Patents by Inventor Akimitsu Okura
Akimitsu Okura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7274017Abstract: Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion.Type: GrantFiled: May 26, 2005Date of Patent: September 25, 2007Assignees: Hitachi High-Technologies Corporation, Hitachi Science Systems, Ltd.Inventors: Akimitsu Okura, Masashi Kimura, Kenichi Hirane, Yoshihiko Nakayama
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Publication number: 20050218777Abstract: Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion.Type: ApplicationFiled: May 26, 2005Publication date: October 6, 2005Inventors: Akimitsu Okura, Masashi Kimura, Kenichi Hirane, Yoshihiko Nakayama
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Patent number: 6949752Abstract: Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion.Type: GrantFiled: November 18, 2002Date of Patent: September 27, 2005Assignees: Hitachi High-Technologies Corporation, Hitachi Science Systems, Ltd.Inventors: Akimitsu Okura, Masashi Kimura, Kenichi Hirane, Yoshihiko Nakayama
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Publication number: 20030155525Abstract: Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion.Type: ApplicationFiled: November 18, 2002Publication date: August 21, 2003Inventors: Akimitsu Okura, Masashi Kimura, Kenichi Hirane, Yoshihiko Nakayama
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Patent number: 6031235Abstract: A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1% and less and an outgassing rate of 2.times.10.sup.-6 (Torr.multidot.l/sec/cm.sup.2 :at 200.degree. C.) and less.Type: GrantFiled: June 24, 1999Date of Patent: February 29, 2000Assignee: Hitachi, Ltd.Inventors: Yasuhiko Ishida, Minoru Hiroki, Toshiaki Kobari, Osamu Satou, Yasushi Nakaizumi, Akimitsu Okura, Hideiti Kimura
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Patent number: 5412209Abstract: An electron beam apparatus comprises an electron beam source, a unit for irradiating an electron beam on a specimen, a detector for secondary electrons, an electrode for generating an electric field sufficient to draw out secondary electrons in a recess in the specimen from the recess, and a unit for generating a magnetic field for focusing secondary electrons drawn out of the recess. With this construction, the secondary electrons drawn out of the recess by the electric field reach the detector without being attracted by the electrode. By adopting this construction, a contact hole of high aspect ratio formed in a semiconductor device and having a small diameter and a large depth can be observed.Type: GrantFiled: November 27, 1992Date of Patent: May 2, 1995Assignee: Hitachi, Ltd.Inventors: Tadashi Otaka, Akimitsu Okura, Hiroshi Iwamoto, Hideo Todokoro, Tsutomu Komoda, Issei Tobita
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Patent number: 5393977Abstract: A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory is provided for storing operating conditions of a scanning electron microscope which are associated with identification information for specifying the specimen. The identification information is designated so that thereby at least one operating condition corresponding to the designated identification information is read out from the memory, and the read out operating condition is automatically set so that the scanning electron microscope is operated under the set operating condition.Type: GrantFiled: June 1, 1993Date of Patent: February 28, 1995Assignee: Hitachi, Ltd.Inventors: Akimitsu Okura, Mitsugu Sato, Osamu Yamada, Yasushi Nakaizumi, Eiichi Hazaki
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Patent number: 5147588Abstract: A hybrid carbon/carbon composite and a method of manufacturing a hybrid carbon/carbon composite, wherein a raw material containing carbon fibers with two or more different lengths and meso-phase carbon as a binder are raw materials. The raw materials are kneaded in the presence of adhesives, dried and defibrated, then molded under heat and pressure by hot press, and thereafter subjected to heat treatment.Type: GrantFiled: June 12, 1990Date of Patent: September 15, 1992Assignees: Akebono Brake Industry Co., Ltd., Akebono Research and Development Centre Ltd.Inventors: Akimitsu Okura, Toushoku Chou, Nobuo Kamioka
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Patent number: 4902453Abstract: A preformed yarn useful in forming fiber-reinforced carbon composite articles is disclosed which includes a core of a multiplicity of inorganic reinforcing fibers, a mixed powder provided in the interstices between the fibers and including a finely divided carbonaceous binder pitch and a finely divided coke, and a flexible sleeve formed of a thermoplastic resin and surrounding the core.Type: GrantFiled: June 2, 1988Date of Patent: February 20, 1990Assignee: Across Co., Ltd.Inventors: Akimitsu Okura, Toshoku Cho, Takao Nakagawa, Shimpei Gomi, Takuya Ueda
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Patent number: 4772502Abstract: A preformed yarn useful in forming fiber-reinforced carbon composite articles is disclosed which includes a core of a multiplicity of inorganic reinforcing fibers, a mixed powder provided in the interstices between the fibers and including a finely divided carbonaceous binder pitch and a finely divided coke, and a flexible sleeve formed of a thermoplastic resin and surrounding the core.Type: GrantFiled: July 29, 1987Date of Patent: September 20, 1988Assignee: Across Co., Ltd.Inventors: Akimitsu Okura, Toshoku Cho, Takao Nakagawa, Shimpei Gomi, Takuya Ueda
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Patent number: 4227080Abstract: A specimen holder holding a frozen specimen is adapted to engage the opened end of a recess in a specimen support, such that the frozen specimen is exposed to the inside of the recess. The mutually engaging specimen holder and the specimen support are shifted to a specimen chamber. In the specimen chamber, the specimen holder is separated from the specimen support and is received by a specimen receiving chamber. The specimen holder received by the specimen receiving member can be moved together with the latter to a specimen treating chamber. Cooling means for cooling the specimen receiving member is unitarily secured to the specimen receiving member, so as to be moved together with the specimen receiving member.Type: GrantFiled: December 4, 1978Date of Patent: October 7, 1980Assignee: Hitachi, Ltd.Inventors: Akimitsu Okura, Syobu Saito, Motohide Ukiana