Abstract: A management system for a plant facility is disclosed. The system includes a server, a mobile terminal, and beacon transmitters. The beacon transmitter is attached to or embedded into a field device in the plant facility and broadcasts a beacon signal including an identifier of the field device. The server includes a display, a storage that stores process data corresponding to the identifiers, and a controller that receives wireless signals including the identifiers from the mobile terminal and identifies the process data corresponding to the identifiers received with the wireless signals. The mobile terminal includes a display, a beacon receiver that receives the beacon signals, and a controller that transmits the wireless signals to the server with the identifiers received with the beacon signals. At least one of the displays of the server and the mobile terminal displays the process data identified by the controller of the server.

Abstract: A leak detecting apparatus using a compound turbo-molecular pump has an analyzer tube, an auxiliary vacuum pump such as a rotary pump connected to the analyzer tube by means of a passage with a compound turbo-molecular pump and a fore valve in between. An exhaust passage extends from a test port to be connected to an object of inspection. The exhaust passage is branched into a plurality of branched passages and each of the branched passages is connected to a position of different compression ratio of the compound turbo-molecular pump. A gate valve is disposed in each of the branched passages. There is connected to the exhaust passage a vacuum gauge which is in communication with each of the gate valves via a controller such that the gate valves are sequentially opened and closed by a signal from the controller in accordance with a change in pressure to be detected by the vacuum gauge.