Patents by Inventor Akihito MORIOKA

Akihito MORIOKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Filtration filter, filtration method, production method of purified liquid chemical product for lithography, and method of forming resist pattern
    Patent number: 10429738
    Abstract: A filtration filter used for filtering a liquid chemical for lithography, provided with a polyimide resin porous membrane; a filtration method including allowing a liquid chemical for lithography to pass through the filtration filter; and a production method of a purified liquid chemical product for lithography, including filtering a liquid chemical for lithography by the filtration method.
    Type: Grant
    Filed: September 27, 2016
    Date of Patent: October 1, 2019
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Akihiko Nakata, Akihito Morioka, Tsukasa Sugawara
  • FILTRATION FILTER, FILTRATION METHOD, PRODUCTION METHOD OF PURIFIED LIQUID CHEMICAL PRODUCT FOR LITHOGRAPHY, AND METHOD OF FORMING RESIST PATTERN
    Publication number: 20170090293
    Abstract: A filtration filter used for filtering a liquid chemical for lithography, provided with a polyimide resin porous membrane; a filtration method including allowing a liquid chemical for lithography to pass through the filtration filter; and a production method of a purified liquid chemical product for lithography, including filtering a liquid chemical for lithography by the filtration method.
    Type: Application
    Filed: September 27, 2016
    Publication date: March 30, 2017
    Inventors: Akihiko NAKATA, Akihito MORIOKA, Tsukasa SUGAWARA