Abstract: An X-ray fluorescence analysis apparatus is provided with: an excitation source configured to excite an analysis target sample to emit a characteristic X-ray; an X-ray detector configured to detect the characteristic X-ray emitted from the analysis target sample; and an electromagnetic wave shield and a heat shield that are sequentially arranged from the analysis target sample toward the X-ray detector. The electromagnetic wave shield is provided with a through hole portion on which a through hole through which the characteristic X-ray passes is formed, the through hole having a size equal to or smaller than 50 ?m. The heat shield is provided with a window portion through which the characteristic X-ray is passed through.

Abstract: A radiation analyzer includes a transition edge sensor for detecting radiation and a cold head that cools the transition edge sensor. A current detecting mechanism detects a current flowing in the transition edge sensor, and a peak analyzing unit measures a peak value based on the current detected by the current detecting mechanism. A first heater is configured to heat the cold head to keep a temperature of the transition edge sensor constant. A sensitivity correction operating unit is configured to correct a sensitivity of the transition edge sensor based on a relation obtained in advance between an output of the first heater and the peak value measured by the peak analyzing unit.

Abstract: An X-ray fluorescence analysis apparatus is provided with: an excitation source configured to excite an analysis target sample to emit a characteristic X-ray; an X-ray detector configured to detect the characteristic X-ray emitted from the analysis target sample; and an electromagnetic wave shield and a heat shield that are sequentially arranged from the analysis target sample toward the X-ray detector. The electromagnetic wave shield is provided with a through hole portion on which a through hole through which the characteristic X-ray passes is formed, the through hole having a size equal to or smaller than 50 ?m. The heat shield is provided with a window portion through which the characteristic X-ray is passed through.

Abstract: A radiation analyzer includes: a transition edge sensor (TES) that detects radiation; a current detection mechanism that detects a current flowing in the TES; a peak analyzing unit that measures a peak value based on the current detected by the current detection mechanism; a first heater that heats the TES to keep a constant temperature; a sensitivity correction operating unit that corrects sensitivity of the TES based on a relation obtained in advance between an output of the first heater and a peak value measured by the peak analyzing unit.

Abstract: Provided is an X-ray analyzer capable of significantly suppressing an influence of an external magnetic field on a transition edge sensor (TES). The X-ray analyzer includes: a TES (7) for detecting energy of a received X-ray as a temperature change and outputting the temperature change as a current signal; a superconducting magnetic shield (8) which contains the TES (7) and enters a superconducting state; and a room temperature magnetic shield (9) which covers the superconducting magnetic shield (8) and performs external magnetic field shielding until the superconducting magnetic shield (8) enters the superconducting state, in which the superconducting magnetic shield (8) and the room temperature magnetic shield (9) are concentrically arranged to have a cylindrical shape.

Abstract: A superconducting radiometry apparatus has a micro-calorie meter that detects an energy of a radiant ray as a temperature change. A signal detection mechanism detects an electric current flowing to the micro-calorie meter. A heat addition device adds a quantity of heat to the micro-calorie meter. A peak value monitor measures, in synchronization with the addition of the quantity of heat to the micro-calorie meter, a peak value of an output voltage corresponding to an output signal from the signal detection mechanism. An energy correction device corrects, on the basis of an output from the peak value monitor, an energy value so as to become a peak value corresponding to the quantity of heat added to the micro-calorie meter.

Abstract: There is provided a superconducting radiometry apparatus capable of performing, while sample-measuring, an energy correction in regard to a fluctuation of a peak value of an output signal, which is due to a radiation heat and a magnetic field from an outside.

Abstract: To provide a superconducting X-ray detector capable of carrying out a measurement by a high energy resolution by restraining a reduction in a sensitivity by a self magnetic field.

Abstract: Provided is an X-ray analyzer capable of significantly suppressing an influence of an external magnetic field on a transition edge sensor (TES). The X-ray analyzer includes: a TES (7) for detecting energy of a received X-ray as a temperature change and outputting the temperature change as a current signal; a superconducting magnetic shield (8) which contains the TES (7) and enters a superconducting state; and a room temperature magnetic shield (9) which covers the superconducting magnetic shield (8) and performs external magnetic field shielding until the superconducting magnetic shield (8) enters the superconducting state, in which the superconducting magnetic shield (8) and the room temperature magnetic shield (9) are concentrically arranged to have a cylindrical shape.

Abstract: To provide a superconducting X-ray detector capable of carrying out a measurement by a high energy resolution by restraining a reduction in a sensitivity by a self magnetic field.

Abstract: A superconducting X-ray detection apparatus has a refrigerator, a cooling head cooled by the refrigerator, and a stacked structure connected to an end portion of the cooling head. The stacked structure comprises a sensor holder, a low-temperature first-stage amplifier connected to the sensor holder, and a superconducting X-ray detector mounted on the low-temperature first-stage amplifier.

Abstract: A three-dimensional structure analyzing system, which improves the energy resolution significantly, achieves low energy analysis, and allows the composition of a sample surface to be known with high accuracy. The three-dimensional structure analyzing system includes: an ion gun for irradiating at least a part of a sample with an ion beam thereby to machine the sample three-dimensionally; an electron gun for irradiating the sample three-dimensionally machined by the ion beam with electrons; an X-ray detector for detecting X-rays from the sample irradiated with electrons; and a composition analysis device for making a composition analysis of the sample based on a result of the detection by the X-ray detector. The X-ray detector is an energy dispersive superconducting X-ray detector.

Abstract: A superconducting X-ray detection apparatus is provided; wherein a structure is made, where in an end portion of the superconducting X-ray detection apparatus, which comprises a superconducting X-ray detector, low-temperature first-stage amplifier and sensor holder, influence of disturbance noise on output from the detector is minimized, and connection of wiring can be easily made. In addition, a superconducting X-ray analyzer using the apparatus is provided. A stacked structure, in which the superconducting X-ray detector is mounted in a three dimension on the low-temperature first-stage amplifier, is made.

Abstract: A cooling apparatus has a storage vessel for storing a liquefied gas and an evaporated gas produced by evaporation of the liquefied gas, a cooling head cooled by the evaporated gas to approximately a boiling temperature of the liquefied gas, piping for conveying the evaporated gas from the storage vessel to the cooling head, and a gas collection port provided at one end portion of the piping above a liquid level of the liquefied gas for collecting only the evaporated gas from the storage vessel. Thus, contamination of a gas line, needle valve, or the like, can be avoided. In addition, a liquid level sensor may be provided in the storage vessel for sensing the liquid level of the liquefied gas, so that the gas collection port may be vertically moved within the storage vessel to collect cooled gas close to the liquid level.

Abstract: There is disclosed cooling apparatus for cooling a sample or sensor to the neighborhood of the boiling temperature of a liquefied gas by transporting the gas. The cooling apparatus can be run stably such that piping or needle valve acting as a medium for transporting the liquefied gas is not clogged up. The apparatus is so constructed that a gas collection port is installed in a transfer tube and that gas produced by evaporation of the liquefied gas is collected and used as a coolant for a cooling head.

Abstract: In a superconductive quantum interference element comprising Josephson joints, a washer coil and a detecting coil constituting a superconductive loop and a feedback modulation coil, to provide a superconductive quantum interference element capable of promoting spatial resolution by preventing an effective detection area of the detecting coil from enlarging even when a width of a superconductive wiring constituting the detecting coil and a superconductive film at a vicinity of the detecting coil are larger than an inner diameter of the detecting coil, there is constructed a superconductive quantum interference element having a structure provided with a slit at a detecting coil and/or a superconductive film at a periphery of the detecting coil.

Abstract: A cooling apparatus has a liquid helium container for containing liquid helium, a vacuum chamber for providing heat insulation to external air, and a cooling head disposed in the vacuum chamber and capable of cooling down to a temperature region corresponding to the melting point of the liquid helium in the liquid helium container. An inlet port is disposed in the vacuum chamber for introducing thereinto the liquid helium stored in the liquid helium container. A vacuum heat insulation piping transfers liquid helium from the liquid helium container to the inlet port. A first piping is disposed in the vacuum chamber for transferring the liquid helium from the inlet port to the cooling head. A pump pumps liquid helium from the liquid helium container to the cooling head via the vacuum heat insulation piping, the inlet port and the first piping. A second piping transfers the liquid helium from the cooling head to the pump. At least part of the second piping is disposed in the vacuum chamber.

Abstract: In a superconductive quantum interference element comprising Josephson joints, a washer coil and a detecting coil constituting a superconductive loop and a feedback modulation coil, to provide a superconductive quantum interference element capable of promoting spatial resolution by preventing an effective detection area of the detecting coil from enlarging even when a width of a superconductive wiring constituting the detecting coil and a superconductive film at a vicinity of the detecting coil are larger than an inner diameter of the detecting coil, there is constructed a superconductive quantum interference element having a structure provided with a slit at a detecting coil and or a superconductive film at a periphery of the detecting coil.

Abstract: A superconducting quantum interference device is provided which can accurately measure only a magnetic field detected by a detection coil where the superconducting quantum interference device is used for a fluxmeter. A superconductor for enclosing a loop to be formed by a washer coil is formed at an upper portion or lower portion of the washer coil. Otherwise, a ground plane layer is formed with an interlayer insulation film sandwiched, in a position, except for a detection coil, particularly, of an upper layer or lower layer, of a washer coil being magnetically coupled to a feedback-modulation coil to which a signal is sent from an external control system. As a result, it is possible to prevent an external magnetic field from being coupled to other regions than the detection coil and hence accurately measure a magnetic field linked to the detection coil. In particular, the invention is effective for a reduced detection area of a detection coil thus suited for measurement on high spatial resolution.

Abstract: To provide cooling apparatus for cooling a workpiece or sensor down to the region of the melting point of helium where it is not necessary to pre-cool the inside of the apparatus using liquid nitrogen etc., and where the time and trouble involved in performing the cooling can be omitted.