Patents by Inventor Akio MATSUZOE

Akio MATSUZOE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR MANUFACTURING APPARATUS, INSPECTION APPARATUS, AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
    Publication number: 20230215770
    Abstract: A semiconductor manufacturing apparatus includes an imaging device that images a die; a lighting device having a light source that is a point light source or a line light source; and a controller configured to apply a light beam to a part of the die by the light source to form a bright field area on the die, and repeat moving the bright field area at a predetermined pitch and imaging of the die to inspect an inside of the bright field area.
    Type: Application
    Filed: December 19, 2022
    Publication date: July 6, 2023
    Inventors: Hideharu KOBASHI, Keita YAMAMOTO, Akio MATSUZOE