Abstract: A plasma processing apparatus includes: a processing container; a processing gas supply unit; a mounting table configured to mount a to-be-processed substrate thereon; an upper electrode provided above the mounting table; a plasma generation unit configured to supply a high frequency power to generate plasma of the processing gas; an exhaust flow path formed by a side wall of the processing container and a side surface of the mounting table; a conductive rectification plate configured to adjust a flow of the processing gas discharged to outside of the processing container; a conductor arranged in the exhaust flow path at a position higher than the rectification plate and lower than the to-be-processed substrate to face at least a part of the upper electrode. A distance of the conductor in the height direction in relation to the to-be-processed surface of the substrate is set to be within a predetermined range.

Abstract: A plasma processing apparatus includes: a processing container; a processing gas supply unit; a mounting table configured to mount a to-be-processed substrate thereon; an upper electrode provided above the mounting table; a plasma generation unit configured to supply a high frequency power to generate plasma of the processing gas; an exhaust flow path formed by a side wall of the processing container and a side surface of the mounting table; a conductive rectification plate configured to adjust a flow of the processing gas discharged to outside of the processing container; a conductor arranged in the exhaust flow path at a position higher than the rectification plate and lower than the to-be-processed substrate to face at least a part of the upper electrode. A distance of the conductor in the height direction in relation to the to-be-processed surface of the substrate is set to be within a predetermined range.

Abstract: A contour shape measurement method that can more accurately align an article to be measured to a predetermined position to enable high-precision evaluation even in a state where a probe measurement axis and a table rotation axis do not match with sufficient precision is provided. A spatial position of the table rotation axis relative to the probe measurement axis is obtained as a rotation axis vector. Alignment data obtained in at least two directions is coordinate-transformed around the rotation axis vector, to constitute synthesized alignment data. The article is aligned based on the synthesized alignment data. Since three-dimensional data of a surface to be measured of the article can be calculated, the article can be directly aligned to the probe measurement axis.

Abstract: An acting force is applied to a probe on the basis of a target speed serving as a probe speed in a stable copy scanning state of a target surface to be measured and a probe speed error serving as a difference between the target speed and a probe speed.

Abstract: A shape measurement method includes acquiring a plurality of partial measurement data sets of a measurement surface and inclination data corresponding to the partial measurement data sets; performing fitting of the partial measurement data sets so that differences between a reference equation and the partial measurement data sets are reduced, while the relative tilt between the partial measurement data sets is maintained less than or equal to a predetermined threshold; and obtaining the shape of the measurement surface by connecting the fitted partial measurement data sets.

Abstract: A shape-measuring method accurately performs fitting between measured data of a surface to be measured, which is formed based on a design shape having multiple periodical design-level differences, and a design shape. A level-difference region and a level-difference height are specified from a measured point sequence of the surface to be measured. A point sequence is moved by a level-difference height. In other words, a process for eliminating the level difference is performed, and fitting target data without a level difference is obtained. On the other hand, a reference shape without multiple design-level differences is obtained from the design shape. Fitting between the fitting target data and the reference shape is performed by the least square method or the like.

Abstract: A contour shape measurement method that can more accurately align an article to be measured to a predetermined position to enable high-precision evaluation even in a state where a probe measurement axis and a table rotation axis do not match with sufficient precision is provided. A spatial position of the table rotation axis relative to the probe measurement axis is obtained as a rotation axis vector. Alignment data obtained in at least two directions is coordinate-transformed around the rotation axis vector, to constitute synthesized alignment data. The article is aligned based on the synthesized alignment data. Since three-dimensional data of a surface to be measured of the article can be calculated, the article can be directly aligned to the probe measurement axis.

Abstract: Provided is a shape measuring method in which fitting is performed accurately between measured data of a surface to be measured which is formed based on a design shape having multiple periodical design level differences and a design shape. A level difference region and a level difference height are specified from a measured point sequence of the surface to be measured (S3). A point sequence is moved by a level difference height (S4). In other words, a process for eliminating the level difference is performed, and fitting target data without a level difference is obtained (S5). On the other hand, a reference shape without multiple design level differences is obtained from the design shape (S6 and S7). Fitting between the fitting target data and the reference shape is performed by the least square method or the like (S8).

Abstract: An acting force is applied to a probe on the basis of a target speed serving as a probe speed in a stable copy scanning state of a target surface to be measured and a probe speed error serving as a difference between the target speed and a probe speed.