Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.

Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting he first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.

Abstract: A bearing structure includes: a bearing housing having a bearing hole to which an opening portion of an oil supply passage is opened; and a semi-floating bearing including: an annular main body portion, which is received in the bearing hole, and has a bearing surface formed on an inner peripheral surface thereof; and one or a plurality of oil-introducing holes, which are formed in the main body portion to penetrate from an outer peripheral surface of the main body portion to the inner peripheral surface of the main body portion. At least one of the one or the plurality of oil-introducing holes is partially or entirely opposed to the opening portion of the oil supply passage, and is formed into a special hole in which a length in a rotation direction of a shaft is larger than a length in an axial direction of the shaft.

Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.

Abstract: An alignment system is equipped with: an alignment system having an objective optical system, an irradiation system and a beam receiving system; and a calculation system, the objective optical system including an objective transparent plate that faces a wafer movable in a Y-axis direction, the irradiation system irradiating a grating mark provided at the wafer with measurement beams via the objective transparent plate while scanning the measurement beams in the Y-axis direction, the beam receiving system receiving diffraction beams from the grating mark of the measurement beams via the objective optical system, and the calculation system obtaining positional information of the grating mark on the basis of the output of the beam receiving system, wherein the objective transparent plate deflects or diffracts the diffraction beams diffracted at the grating mark toward the beam receiving system.

Abstract: An insulation film peeling method which radiates laser light onto a front end portion of an insulation film-coated conducting wire including a conducting wire and an insulation film in a longitudinal direction, and which peels a part of the insulation film up to a peeling boundary of a predetermined regulated peeling length, includes performing a rectilinear scan of a first region, in which a radiation position of the laser light moves from one side toward the other side and then moves from the other side toward the one side upon reaching the other side, and performing a unidirectional scan of a second region, in which the radiation of the laser light is performed from one side toward the other side and then the radiation position returns to the one side in a state in which the radiation of the laser light stops upon reaching the other side.

Abstract: A multi-arc bearing includes: a bearing surface a cross-sectional shape of which perpendicular to an axial direction of a shaft includes a plurality of arcs; and an oil supply groove provided on the bearing surface and extending in the axial direction of the shaft, the oil supply groove having a bearing clearance at a front side end portion in a rotation direction of the shaft smaller than a bearing clearance at a rear side end portion in the rotation direction.

Abstract: An alignment system is equipped with: an alignment system having an objective optical system, an irradiation system and a beam receiving system; and a calculation system, the objective optical system including an objective transparent plate that faces a wafer movable in a Y-axis direction, the irradiation system irradiating a grating mark provided at the wafer with measurement beams via the objective transparent plate while scanning the measurement beams in the Y-axis direction, the beam receiving system receiving diffraction beams from the grating mark of the measurement beams via the objective optical system, and the calculation system obtaining positional information of the grating mark on the basis of the output of the beam receiving system, wherein the objective transparent plate deflects or diffracts the diffraction beams diffracted at the grating mark toward the beam receiving system.

Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.

Abstract: A display control device includes a receiving portion configured to receive operation information input to a touch input portion, the touch input portion being located away from a display portion; and a processing portion configured to control display on the display portion in accordance with the operation information that is received by the receiving portion. The processing portion is configured to cause the display portion to display an image in which a cursor is disposed inside a plurality of icons that are circumferentially disposed, and the processing portion is configured to move the cursor to an icon among the plurality of icons, the icon being located in a direction of a slide operation received by the receiving portion.

Abstract: A display control device includes: a receiving unit configured to receive operation information input into a touch input portion placed at a position distanced from a display portion; and a processing unit configured to control display of the display portion according to the operation information received by the receiving unit. The processing unit is configured to display a plurality of first options belonging to a first hierarchy, a plurality of second options belonging to a second hierarchy as a hierarchy subsequent to the first hierarchy, and a cursor placed at one of the plurality of second options on the display portion when the receiving unit receives a selection operation in a state where the cursor is placed at one of the plurality of first options.

Abstract: In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.

Abstract: A control method of a movable body includes: a step of detecting a part of a plurality of grating marks provided at a wafer placed on a movable body that is movable within an XY plane, while scanning a measurement beam, that is irradiated from a mark detection system, in a Y-axis direction with respect to the part of plurality of grating marks, as moving the movable body in the Y-axis direction; a step of measuring an irradiation position of the measurement beam on the part of the plurality of grating marks; and a step of relatively moving the measurement beam and the movable body in an X-axis direction on the basis of the measurement result of the irradiation position and also detecting another grating mark while scanning the measurement beam in the Y-axis direction.

Abstract: A multi-arc bearing includes: a bearing surface a cross-sectional shape of which perpendicular to an axial direction of a shaft includes a plurality of arcs; and an oil supply groove provided on the bearing surface and extending in the axial direction of the shaft, the oil supply groove having a bearing clearance at a front side end portion in a rotation direction of the shaft smaller than a bearing clearance at a rear side end portion in the rotation direction.

Abstract: An alignment system is equipped with: an alignment system having an objective optical system, an irradiation system and a beam receiving system; and a calculation system, the objective optical system including an objective transparent plate that faces a wafer movable in a Y-axis direction, the irradiation system irradiating a grating mark provided at the wafer with measurement beams via the objective transparent plate while scanning the measurement beams in the Y-axis direction, the beam receiving system receiving diffraction beams from the grating mark of the measurement beams via the objective optical system, and the calculation system obtaining positional information of the grating mark on the basis of the output of the beam receiving system, wherein the objective transparent plate deflects or diffracts the diffraction beams diffracted at the grating mark toward the beam receiving system.

Abstract: A bearing structure includes: a bearing housing having a bearing hole to which an opening portion of an oil supply passage is opened; and a semi-floating bearing including: an annular main body portion, which is received in the bearing hole, and has a bearing surface formed on an inner peripheral surface thereof; and one or a plurality of oil-introducing holes, which are formed in the main body portion to penetrate from an outer peripheral surface of the main body portion to the inner peripheral surface of the main body portion. At least one of the one or the plurality of oil-introducing holes is partially or entirely opposed to the opening portion of the oil supply passage, and is formed into a special hole in which a length in a rotation direction of a shaft is larger than a length in an axial direction of the shaft.

Abstract: An alternating stack of insulating layers and sacrificial material layers is formed over a substrate. Memory stack structures including a memory film and a vertical semiconductor channel are formed through the alternating stack in an array configuration. Backside trenches extending along a lengthwise direction are formed through the alternating stack. Backside recesses are formed by removing the sacrificial material layers. Filling of the backside recesses with electrically conductive layers can be performed without voids or with minimal voids by arranging the memory stack structures with a non-uniform pitch. The non-uniform pitch may be along the direction perpendicular to the lengthwise direction such that the nearest neighbor distance among the memory stack structures is at a minimum between the backside trenches. Alternatively or additionally, the pitch may be modulated along the lengthwise direction to provide wider spacing regions that extend perpendicular to the lengthwise direction.

Abstract: While in active state, a first storage apparatus including first and second storage areas copies data stored in the first storage area to the second storage area, copies data stored in the first storage area to a third storage area so that data is synchronized between the first and third storage areas, and copies data stored in the second storage area to a fourth storage area so that data is synchronized between the second and fourth storage areas. When a second storage apparatus including the third and fourth storage areas has transitioned from standby to active state and thereby gets to receive access to the third storage area, instead of to the first storage area, from an external information processing apparatus, the second storage apparatus copies data stored in the third storage area to the fourth storage area, based on setting information stored in a storage unit.

Abstract: A control method of a movable body includes: a step of detecting a part of a plurality of grating marks provided at a wafer placed on a movable body that is movable within an XY plane, while scanning a measurement beam, that is irradiated from a mark detection system, in a Y-axis direction with respect to the part of plurality of grating marks, as moving the movable body in the Y-axis direction; a step of measuring an irradiation position of the measurement beam on the part of the plurality of grating marks; and a step of relatively moving the measurement beam and the movable body in an X-axis direction on the basis of the measurement result of the irradiation position and also detecting another grating mark while scanning the measurement beam in the Y-axis direction.

Abstract: A monitoring server includes a transmission and reception unit that receives information from a first storage device and a second storage device by performing polling to the first storage device and the second storage device at a certain interval, and transmits the received information to the first storage device and the second storage device at next polling. The first storage device and the second storage device includes a failover processing unit that inactivates a communication port when the failover processing unit determines that abnormality has occurred in a communication path between the first storage device and the second storage device and determines, based on the polling from the monitoring server, that abnormality has occurred in a communication path between the storage device and the monitoring server.