Patents by Inventor Akio Nakagawa

Akio Nakagawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10916628
    Abstract: Provided is a semiconductor device including a drift region having a first conductivity type provided on a semiconductor substrate; a plurality of trench portions provided above the drift region, on a top surface side of the semiconductor substrate; a base region having a second conductivity type provided in a mesa portion sandwiched between the plurality of trench portions, in the semiconductor substrate; an emitter region having the first conductivity type provided above the base region, on a top surface of the mesa portion; and a contact region having the second conductivity type and a higher doping concentration than the base region, provided adjacent to the emitter region on the top surface of the mesa portion, wherein a mesa width of the mesa portion is less than or equal to 100 nm, and a bottom end of the contact region is shallower than a bottom end of the emitter region.
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: February 9, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yosuke Sakurai, Yuichi Onozawa, Akio Nakagawa
  • Patent number: 10910486
    Abstract: The present invention provides a semiconductor device including (a) a drift region of a first-conductivity-type, (b) a base region of a second-conductivity-type, (c) a plurality of trench portions arranged next to each other in a predetermined arrangement direction on the upper surface of the semiconductor substrate, (d) an emitter region of a first-conductivity-type which has a higher doping concentration than the drift region, (e) an accumulation region of a first-conductivity-type which has a higher doping concentration than the drift region, and (f) a second-conductivity-type region of a second-conductivity-type which has a higher doping concentration than the base region, wherein the accumulation region and the second-conductivity-type region are provided between the base region and the drift region in a non-channel mesa portion that does not have the emitter region provided therein and that is of mesa portions between adjacent ones of the plurality of trench portions.
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: February 2, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yoshihiro Ikura, Akio Nakagawa
  • Patent number: 10707300
    Abstract: A semiconductor device having a trench gate structure is provided. A semiconductor device is provided, including: a first-conductivity-type drift region provided in a semiconductor substrate; a first-conductivity-type accumulation region provided above the drift region and having a higher doping concentration than the drift region; a second-conductivity-type base region provided above the accumulation region; and an electric-field relaxation layer provided between the accumulation region and the base region and having a lower doping concentration than the accumulation region. The electric-field relaxation layer may include a first-conductivity-type region including a region having a same doping concentration as the drift region.
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: July 7, 2020
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yosuke Sakurai, Yuichi Onozawa, Akio Nakagawa
  • Publication number: 20190312105
    Abstract: Provided is a semiconductor device including a drift region having a first conductivity type provided on a semiconductor substrate; a plurality of trench portions provided above the drift region, on a top surface side of the semiconductor substrate; a base region having a second conductivity type provided in a mesa portion sandwiched between the plurality of trench portions, in the semiconductor substrate; an emitter region having the first conductivity type provided above the base region, on a top surface of the mesa portion; and a contact region having the second conductivity type and a higher doping concentration than the base region, provided adjacent to the emitter region on the top surface of the mesa portion, wherein a mesa width of the mesa portion is less than or equal to 100 nm, and a bottom end of the contact region is shallower than a bottom end of the emitter region.
    Type: Application
    Filed: February 20, 2019
    Publication date: October 10, 2019
    Inventors: Yosuke SAKURAI, Yuichi ONOZAWA, Akio NAKAGAWA
  • Publication number: 20190312134
    Abstract: The present invention provides a semiconductor device including (a) a drift region of a first-conductivity-type, (b) a base region of a second-conductivity-type, (c) a plurality of trench portions arranged next to each other in a predetermined arrangement direction on the upper surface of the semiconductor substrate, (d) an emitter region of a first-conductivity-type which has a higher doping concentration than the drift region, (e) an accumulation region of a first-conductivity-type which has a higher doping concentration than the drift region, and (f) a second-conductivity-type region of a second-conductivity-type which has a higher doping concentration than the base region, wherein the accumulation region and the second-conductivity-type region are provided between the base region and the drift region in a non-channel mesa portion that does not have the emitter region provided therein and that is of mesa portions between adjacent ones of the plurality of trench portions.
    Type: Application
    Filed: February 20, 2019
    Publication date: October 10, 2019
    Inventors: Yoshihiro IKURA, Akio NAKAGAWA
  • Publication number: 20190312101
    Abstract: A semiconductor device having a trench gate structure is provided. A semiconductor device is provided, including: a first-conductivity-type drift region provided in a semiconductor substrate; a first-conductivity-type accumulation region provided above the drift region and having a higher doping concentration than the drift region; a second-conductivity-type base region provided above the accumulation region; and an electric-field relaxation layer provided between the accumulation region and the base region and having a lower doping concentration than the accumulation region. The electric-field relaxation layer may include a first-conductivity-type region including a region having a same doping concentration as the drift region.
    Type: Application
    Filed: February 20, 2019
    Publication date: October 10, 2019
    Inventors: Yosuke SAKURAI, Yuichi ONOZAWA, Akio NAKAGAWA
  • Patent number: 10297683
    Abstract: In mesa regions between adjacent trenches disposed in an n?-type drift layer and in which a first gate electrode is disposed via a first gate insulating film, a p-type base region and a floating p+-type region of which a surface is partially covered by a second gate electrode via a second gate insulating film are disposed. An emitter electrode contacts the p-type base region and an n+-type emitter region, and is electrically isolated from first and second gate electrodes and the floating p+-type region by an interlayer insulating film covering the first and second gate electrodes and a portion of the floating p+-type region not covered by the second gate electrode. Thus, turn-on dV/dt controllability by the gate resistance Rg may be improved.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: May 21, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yusuke Kobayashi, Yuichi Onozawa, Manabu Takei, Akio Nakagawa
  • Patent number: 10229970
    Abstract: For enhancing a reverse-recovery immunity of a diode element, a semiconductor device includes a first conductivity-type drift layer, a second conductivity-type anode region provided in an upper portion of the drift layer, an insulating film provided on the drift layer, an anode electrode having an ohmic contact portion ohmically contacted to the anode region through a contact hole penetrating the insulating film, and a Schottky electrode Schottky-contacted to a peripheral portion of the anode region.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: March 12, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Eri Ogawa, Akio Nakagawa
  • Patent number: 10199454
    Abstract: For enhancing a reverse-recovery immunity of a diode element, a semiconductor device includes a first conductivity-type drift layer, a second conductivity-type anode region provided in an upper portion of the drift layer, an insulating film provided on the drift layer, an anode electrode having an ohmic contact portion ohmically contacted to the anode region through a contact hole penetrating the insulating film, and a Schottky electrode Schottky-contacted to a peripheral portion of the anode region.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: February 5, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Eri Ogawa, Akio Nakagawa
  • Publication number: 20180158939
    Abstract: In mesa regions between adjacent trenches disposed in an n?-type drift layer and in which a first gate electrode is disposed via a first gate insulating film, a p-type base region and a floating p+-type region of which a surface is partially covered by a second gate electrode via a second gate insulating film are disposed. An emitter electrode contacts the p-type base region and an n+-type emitter region, and is electrically isolated from first and second gate electrodes and the floating p+-type region by an interlayer insulating film covering the first and second gate electrodes and a portion of the floating p+-type region not covered by the second gate electrode. Thus, turn-on dV/dt controllability by the gate resistance Rg may be improved.
    Type: Application
    Filed: January 11, 2018
    Publication date: June 7, 2018
    Applicant: FUJI ELECTRIC CO., LTD.
    Inventors: Yusuke KOBAYASHI, Yuichi ONOZAWA, Manabu TAKEI, Akio NAKAGAWA
  • Patent number: 9899503
    Abstract: In mesa regions between adjacent trenches disposed in an n?-type drift layer and in which a first gate electrode is disposed via a first gate insulating film, a p-type base region and a floating p+-type region of which a surface is partially covered by a second gate electrode via a second gate insulating film are disposed. An emitter electrode contacts the p-type base region and an n+-type emitter region, and is electrically isolated from first and second gate electrodes and the floating p+-type region by an interlayer insulating film covering the first and second gate electrodes and a portion of the floating p+-type region not covered by the second gate electrode. Thus, turn-on dV/dt controllability by the gate resistance Rg may be improved.
    Type: Grant
    Filed: August 29, 2016
    Date of Patent: February 20, 2018
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yusuke Kobayashi, Yuichi Onozawa, Manabu Takei, Akio Nakagawa
  • Patent number: 9711628
    Abstract: A semiconductor device has a reduced an on-voltage and uses a gate resistance to improve the trade-off relationship between turn-on loss Eon and dV/dt, and turn-on dV/dt controllability. A floating p+-type region is provided in an n?-type drift layer so as to be spaced from a p-type base region configuring a MOS gate structure. An emitter electrode and the floating p+-type region are electrically connected by an n+-type region provided in the surface layer of a substrate front surface. The n+-type region is covered with a second insulating film which film is covered with an emitter electrode. By an electric field being generated in the n+-type region by the emitter electrode provided on the top of the n+-type region via the second interlayer insulating film, the n+-type region forms a current path which causes holes accumulated in the floating p+-type region to flow to the emitter electrode when turning on.
    Type: Grant
    Filed: August 11, 2015
    Date of Patent: July 18, 2017
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yusuke Kobayashi, Manabu Takei, Akio Nakagawa
  • Publication number: 20170018659
    Abstract: For enhancing a reverse-recovery immunity of a diode element, a semiconductor device includes a first conductivity-type drift layer, a second conductivity-type anode region provided in an upper portion of the drift layer, an insulating film provided on the drift layer, an anode electrode having an ohmic contact portion ohmically contacted to the anode region through a contact hole penetrating the insulating film, and a Schottky electrode Schottky-contacted to a peripheral portion of the anode region.
    Type: Application
    Filed: June 1, 2016
    Publication date: January 19, 2017
    Applicant: FUJI ELECTRIC CO., LTD.
    Inventors: Eri Ogawa, Akio Nakagawa
  • Publication number: 20160365434
    Abstract: In mesa regions between adjacent trenches disposed in an n?-type drift layer and in which a first gate electrode is disposed via a first gate insulating film, a p-type base region and a floating p+-type region of which a surface is partially covered by a second gate electrode via a second gate insulating film are disposed. An emitter electrode contacts the p-type base region and an n+-type emitter region, and is electrically isolated from first and second gate electrodes and the floating p+-type region by an interlayer insulating film covering the first and second gate electrodes and a portion of the floating p+-type region not covered by the second gate electrode. Thus, turn-on dV/dt controllability by the gate resistance Rg may be improved.
    Type: Application
    Filed: August 29, 2016
    Publication date: December 15, 2016
    Applicant: FUJI ELECTRIC CO., LTD.
    Inventors: Yusuke KOBAYASHI, Yuichi ONOZAWA, Manabu TAKEI, Akio NAKAGAWA
  • Publication number: 20160300938
    Abstract: One embodiment of the present invention includes preparing a first conductive semiconductor substrate manufactured using the MCZ method. A second conductive base layer (12), first conductive emitter regions (13), and gate electrodes (14) are formed on a first surface of the semiconductor substrate. The semiconductor substrate is thinned by machining the second surface of the semiconductor substrate and a second conductive collector layer (15) is formed by implanting boron into the thinned second surface. A first conductive buffer layer (16) having a higher impurities concentration than the semiconductor substrate is formed by implanting hydrogen into an area inside the semiconductor substrate and adjacent to the collector layer (15).
    Type: Application
    Filed: December 2, 2014
    Publication date: October 13, 2016
    Inventors: Kazuhiko Tonari, Akio Nakagawa, Hidekazu Yokoo, Hideo Suzuki
  • Patent number: 9292777
    Abstract: An information processing apparatus comprising: a reception unit adapted to receive a packet containing first data to be stored in a storage unit, a first address indicating an address of second data held in the storage unit, and a second address indicating an address at which the first data is to be written in the storage unit; an access unit adapted to read out the second data from the storage unit based on the first address, and write the first data in the storage unit based on the second address; and a transmission unit adapted to replace the first data of the packet received by the reception unit with the second data read out by the access unit, and transmit the packet.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: March 22, 2016
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Akio Nakagawa, Hisashi Ishikawa
  • Publication number: 20160064476
    Abstract: A semiconductor device has a reduced an on-voltage and uses a gate resistance to improve the trade-off relationship between turn-on loss Eon and dV/dt, and turn-on dV/dt controllability. A floating p+-type region is provided in an n?-type drift layer so as to be spaced from a p-type base region configuring a MOS gate structure. An emitter electrode and the floating p+-type region are electrically connected by an n+-type region provided in the surface layer of a substrate front surface. The n+-type region is covered with a second insulating film which film is covered with an emitter electrode. By an electric field being generated in the n+-type region by the emitter electrode provided on the top of the n+-type region via the second interlayer insulating film, the n+-type region forms a current path which causes holes accumulated in the floating p+-type region to flow to the emitter electrode when turning on.
    Type: Application
    Filed: August 11, 2015
    Publication date: March 3, 2016
    Applicant: FUJI ELECTRIC CO., LTD.
    Inventors: Yusuke KOBAYASHI, Manabu TAKEI, Akio NAKAGAWA
  • Patent number: 9214536
    Abstract: A lateral insulated gate bipolar transistor includes a semiconductor substrate including a drift layer, a collector region, a channel layer, an emitter region, a gate insulating layer, a gate electrode, a collector electrode, an emitter electrode, and a barrier layer. The barrier layer is disposed along either side of the collector region and is located to a depth deeper than a bottom of the channel layer. The barrier layer has an impurity concentration that is higher than an impurity concentration of the drift layer. The barrier layer has a first end close to the collector region and a second end far from the collector region. The first end is located between the channel layer and the collector region, and the second end is located on the bottom of the channel layer.
    Type: Grant
    Filed: November 12, 2013
    Date of Patent: December 15, 2015
    Assignee: DENSO CORPORATION
    Inventors: Shigeki Takahashi, Norihito Tokura, Satoshi Shiraki, Youichi Ashida, Akio Nakagawa
  • Patent number: 8981826
    Abstract: A semiconductor device includes: a voltage-control-type clock generation circuit having a plurality of stages of first delay elements and whose oscillation frequency is controlled according to a control voltage applied to the first delay elements; a delay circuit having a plurality of stages of second delay elements connected serially; and a selection circuit selecting one from pulse signals output by the plurality of stages of respective second delay elements. The first delay elements and the second delay elements have a same structure formed on a same semiconductor substrate, and a delay amount of the second delay elements is adjusted according to the control voltage.
    Type: Grant
    Filed: May 7, 2014
    Date of Patent: March 17, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kazutoshi Nakamura, Toru Takayama, Yuki Kamata, Akio Nakagawa, Yoshinobu Sano, Toshiyuki Naka
  • Patent number: 8972769
    Abstract: A data processing apparatus includes: a plurality of processing units adapted to process data according to input operation clocks; and a control unit adapted to measure response times of the plurality of processing units when the operation clocks of a common frequency are supplied to the plurality of processing units, and to control a frequency of the operation clocks to be supplied to at least one of the plurality of processing units so that a plurality of measured response times become closer to each other.
    Type: Grant
    Filed: January 21, 2011
    Date of Patent: March 3, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventors: Akio Nakagawa, Hisashi Ishikawa