Abstract: An aqueous ammonia composition having low surface tension is disclosed, which comprises ammonia water and a fluoroalkylsulfonamide compound having the following general formula:R.sup.1 SO.sub.2 NR.sup.2 --X--H (I)wherein R.sup.1 represents a fluoroalkyl group, R.sup.2 represents a hydrogen atom or a lower alkyl group, X represents a grouping selected from CH.sub.2 COO and (CH.sub.2 CH.sub.2 O).sub.n, wherein n is a positive integer from 1 to 20. This aqueous ammonia composition may be mixed with an aqueous hydrogen peroxide solution and water so that it can be used for cleaning a semiconductor substrate. The cleaning solution has outstanding stability, and exhibits improved efficacy in removing microparticles of impurities and excellent surface-protecting effect on the semiconductor substrate that is useful in the manufacture of high density integrated circuit elements.

Abstract: The drive control valve for constant speed is for driving a pneumatic actuator at a constant speed by use of a meter-out control mode, and includes a nonreturn valve for blocking discharged air from its pressure chamber and a relief valve for controlling the air pressure in the pressure chamber so as to be equal to an adjustable set pressure which is constant. When air pressure is supplied to one of the pressure chambers of the pneumatic actuator, the air pressure air discharged from the other pressure chamber is blocked by the nonreturn valve, so that it is discharged to the outside through a relief valve. In this case, however, the air pressure of the pressure chamber on the exhaust side is maintained at a set pressure for the relief valve which is set beforehand, and hence, the flow rate of air discharged from the pressure chamber becomes constant, and the pneumatic actuator is driven at a constant speed.

Abstract: A speed-reducing valve assembly is provided in an air passage through which compressed air is discharged when a pneumatic actuator is decelerated. The speed-reducing valve assembly comprises a three-way valve actuated by a signal generated when the actuator has reached the point where deceleration is started, a relief valve through which the compressed air in the passage is let out when the air pressure has reached the preset level, and a check valve that allows only the admission of compressed air into the same passage. The signal-actuated three-way valve brings the air passage of the actuator into communication with the passage in which the relief valve and check valve are provided. When the signal generated when the actuator has reached the deceleration starting point is fed to the speed-reducing valve assembly, the exhaust passage of the actuator communicates with the relief valve and check valve.

Abstract: A cylinder driving apparatus, wherein a head chamber and a rod chamber of a cylinder for driving a load upwardly and downwardly are communicated with a pressure accumulation tank by way of a balance pipeway equipped with an electromagnetic proportional flow control valve and a recycling pipeway equipped with a pressure control valve mechanism, respectively, and the load is driven by feeding air at reduced pressure to the rod chamber or discharging it to the external atmosphere by way of the pressure control valve mechanism while applying air pressure into the head chamber of the cylinder against the load by way of the electromagnetic proportional flow control valve for adjusting the driving speed.

Abstract: A cylinder driving system comprising balance cylinders communicated to an accumlator for supporting a load under balanced state, a drive cylinder of a small diameter connected by way of a switching control device to an air source for driving the load with reduced air consumption and a speed controller provided either to the balance cylinders or to the drive cylinder for switching the load driving speed between high and low speeds.