kentaro NODERA, Emi KITA, Akihiro TAKAYAMA, Susumu TATEYAMA, Shinnosuke KOSHIZUKA, Tatsuya KUBO, Teppei KIKUCHI
  • Patent number: 10606187
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: March 31, 2020
    Assignee: RICOH COMPANY, LTD.
    Inventors: Kentaro Nodera, Emi Kita, Akihiro Takayama, Susumu Tateyama, Shinnosuke Koshizuka, Tatsuya Kubo, Teppei Kikuchi
  • Patent number: 10582602
    Abstract: An extreme ultraviolet light generation apparatus includes: a chamber; an EUV light focusing mirror located in the chamber; and a hydrogen gas release unit that is located in the chamber and includes an opening configured to release a hydrogen gas inward from around the EUV light focusing mirror and a first cooling medium channel through which a cooling medium passes.
    Type: Grant
    Filed: August 8, 2019
    Date of Patent: March 3, 2020
    Assignee: Gigaphoton Inc.
    Inventors: Atsushi Ueda, Akihiro Takayama
  • Publication number: 20190364654
    Abstract: An extreme ultraviolet light generation apparatus includes: a chamber; an EUV light focusing mirror located in the chamber; and a hydrogen gas release unit that is located in the chamber and includes an opening configured to release a hydrogen gas inward from around the EUV light focusing mirror and a first cooling medium channel through which a cooling medium passes.
    Type: Application
    Filed: August 8, 2019
    Publication date: November 28, 2019
    Applicant: Gigaphoton Inc.
    Inventors: Atsushi UEDA, Akihiro TAKAYAMA
  • Publication number: 20190320521
    Abstract: An extreme ultraviolet light generation apparatus includes: a chamber; an optical unit; a chamber reference member including a housing space in which the optical unit is housed; a height positioning mechanism configured to position, at a predetermined installation position in the housing space, the optical unit to a predetermined installation height while contacting a first part of the optical unit; and a movement mechanism configured to linearly move the optical unit in the horizontal direction in the housing space while keeping the optical unit at a guide height, and including a guide member and a retraction part, wherein the guide height of the optical unit while being guided to move toward the installation position by the guide surface is substantially equal to the installation height.
    Type: Application
    Filed: June 26, 2019
    Publication date: October 17, 2019
    Applicant: Gigaphoton Inc.
    Inventor: Akihiro TAKAYAMA
  • Patent number: 10374381
    Abstract: A beam adjusting apparatus of an extreme ultraviolet light generating apparatus may include: a first pair of mirrors constituted by a first concave mirror and a first convex mirror, provided along the optical path of the pulsed laser beam; a second pair of mirrors constituted by a second concave mirror and a second convex mirror, which are arranged in an order reversed from the order of arrangement of the first concave mirror and the first convex mirror, provided along the optical path of the pulsed laser beam downstream from the first pair of mirrors; and a moving apparatus configured to simultaneously increase or simultaneously decrease the distance between the first concave mirror and the first convex mirror and the distance between the second concave mirror and the second convex mirror.
    Type: Grant
    Filed: May 9, 2017
    Date of Patent: August 6, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Toru Suzuki, Takashi Suganuma, Akihiro Takayama, Yoshiaki Kurosawa
  • Publication number: 20190064699
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Application
    Filed: October 26, 2018
    Publication date: February 28, 2019
    Inventors: Kentaro NODERA, Emi KITA, Akihiro TAKAYAMA, Susumu TATEYAMA, Shinnosuke KOSHIZUKA, Tatsuya KUBO, Teppei KIKUCHI
  • Patent number: 10146154
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: December 4, 2018
    Assignee: Ricoh Company, Ltd.
    Inventors: Kentaro Nodera, Emi Kita, Akihiro Takayama, Susumu Tateyama, Shinnosuke Koshizuka, Tatsuya Kubo, Teppei Kikuchi
  • Publication number: 20170363987
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Application
    Filed: August 30, 2017
    Publication date: December 21, 2017
    Inventors: Kentaro NODERA, Emi KITA, Akihiro TAKAYAMA, Susumu TATEYAMA, Shinnosuke KOSHIZUKA, Tatsuya KUBO, Teppei KIKUCHI
  • Patent number: 9835977
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Grant
    Filed: August 25, 2016
    Date of Patent: December 5, 2017
    Assignee: Ricoh Company, Ltd.
    Inventors: Kentaro Nodera, Emi Kita, Akihiro Takayama, Susumu Tateyama, Shinnosuke Koshizuka, Tatsuya Kubo, Teppei Kikuchi
  • Publication number: 20170250517
    Abstract: A beam adjusting apparatus of an extreme ultraviolet light generating apparatus may include: a first pair of mirrors constituted by a first concave mirror and a first convex mirror, provided along the optical path of the pulsed laser beam; a second pair of mirrors constituted by a second concave mirror and a second convex mirror, which are arranged in an order reversed from the order of arrangement of the first concave mirror and the first convex mirror, provided along the optical path of the pulsed laser beam downstream from the first pair of mirrors; and a moving apparatus configured to simultaneously increase or simultaneously decrease the distance between the first concave mirror and the first convex mirror and the distance between the second concave mirror and the second convex mirror.
    Type: Application
    Filed: May 9, 2017
    Publication date: August 31, 2017
    Applicant: Gigaphoton Inc.
    Inventors: Toru SUZUKI, Takashi SUGANUMA, Akihiro TAKAYAMA, Yoshiaki KUROSAWA
  • Publication number: 20160363887
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Application
    Filed: August 25, 2016
    Publication date: December 15, 2016
    Inventors: Kentaro NODERA, Emi KITA, Akihiro TAKAYAMA, Susumu TATEYAMA, Shinnosuke KOSHIZUKA, Tatsuya KUBO, Teppei KIKUCHI
  • Patent number: 9459556
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Grant
    Filed: August 11, 2015
    Date of Patent: October 4, 2016
    Assignee: Ricoh Company, Ltd.
    Inventors: Kentaro Nodera, Emi Kita, Akihiro Takayama, Susumu Tateyama, Shinnosuke Koshizuka, Tatsuya Kubo, Teppei Kikuchi
  • Publication number: 20150346635
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Application
    Filed: August 11, 2015
    Publication date: December 3, 2015
    Inventors: Kentaro NODERA, Emi KITA, Akihiro TAKAYAMA, Susumu TATEYAMA, Shinnosuke KOSHIZUKA, Tatsuya KUBO, Teppei KIKUCHI
  • Patent number: 9146497
    Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.
    Type: Grant
    Filed: March 4, 2013
    Date of Patent: September 29, 2015
    Assignee: Ricoh Company, Ltd.
    Inventors: Kentaro Nodera, Emi Kita, Akihiro Takayama, Susumu Tateyama, Shinnosuke Koshizuka, Tatsuya Kubo, Teppei Kikuchi