Abstract: A polishing head system capable of precisely controlling a film-thickness profile of a workpiece, such as a wafer, substrate, or panel, is disclosed. The polishing head system includes a polishing head having a plurality of piezoelectric elements configured to apply pressing forces to a workpiece, and an operation controller configured to determine instruction values of voltages to be applied to the plurality of piezoelectric elements.

Abstract: Contact openings extending to sacrificial layers located at different depths can be formed by sequentially exposing a greater number of openings in a mask layer by iterative alternation of trimming of a slimming layer over the mask layer and an anisotropic etch that recesses pre-existing contact openings by one level. In one embodiment, pairs of an electrically conductive via contact and electrically conductive electrodes can be simultaneously formed as integrated line and via structures. In another embodiment, encapsulated unfilled cavities can be formed in the contact openings by non-conformal deposition of a material layer, electrically conductive electrodes can be formed by replacement of portions of the sacrificial layers, and the electrically conductive via contacts can be subsequently formed on the electrically conductive electrodes. Electrically conductive via contacts extending to electrically conductive electrodes located at different level can be provided with self-aligned insulating liner.

Abstract: Contact openings extending to sacrificial layers located at different depths can be formed by sequentially exposing a greater number of openings in a mask layer by iterative alternation of trimming of a slimming layer over the mask layer and an anisotropic etch that recesses pre-existing contact openings by one level. In one embodiment, pairs of an electrically conductive via contact and electrically conductive electrodes can be simultaneously formed as integrated line and via structures. In another embodiment, encapsulated unfilled cavities can be formed in the contact openings by non-conformal deposition of a material layer, electrically conductive electrodes can be formed by replacement of portions of the sacrificial layers, and the electrically conductive via contacts can be subsequently formed on the electrically conductive electrodes. Electrically conductive via contacts extending to electrically conductive electrodes located at different level can be provided with self-aligned insulating liner.

Abstract: Contact openings extending to sacrificial layers located at different depths can be formed by sequentially exposing a greater number of openings in a mask layer by iterative alternation of trimming of a slimming layer over the mask layer and an anisotropic etch that recesses pre-existing contact openings by one level. In one embodiment, pairs of an electrically conductive via contact and electrically conductive electrodes can be simultaneously formed as integrated line and via structures. In another embodiment, encapsulated unfilled cavities can be formed in the contact openings by non-conformal deposition of a material layer, electrically conductive electrodes can be formed by replacement of portions of the sacrificial layers, and the electrically conductive via contacts can be subsequently formed on the electrically conductive electrodes. Electrically conductive via contacts extending to electrically conductive electrodes located at different level can be provided with self-aligned insulating liner.

Abstract: Contact openings extending to sacrificial layers located at different depths can be formed by sequentially exposing a greater number of openings in a mask layer by iterative alternation of trimming of a slimming layer over the mask layer and an anisotropic etch that recesses pre-existing contact openings by one level. In one embodiment, pairs of an electrically conductive via contact and electrically conductive electrodes can be simultaneously formed as integrated line and via structures. In another embodiment, encapsulated unfilled cavities can be formed in the contact openings by non-conformal deposition of a material layer, electrically conductive electrodes can be formed by replacement of portions of the sacrificial layers, and the electrically conductive via contacts can be subsequently formed on the electrically conductive electrodes. Electrically conductive via contacts extending to electrically conductive electrodes located at different level can be provided with self-aligned insulating liner.

Abstract: Contact openings extending to sacrificial layers located at different depths can be formed by sequentially exposing a greater number of openings in a mask layer by iterative alternation of trimming of a slimming layer over the mask layer and an anisotropic etch that recesses pre-existing contact openings by one level. In one embodiment, pairs of an electrically conductive via contact and electrically conductive electrodes can be simultaneously formed as integrated line and via structures. In another embodiment, encapsulated unfilled cavities can be formed in the contact openings by non-conformal deposition of a material layer, electrically conductive electrodes can be formed by replacement of portions of the sacrificial layers, and the electrically conductive via contacts can be subsequently formed on the electrically conductive electrodes. Electrically conductive via contacts extending to electrically conductive electrodes located at different level can be provided with self-aligned insulating liner.

Abstract: A magnetic recording medium having improved running properties and electromagnetic characteristics is disclosed, which comprises a non-magnetic support having provided thereon an underlayer and a magnetic layer composed of a thin ferromagnetic metal film in that order, said underlayer being composed mainly of a high molecular weight compound having on the surface thereof an uneven orange peel texture, wherein said underlayer has an average surface area of a unit cell of the uneven orange peel texture of from 3.times.10.sup.-6 to 3.times.10.sup.-3 mm.sup.2, and has a surface roughness of from 0.1 to 0.01 .mu.m.

Abstract: The running properties and durability under a wide range of temperature and humidity conditions are improved by the presence of terminally modified polyhexafluoropropylene on a thin ferromagnetic metal film.

Abstract: A method and apparatus for producing a magnetic recording medium having an improved durability with a simple process. Nitrogen molecules and/or nitrogen atoms in an excited state are applied to a nonmagnetic substrate simultaneously with an iron vapor flow and an ion flow. The resulting magnetic recording medium has superior corrosion resistance and can be produced at a high film forming rate, and is especially suitable for high density recording because of its high coercive force.

Abstract: A durable, rust- and scratch-resistant magnetic recording medium coated thereon a thin ferromagnetic film comprising an iron oxide nitride, wherein said film is an aggregation of pillar particles of said iron oxide nitride, said particles having a higher nitrogen content on their surface than inside the particles.

Abstract: A method for producing a thin-film magnetic recording medium having an improved corrosion resistance and which permits production of the medium at a high speed. A magnetic material vapor flow from an evaporation source and a gas or ion flow are applied to a nonmagnetic base in an evaporation chamber and the two flows reacted with each other to form the thin-film magnetic layer on the nonmagnetic base. During this process, the expression P.sub.1 /P.sub.0 .ltoreq.0.1 is maintained, wherein P.sub.0 represents the degree of vacuum in the evaporation chamber, under a first condition where only the gas or ion flow is applied after the pressure in the chamber has been reduced to a predetermined degree of vacuum, and P.sub.1 represents the degree of vacuum in the chamber under a second condition where the magnetic material vapor flow is applied to the nonmagnetic base simultaneously with the gas or ion flow. The rate of formation of the thin-film magnetic layer is 200 .ANG./sec or more on the average.

Abstract: A durable, weather-resistant and anti-corrosive magnetic recording medium is disclosed, which comprises a non-magnetic support having coated thereon a thin film type magnetic layer comprising iron, nitrogen oxygen and at least one element selected from the group consisting of titanium, silicon, aluminum and tantalum.

Abstract: A magnetic recording medium, such as a tape, having a thin ferromagnetic film containing Fe.sub.a Co.sub.b N.sub.c O.sub.d satisfying: 32%.ltoreq.a.ltoreq.90%; 5%.ltoreq.b.ltoreq.55%; 2%.ltoreq.c.ltoreq.28%; 5%.ltoreq.d.ltoreq.23%; and c+d.ltoreq.40%. Such a film provides enhanced resistance against corrosion.

Abstract: A magnetic recording medium is described, comprising a non-magnetic support having provided thereon a thin ferromagnetic metal film, wherein the thin ferromagnetic metal film contains an iron atom, a nitrogen atom and an oxygen atom within the following atomic percent ranges:57.ltoreq.a.ltoreq.902.ltoreq.b.ltoreq.205.ltoreq.c.ltoreq.23b+c<25in which a, b and c represent the percentage of iron atom, nitrogen atom and oxygen atom, respectively, based on the total of these atoms in the thin ferromagnetic metal film.

Abstract: A method of preparing a ferromagnetic recording medium is disclosed. The method includes charging a ferromagnetic material in an evaporator. The material is then irradiated with an electron beam having a beam current density of at least 0.1 A/cm.sup.2 in order to evaporate the material. The evaporated material is vapor deposited on a continuously travelling support in order to from the recording medium. The vapor deposition type magnetic recording medium produced has good metal film adhesion and durability.

Abstract: A process for fabricating magnetic tape in which a tape substrate in passed through a stream of evaporating material so as to present a continuously varying angle of incidence to the stream. The maximum and minimum angles of incidence are defined. Oxidizing gas is applied to the tape at the minimum angle of incidence and at an intermediate angle.

Abstract: A magnetic recording medium comprising a magnetic recording layer formed on a non-magnetic substrate by depositing a ferromagnetic metal or alloy on the substrate, the recording layer containing oxygen atoms in such a manner that the ratio thereof gradually reduces from the substrate side to the surface of the recording layer except the portion thereof very near to the surface thereof. The recording layer may comprise many deposited magnetic films, each containing oxygen atoms distributed as described above or uniformly in a ratio different from those in the other magnetic films. In the latter case, a magnetic film positioned nearer to the substrate contains a higher ratio of oxygen atoms.

Abstract: A process for producing a magnetic recording medium comprising heating a magnetic material evaporation source with at least one scanning electron beam and depositing a vapor of a magnetic material emitted from the magnetic material evaporation source onto a non-magnetic substrate tape or web which is continuously moving in a vacuum atmosphere, the magnetic material evaporation source being disposed substantially parallel to the width direction of the non-magnetic substrate tape or web to form a magnetic thin film thereon, wherein the scanning frequency of the electron beams is about 2wv/n Hz or more, in which v m/min is the moving speed of the non-magnetic substrate; w m is the scanning width of the electron beams on said magnetic material evaporation source; and n is the number of the electron beams. The magnetic thin film magnetic recording medium has improved (dB/dH).sub.max and an excellent envelope of reproduced signals.

Abstract: A magnetic recording medium having a thin ferromagnetic metal film formed on a non-magnetic base by vacuum vapor deposition or ion plating is disclosed. The thin ferromagnetic metal film is based on Co and contains 0.05 to 3.0 wt % of Mg.

Abstract: A process for producing a magnetic recording material comprising a support having a thin metal film layer provided thereon is described, the process comprising the steps of (1) coating a thin magnetic metal film having a water contact angle of at least 25.degree. with a polymer solution to form a thin polymer layer, drying the thin polymer layer, and providing a lubricant on the thin polymer layer, or (2) coating the thin magnetic metal film with a lubricant-containing polymer solution to form a lubricant-containing polymer layer, and drying the lubricant-containing polymer layer.