Patents by Inventor Akinori Iso
Akinori Iso has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11906246Abstract: According to one embodiment, an organic film forming apparatus includes a chamber configured to maintain an atmosphere more reduced than an atmospheric pressure, at least one processing room provided inside the chamber and being surrounded by a cover, and an exhaust part configured to exhaust the inside the chamber. The processing room includes an upper heating part including first heaters, a lower heating part including second heaters, and facing the upper heating part, an upper heat equalizing plate provided on the lower heating part side of the upper heating part, a lower heat equalizing plate provided on the upper heating part side of the lower heating part, and workpiece supporters configured to support a workpiece through a gap between the upper and lower heat equalizing plates.Type: GrantFiled: June 12, 2020Date of Patent: February 20, 2024Assignee: SHIBAURA MECHATRONICS CORPORATIONInventors: Yukinobu Nishibe, Akinori Iso, Keigo Oomori, Takashi Takahashi
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Publication number: 20230107154Abstract: Provided is a maintenance method of a heat treatment apparatus including a chamber having a box shape and provided with a heater and a receiving member that supports a cassette having a box shape including a space in which a workpiece is supported. The maintenance method includes: attaching a loading/unloading jig including a roller on an upper portion and capable of moving the roller upward and downward, to the receiving member; transmitting the cassette supported by the receiving member onto the roller by raising the loading/unloading jig; unloading the cassette to an outside of the chamber by moving the cassette on the roller; loading the cassette into the chamber by moving the cassette on the roller; transmitting the cassette to the receiving member by lowering the loading/unloading jig; and detaching the loading/unloading jig from the receiving member.Type: ApplicationFiled: September 23, 2022Publication date: April 6, 2023Inventors: Junji ISHIHARA, Akinori ISO, Hirokazu MASUDA
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Publication number: 20220248502Abstract: According to an embodiment of the present disclosure, a heat treatment device includes: a chamber capable of maintaining an atmosphere that is decompressed from an atmospheric pressure; an exhaust unit capable of exhausting an inside of the chamber through an exhaust port provided in the chamber; a support portion provided inside the chamber and capable of supporting a workpiece; a first heating unit provided inside the chamber and capable of heating the workpiece; an adhesion preventive plate detachably provided on an inner wall of the chamber; and a second heating unit capable of heating the adhesion preventive plate.Type: ApplicationFiled: January 24, 2022Publication date: August 4, 2022Inventors: Yuichi IMAOKA, Yosuke MOCHIZUKI, Kyota KUROIWA, Akinori ISO
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Publication number: 20200310183Abstract: According to one embodiment, an organic film forming apparatus includes a chamber configured to maintain an atmosphere more reduced than an atmospheric pressure, at least one processing room provided inside the chamber and being surrounded by a cover, and an exhaust part configured to exhaust the inside the chamber. The processing room includes an upper heating part including first heaters, a lower heating part including second heaters, and facing the upper heating part, an upper heat equalizing plate provided on the lower heating part side of the upper heating part, a lower heat equalizing plate provided on the upper heating part side of the lower heating part, and workpiece supporters configured to support a workpiece through a gap between the upper and lower heat equalizing plates.Type: ApplicationFiled: June 12, 2020Publication date: October 1, 2020Inventors: Yukinobu Nishibe, Akinori Iso, Keigo Oomori, Takashi Takahashi
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Patent number: 10421622Abstract: According to one embodiment, a floating conveyor is configured to convey a substrate while floating the substrate. The floating conveyor includes a lower floating section and an upper floating section with a conveying path of the substrate therebetween. A plurality of floating blocks that constitute at least one of the lower floating section and the upper floating section are arranged to be separated by a space, and a floating block that constitutes the other is arranged to face the space.Type: GrantFiled: December 28, 2017Date of Patent: September 24, 2019Assignee: SHIBAURA MECHATRONICS CORPORATIONInventors: Yuichi Imaoka, Akinori Iso
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Patent number: 10325787Abstract: According to one embodiment, a substrate processing apparatus (1) includes: a support (4) configured to support a substrate (W) in a plane; a rotation mechanism (5) configured to rotate the support (4) about an axis that crosses a surface of the substrate (W) supported by the support (4) as a rotation axis; a plurality of nozzles (6a, 6b, 6c), which are aligned from the center toward the periphery of the substrate (W) supported by the support (4), configured to eject a treatment liquid to the surface of the substrate (W) on the support (4) being rotated by the rotation mechanism (5), and a controller (9) configured to control the nozzles to eject the treatment liquid at different ejection timings according to the thickness of a film of the treatment liquid formed on the surface of the substrate (W) on the support (4) being rotated by the rotation mechanism (5).Type: GrantFiled: March 25, 2014Date of Patent: June 18, 2019Assignee: SHIBAURA MECHATRONICS CORPORATIONInventors: Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima, Akinori Iso
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Publication number: 20180178993Abstract: According to one embodiment, a floating conveyor is configured to convey a substrate while floating the substrate. The floating conveyor includes a lower floating section and an upper floating section with a conveying path of the substrate therebetween. A plurality of floating blocks that constitute at least one of the lower floating section and the upper floating section are arranged to be separated by a space, and a floating block that constitutes the other is arranged to face the space.Type: ApplicationFiled: December 28, 2017Publication date: June 28, 2018Applicant: SHIBAURA MECHATRONICS CORPORATIONInventors: Yuichi IMAOKA, Akinori ISO
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Publication number: 20110278261Abstract: According to one embodiment, a solid removal process in a filter and a positive metal ion removal process in a positive metal ion-exchange resin column are performed sequentially through an etching acid waste liquid disposal circulation flow channel, the solid removal process is performed on an upstream side of the positive metal ion removal process, furthermore after the positive metal ion removal process, a negative metal ion removal process removing at least B using a chelate forming fiber or a chelate forming resin is performed on a downstream side of the etching acid waste liquid disposal circulation flow channel, thereby an etching acid waste liquid is recycled sequentially through the etching acid waste liquid disposal circulation flow channel.Type: ApplicationFiled: May 10, 2011Publication date: November 17, 2011Applicants: SHIBAURA MECHATRONICS CORPORATION, ECOCYCLE CORPORATIONInventors: Hideki Himi, Puchalapalli Sreenivasulu Reddy, Masahiro Abe, Akinori Iso
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Patent number: 6363950Abstract: An apparatus for processing a substrate in which the substrate is successively processed with different kinds of process solution. A spin chuck supports the substrate. A driving source rotates the spin chuck A nozzle member supplies a first process solution prepared by mixing sulfuric acid and a hydrogen peroxide solution at a predetermined mixing ratio to the substrate. A switching mechanism selects the sulfuric acid, the hydrogen peroxide solution and the second process solution supplied to the nozzle member A concentration adjusting mechanism adjusts the ratio of sulfuric acid to the hydrogen peroxide solution, which collectively form the first process solution, supplied to the nozzle member. A control device controls the supply of sulfuric acid, the hydrogen peroxide solution and the second process solution, which is switched by the switching mechanism.Type: GrantFiled: August 22, 2001Date of Patent: April 2, 2002Assignee: Shibaura Mechatronics CorporationInventors: Yukinobu Nishibe, Akinori Iso
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Publication number: 20010052354Abstract: A substrate is processed with a first process solution prepared by mixing sulfuric acid with a hydrogen peroxide solution, followed by processing the substrate with a second process solution. After the substrate is processed with the first process solution, the supply of sulfuric acid is stopped, with the hydrogen peroxide alone being supplied to the substrate. Then, the supply of the hydrogen peroxide solution is stopped, and the substrate is rinsed with a second process solution. The particular processing makes it possible to prevent the second process solution from reacting with sulfuric acid.Type: ApplicationFiled: August 22, 2001Publication date: December 20, 2001Applicant: Shibaura Mechatronics CorporationInventors: Yukinobu Nishibe, Akinori Iso
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Patent number: 6299697Abstract: A substrate is processed with a first process solution prepared by mixing sulfuric acid with a hydrogen peroxide solution, followed by processing the substrate with a second process solution. After the substrate is processed with the first process solution, the supply of sulfuric acid is stopped, with the hydrogen peroxide alone being supplied to the substrate. Then, the supply of the hydrogen peroxide solution is stopped, and the substrate is rinsed with a second process solution. The particular processing makes it possible to prevent the second process solution from reacting with sulfuric acid.Type: GrantFiled: August 23, 2000Date of Patent: October 9, 2001Assignee: Shibaura Mechatronics CorporationInventors: Yukinobu Nishibe, Akinori Iso