Abstract: A method of assessing a probe by measuring a known sample whose shape is known with the probe in an electronic microscope, the known sample having a projection part on a surface thereof, and the projection part having a shape tapered toward a vertex thereof, the method comprising a step of measuring circle equivalent radius of the projection part, a step of comparing the circle equivalent radius with a first threshold value, and a step of determining that the probe is satisfactory when the width is less than the first threshold value, and a step of determining that the probe is unsatisfactory when the width is equal to or greater than the first threshold value.

Abstract: A scanning probe microscope (50) is provided with a probe (20), a cantilever (2) supporting the probe (20), a scanner (43) on which a sample (S) is placed, a drive unit (4) for changing the distance between the sample (S) and the probe (20), and a displacement measurement unit (3) for measuring the displacement of the cantilever (2).

Abstract: A data processing device for a scanning probe microscope, the data processing device processing biaxial data indicating a change in a second physical quantity with respect to a change in a first physical quantity, the biaxial data being acquired for each of a plurality of measurement points on a sample surface by scanning the sample surface with a probe using a scanning probe microscope, the data processing device includes: a feature amount calculator 41 that acquires one or a plurality of types of feature amounts from the biaxial data at each measurement point; a feature amount selector 42 that causes a user to select one of the one or the plurality of types of feature amounts; a two-dimensional mapping image display unit 43 that displays the feature amount on a screen as a two-dimensional mapping image with each measurement point as one pixel based on selection of the feature amount by the user; and a biaxial data display unit 44 that, when the user selects one of the pixels in the two-dimensional mapping i

Abstract: A holding member, a sample container, and a mounting member are used in a scanning probe microscope. The mounting member is made of an elastically deformable material such as a rubber material. The mounting member includes an annular main body. When the mounting member is mounted on the holding member and the sample container, the holding member is inserted into the sample container while the main body of the mounting member is elastically deformed along an outer circumferential surface of the sample container. One end of the mounting member is detached from the outer circumferential surface of the sample container, and brought into close contact with an outer circumferential surface of the holding member. When the holding member and the sample container are relatively moved, the main body of the mounting member is elastically deformed.

Abstract: A data processing device for a scanning probe microscope, the data processing device processing biaxial data indicating a change in a second physical quantity with respect to a change in a first physical quantity, the biaxial data being acquired for each of a plurality of measurement points on a sample surface by scanning the sample surface with a probe using a scanning probe microscope, the data processing device includes: a feature amount calculator 41 that acquires one or a plurality of types of feature amounts from the biaxial data at each measurement point; a feature amount selector 42 that causes a user to select one of the one or the plurality of types of feature amounts; a two-dimensional mapping image display unit 43 that displays the feature amount on a screen as a two-dimensional mapping image with each measurement point as one pixel based on selection of the feature amount by the user; and a biaxial data display unit 44 that, when the user selects one of the pixels in the two-dimensional mapping i

Abstract: A holding member, a sample container, and a mounting member are used in a scanning probe microscope. The mounting member is made of an elastically deformable material such as a rubber material. The mounting member includes an annular main body. When the mounting member is mounted on the holding member and the sample container, the holding member is inserted into the sample container while the main body of the mounting member is elastically deformed along an outer circumferential surface of the sample container. One end of the mounting member is detached from the outer circumferential surface of the sample container, and brought into close contact with an outer circumferential surface of the holding member. When the holding member and the sample container are relatively moved, the main body of the mounting member is elastically deformed.

Abstract: A sample holder includes a sample container and a fixing member. The fixing member is inserted into the sample container in a state in which a sample is placed, and fixes the sample by sandwiching the sample between the fixing member and a bottom surface of the sample container. At this time, a peripheral edge portion of the fixing member is elastically deformed by being inserted into the sample container, and the fixing member sandwiches the sample by its elastic force. Therefore, even when the sample is placed in the sample container in the state of being immersed in a liquid, the sample can be held in a stable state by the fixing member.

Abstract: A sample holder includes a sample container and a fixing member. The fixing member is inserted into the sample container in a state in which a sample is placed, and fixes the sample by sandwiching the sample between the fixing member and a bottom surface of the sample container. At this time, a peripheral edge portion of the fixing member is elastically deformed by being inserted into the sample container, and the fixing member sandwiches the sample by its elastic force. Therefore, even when the sample is placed in the sample container in the state of being immersed in a liquid, the sample can be held in a stable state by the fixing member.

Abstract: A surface analyzer with which users only need to perform simple operations to quantitatively compare different physical quantities, such as the altitude and phase, in a region of interest on a sample is provided. A three-dimensional color image created by mapping color information corresponding to the phase onto a three-dimensional image created from two-dimensional distribution data of a sample's altitude is displayed in an analysis result display screen. A section image is superposed on the three-dimensional color image. The one-dimensional area at which the section image intersects the sample is defined as the region of interest. The altitude and phase along this region of interest are graphically shown on the graph display area. Various characteristic values at the position of these cursors, such as the altitude and phase values or the difference in these values between two cursors, are displayed in a characteristic value table.

Abstract: A surface analyzer with which users only need to perform simple operations to quantitatively compare different physical quantities, such as the altitude and phase, in a region of interest on a sample is provided. A three-dimensional color image created by mapping color information corresponding to the phase onto a three-dimensional image created from two-dimensional distribution data of a sample's altitude is displayed in an analysis result display screen. A section image is superposed on the three-dimensional color image. The one-dimensional area at which the section image intersects the sample is defined as the region of interest. The altitude and phase along this region of interest are graphically shown on the graph display area. Various characteristic values at the position of these cursors, such as the altitude and phase values or the difference in these values between two cursors, are displayed in a characteristic value table.