Abstract: A method of manufacturing a mask blank glass substrate or mask blank that includes a mark forming step, and a mask blank glass substrate or mask blank that includes a mark. The mark is a pit formed by irradiating laser light onto a mirror-like surface in an area, having no influence on transfer, on a surface of the mask blank glass substrate. The pit is used as a marker for individually identifying or managing the mask blank glass substrate. The marker may be correlated with information including at least one of substrate information about the mask blank glass substrate, thin film information about the mask pattern thin film, and resist film information about the resist film. A mask blank glass substrate with marker correlated to at least one of the resist film information and thin film information may be used to manufacture a new mask blank.

Abstract: A method of manufacturing a mask blank glass substrate or mask blank that includes a mark forming step, and a mask blank glass substrate or mask blank that includes a mark. The mark is a pit formed by irradiating laser light onto a mirror-like surface in an area, having no influence on transfer, on a surface of the mask blank glass substrate. The pit is used as a marker for individually identifying or managing the mask blank glass substrate. The marker may be correlated with information including at least one of substrate information about the mask blank glass substrate, thin film information about the mask pattern thin film, and resist film information about the resist film. A mask blank glass substrate with marker correlated to at least one of the resist film information and thin film information may be used to manufacture a new mask blank.

Abstract: A method of manufacturing a mask blank glass substrate or mask blank that includes a mark forming step, and a mask blank glass substrate or mask blank that includes a mark. The mark is a pit formed by irradiating laser light onto a mirror-like surface in an area, having no influence on transfer, on a surface of the mask blank glass substrate. The pit is used as a marker for individually identifying or managing the mask blank glass substrate. The marker may be correlated with information including at least one of substrate information about the mask blank glass substrate, thin film information about the mask pattern thin film, and resist film information about the resist film. A mask blank glass substrate with marker correlated to at least one of the resist film information and thin film information may be used to manufacture a new mask blank.

Abstract: A container is adapted to receive a mask blank having a resist film and includes a container body having an upper opening and a cap put on the container body. The container body has an opening edge provided with an annular elastic member made of polyolefin elastomer or the like and extending throughout entire circumference. When the cap is put on the container body, the elastic member is interposed at a joint portion between the cap and the container body to hermetically seal the container.

Abstract: A container is adapted to receive a mask blank having a resist film and includes a container body having an upper opening and a cap put on the container body. The container body has an opening edge provided with an annular elastic member made of polyolefin elastomer or the like and extending throughout entire circumference. When the cap is put on the container body, the elastic member is interposed at a joint portion between the cap and the container body to hermetically seal the container.

Abstract: A container is adapted to receive a mask blank having a resist film and includes a container body having an upper opening and a cap put on the container body. The container body has an opening edge provided with an annular elastic member made of polyolefin elastomer or the like and extending throughout entire circumference. When the cap is put on the container body, the elastic member is interposed at a joint portion between the cap and the container body to hermetically seal the container.

Abstract: A container is adapted to receive a mask blank having a resist film and includes a container body having an upper opening and a cap put on the container body. The container body has an opening edge provided with an annular elastic member made of polyolefin elastomer or the like and extending throughout entire circumference. When the cap is put on the container body, the elastic member is interposed at a joint portion between the cap and the container body to hermetically seal the container.

Abstract: The present invention provides a supporting member for thin-film-coated boards that is capable of sufficiently suppressing dust generated because of particles and the like. The present invention also provides a storage container suitable for storing thin-film-coated boards that has such a supporting member so as to store the thin-film-coated boards at a high level of cleanliness. The supporting members (2) and (5) have supporting means for supporting the thin-film-coated boards (1) such as mask blanks. The surface of at least a portion of the supporting means that comes into contact with the thin-film-coated boards (1) is permitted to be a smooth plane having an arithmetic average surface roughness (Ra) of 0.1 ?m or lower. The surface of at least the portion of the supporting means that comes into contact with the thin-film-coated boards (1) is composed of, for instance, a resin material.

Abstract: A method of manufacturing a mask blank glass substrate includes a marking step of irradiating laser light onto a mirror-like surface in an area, having no influence on transfer, on a surface of the mask blank glass substrate to thereby form a pit that is used as a marker for identifying or managing the mask blank glass substrate.

Abstract: A container is adapted to receive a mask blank having a resist film and includes a container body having an upper opening and a cap put on the container body. The container body has an opening edge provided with an annular elastic member made of polyolefin elastomer or the like and extending throughout entire circumference. When the cap is put on the container body, the elastic member is interposed at a joint portion between the cap and the container body to hermetically seal the container.

Abstract: An X-ray mask including a mask support formed into the shape of a frame, an X-ray-transparent film which is supported so as to extend over the surface of the frame-shaped mask support and which permits transmission of X-rays, and a desired X-ray-absorbing film pattern laid on the X-ray-transparent film, wherein the mask support has a thickness which by itself affords sufficient mechanical strength; and a step is formed along the periphery of the mask support.

Abstract: A magnetic recording disk is zone-textured by using two or more tubular needles with outlets opening to its surface. While the disk is rotated around its center axis, different coating materials such as solutions containing and not containing colloidal silica are passed through these needles and deposited through their outlets inside different zones on the disk surface. The needles are moved such that the radial distances of their outlets from the disk center vary within certain ranges corresponding to different zones such as the data and landing zones on the disk surface.

Abstract: In a magnetic recording medium comprising a substrate of either a glass material or a ceramic material, a magnetic layer, a protection layer, and a lubricant layer, the protection layer comprises a first protection layer of a nonmagnetic material on the magnetic film and a second protection film of an inorganic compound on the first protection layer. The first protection film may be composed of at least one material selected from nonmagnetic metals, semiconductors, and their compounds and may have a thickness between 20 and 150 angstroms while the second protection film is formed by an inorganic oxide film and hard minute particles which have an average particle size between 50 and 300 angstroms and which are dispersed into the inorganic oxide film.

Abstract: In a magnetic recording medium comprising a substrate of either a glass material or a ceramic material, a magnetic layer, a protection layer, and a lubricant layer, the protection layer comprises a first protection layer of a nonmagnetic material on the magnetic film and a second protection film of an inorganic compound on the first protection layer. The first protection film may be composed of at least one material selected from nonmagnetic metals, semiconductors, and their compounds and may have a thickness between 20 and 150 angstroms while the second protection film is formed by an inorganic oxide film and hard minute particles which have an average particle size between 50 and 300 angstroms and which are dispersed into the inorganic oxide film.