Patents by Inventor Akiko Kagatsume

Akiko Kagatsume has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11380518
    Abstract: A measurement system comprising: a measurement apparatus observing a sample based on an observation condition including parameters; and an observation condition database storing data in which a search key related to the sample and the observation condition, a control unit calculating information on an observation condition of a sample is configured to: receive an observation condition search request including a search key related to a target sample; refer the observation condition database to search for the first data matching or similar to the search key related to the target sample included in the observation condition search request, calculate, based on the searched first data, a candidate observation condition of the measurement apparatus for observing the target sample, and output display data for presenting the candidate observation condition.
    Type: Grant
    Filed: August 9, 2019
    Date of Patent: July 5, 2022
    Assignee: Hitachi, Ltd.
    Inventors: Takafumi Miwa, Hirokazu Tamaki, Momoyo Enyama, Makoto Sakakibara, Sayaka Kurata, Atsuko Shintani, Takashi Dobashi, Kotoko Urano, Akiko Kagatsume, Minseok Park, Yasuhiro Shirasaki, Thantip Krasienapibal
  • Publication number: 20210407763
    Abstract: A measurement system comprising: a measurement apparatus observing a sample based on an observation condition including parameters; and an observation condition database storing data in which a search key related to the sample and the observation condition, a control unit calculating information on an observation condition of a sample is configured to: receive an observation condition search request including a search key related to a target sample; refer the observation condition database to search for the first data matching or similar to the search key related to the target sample included in the observation condition search request, calculate, based on the searched first data, a candidate observation condition of the measurement apparatus for observing the target sample, and output display data for presenting the candidate observation condition.
    Type: Application
    Filed: August 9, 2019
    Publication date: December 30, 2021
    Inventors: Takafumi MIWA, Hirokazu TAMAKI, Momoyo ENYAMA, Makoto SAKAKIBARA, Sayaka KURATA, Atsuko SHINTANI, Takashi DOBASHI, Kotoko URANO, Akiko KAGATSUME, Minseok PARK, Yasuhiro SHIRASAKI, Thantip KRASIENAPIBAL
  • Publication number: 20200225175
    Abstract: The purpose of the present invention is to provide a multi-coordinated analyzing device that makes it possible to readily observe the same visual field by using a plurality of different kinds of analyzing device and in which observation results for the same visual field are recorded collectively. An analyzing system according to the present invention includes: a first analyzing unit that obtains first observation data by analyzing a sample and that also obtains position information about the analyzed sample; a position setting unit that performs position alignment of the sample on the basis of the position information obtained by the first analyzing unit; and a second analyzing unit that obtains second observation data by analyzing, by using a method different from the method used by the first analyzing unit, the sample placed at the position aligned by the position setting unit (see FIG. 1).
    Type: Application
    Filed: March 16, 2018
    Publication date: July 16, 2020
    Inventors: Akiko KAGATSUME, Minseok PARK, Momoyo ENYAMA, Yasuhiro SHIRASAKI, Michio HATANO
  • Publication number: 20150009591
    Abstract: Approaches to improving head positioning accuracy in a hard disk drive, by reducing air pressure fluctuations that would otherwise cause unwanted coil torsion in a voice coil actuator, include a voice coil actuator having a streamlined structure configured to affect the flow of air acting upon a coil-supporting arm. The streamlined structure comprises an upper surface and a lower surface, where the upper surface is sloped downward toward the lower surface and the lower surface is sloped upward toward the upper surface.
    Type: Application
    Filed: July 8, 2013
    Publication date: January 8, 2015
    Inventors: Akiko Kagatsume, Taisuke Sugii, Yoshiyuki Hirono, Hajime Eguchi, Takashi Kouno
  • Patent number: 8344382
    Abstract: Provided is a method of promoting a deposition of semiconductor crystal nuclei on an insulating film such as a silicon oxide film even at a low temperature of 450° C. or lower in a reactive thermal CVD method. As one means thereof, a first semiconductor film is formed on an insulating substrate, and then semiconductor crystal nuclei are formed on parts of the first semiconductor film and simultaneously the first semiconductor film other than that in forming regions of the semiconductor crystal nuclei and their peripheries is removed by etching. Thereafter, a second semiconductor film is formed with using the semiconductor crystal nuclei as seeds.
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: January 1, 2013
    Assignees: Hitachi, Ltd., Tokyo Institute of Technology
    Inventors: Junichi Hanna, Isao Suzumura, Mieko Matsumura, Mutsuko Hatano, Kenichi Onisawa, Masatoshi Wakagi, Etsuko Nishimura, Akiko Kagatsume
  • Publication number: 20110108841
    Abstract: Provided is a method of promoting a deposition of semiconductor crystal nuclei on an insulating film such as a silicon oxide film even at a low temperature of 450° C. or lower in a reactive thermal CVD method. As one means thereof, a first semiconductor film is formed on an insulating substrate, and then semiconductor crystal nuclei are formed on parts of the first semiconductor film and simultaneously the first semiconductor film other than that in forming regions of the semiconductor crystal nuclei and their peripheries is removed by etching. Thereafter, a second semiconductor film is formed with using the semiconductor crystal nuclei as seeds.
    Type: Application
    Filed: June 26, 2009
    Publication date: May 12, 2011
    Inventors: Junichi Hanna, Isao Suzumura, Mieko Matsumura, Mutsuko Hatano, Kenichi Onisawa, Masatoshi Wakagi, Etsuko Nishimura, Akiko Kagatsume
  • Patent number: 6656838
    Abstract: To provide a process for producing a semiconductor, which can form a CVD film at a high film-forming rate with a good step coverage, good uniformities of film forming rate and sheet resistance in the in-plane region of a wafer and a good reproducibility at every wafers, and an apparatus for treating a semiconductor for the process. In a treating chamber kept under pressure of 1,000-50,000 Pa, a wafer is placed on a susceptor, and a film is deposited on the wafer by heating the wafer at 500° C. or higher by a plate-shaped heater through the susceptor, while supplying a feed gas into the treating chamber at 500-50,000 sccm through gas injection nozzles provided near the center of a shower plate provided approximately in parallel with the wafer at a distance of 1-20 mm from the wafer and kept at a temperature of 200° C. or lower.
    Type: Grant
    Filed: May 21, 2002
    Date of Patent: December 2, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Tomoji Watanabe, Akiko Kagatsume, Tadanori Yoshida
  • Publication number: 20020137334
    Abstract: [Object]
    Type: Application
    Filed: May 21, 2002
    Publication date: September 26, 2002
    Inventors: Tomoji Watanabe, Akiko Kagatsume, Tadanori Yoshida
  • Patent number: 6403479
    Abstract: To provide a process for producing a semiconductor, which can form a CVD film at a high film-forming rate with a good step coverage, good uniformities of film forming rate and sheet resistance in the in-plane region of a wafer and a good reproducibility at every wafers, and an apparatus for treating a semiconductor for the process. In a treating chamber kept under pressure of 1,000-50,000 Pa, a wafer is placed on a susceptor, and a film is deposited on the wafer by heating the wafer at 500° C. or higher by a plate-shaped heater through the susceptor, while supplying a feed gas into the treating chamber at 500-50,000 sccm through gas injection nozzles provided near the center of a shower plate provided approximately in parallel with the wafer at a distance of 1-20 mm from the wafer and kept at a temperature of 200° C. or lower.
    Type: Grant
    Filed: March 16, 2001
    Date of Patent: June 11, 2002
    Assignee: Hitachi, Ltd.
    Inventors: Tomoji Watanabe, Akiko Kagatsume, Tadanori Yoshida