Abstract: A cleaning method of cleaning a solution treatment apparatus for applying a coating solution onto a substrate, the solution treatment apparatus including a holder holding and rotating the substrate; a coating solution supplier; and an inner cup surrounding the holder from a lateral side and having a peripheral edge side upper surface inclining down outward in a radial direction. The cleaning method includes introducing the cleaning solution to the storage chamber via the introduction hole, discharging the cleaning solution from the discharge port and making the cleaning solution flow down along the peripheral edge side upper surface of the inner cup, thereby cleaning away the coating solution adhering to the peripheral edge side upper surface. The discharging in the cleaning discharges the cleaning solution from discharge ports of the inner cup outward in the radial direction and obliquely upward.

Abstract: The curvature of a circular arc constituted by a side of a suction groove is made larger than that of a circular arc constituted by a side of a discharge groove. Thus, when the suction groove and the discharge groove are viewed in the axial direction of a drive shaft, the distance between the suction groove and the discharge groove in the radial direction of a rotary portion is short in a region intersecting with a line W perpendicular to a centerline, and increases in accordance with a decrease in distance from containment portions. It is therefore possible to ensure a sufficient distance between the discharge and suction grooves and enhance a total fluid pressure generated therebetween, and the contact surface pressure that is necessitated by a second side plate to obtain a press-back force when being in contact with an outer rotor and an inner rotor is reduced.

Abstract: The curvature of a circular arc constituted by a side of a suction groove is made larger than that of a circular arc constituted by a side of a discharge groove. Thus, when the suction groove and the discharge groove are viewed in the axial direction of a drive shaft, the distance between the suction groove and the discharge groove in the radial direction of a rotary portion is short in a region intersecting with a line W perpendicular to a centerline, and increases in accordance with a decrease in distance from containment portions. It is therefore possible to ensure a sufficient distance between the discharge and suction grooves and enhance a total fluid pressure generated therebetween, and the contact surface pressure that is necessitated by a second side plate to obtain a press-back force when being in contact with an outer rotor and an inner rotor is reduced.

Abstract: The present invention provides a method for vibrating, melting and creating well-bonded resin parts. Pressing the resin parts is started and then the pressing force is increased sharply to a predetermined value and the resin parts are vibrated to heat the resin part contact surfaces. After heat generation is started, the pressing force is increased gradually to a time, when the vibrating of the resin parts is finished, to push out the heated resin material from the contact surfaces. This exposes the new surface of the resin material which is heated at a low degree and thus can prevent the resin material at the contact surface from excessive heat and degradation. Thereafter, the vibration of the resin parts is stopped to solidify the resin material which is not degraded and is in a uniform, melted state throughout the contact surfaces.

Abstract: The present invention provides a method for vibrating, melting and creating well-bonded resin parts. Pressing the resin parts is started and then the pressing force is increased sharply to a predetermined value and the resin parts are vibrated to heat the resin part contact surfaces. After heat generation is started, the pressing force is increased gradually to a time, when the vibrating of the resin parts is finished, to push out the heated resin material from the contact surfaces. This exposes the new surface of the resin material which is heated at a low degree and thus can prevent the resin material at the contact surface from excessive heat and degradation. Thereafter, the vibration of the resin parts is stopped to solidify the resin material which is not degraded and is in a uniform, melted state throughout the contact surfaces.