Patents by Inventor Akio Date

Akio Date has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120236896
    Abstract: Disruption of a gas atmosphere does not occur when a substrate is rotated 90° after it is carried into a laser processing apparatus. The substrate is carried such that a gas ejection port is positioned near a midportion of a first side of the substrate. The substrate is linearly moved to bring a center of the substrate near the gas ejection port and the substrate is horizontally rotated 90° about the center thereof. Because an edge portion of the gas ejection port does not go beyond a seal cover during rotation, disruption of the gas atmosphere that occurs due to the escaping of the gas does not occur.
    Type: Application
    Filed: March 16, 2011
    Publication date: September 20, 2012
    Applicant: The Japan Steel Works ,Ltd.
    Inventors: Naoki Takida, Akio Date