Patents by Inventor Akinobu KUNISUE

Akinobu KUNISUE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220251700
    Abstract: A state variable including at least one physical quantity related to performance evaluation of film formation and film formation condition is observed, a reward for a determination result of the film formation condition is calculated based on the state variable, a function for determining the film formation condition from the state variable is updated based on the reward, the film formation condition under which the reward is obtained the most is determined, the film formation condition is at least one of a first parameter related to a vacuum evacuation system, a second parameter related to a heating and cooling system, a third parameter related to an evaporation source system, a fourth parameter related to a table system, and a fifth parameter related to a process gas system, and the physical quantity is a film quality characteristic, a mechanical characteristic, and a physical characteristic that are related to the film.
    Type: Application
    Filed: July 15, 2020
    Publication date: August 11, 2022
    Inventors: Akinobu KUNISUE, Tetsuya TAKAHASHI, Yosuke NAKASHIMA