Abstract: A girth welded joint of steel pipe 10 includes base metal portions 1a, 1b and a girth welded portion 2, wherein the girth welded portion 2 is formed of a weld metal portion 2a and weld heat affected zones 2b, 2c, the base metal portions 1a, 1b have a predetermined chemical composition, Pcm is within a range of 0.25 to 0.30, the weld metal portion 2a has a predetermined chemical composition, a content of B is 0.0010% or less, tensile strength of both base metal portions 1a, 1b and tensile strength of the girth welded portion 2 in a cross weld tensile test is 980 MPa or more, average hardness of the base metal portions 1a, 1b is 300 HV10 or more, an average softening width of the weld heat affected zones 2b, 2c is 4.0 mm or less, and an average softening degree is 80 HV10 or less.

Abstract: A sample inspection system includes: a charged particle beam device irradiating a sample with a charged particle beam to acquire an image of the sample; an overall control device controlling the charged particle beam device; a magnetic shield that configures an internal space for accommodating the charged particle beam device and the overall control device and blocks an external magnetic field; and an air cooling device that takes air into the magnetic shield to cool the internal space of the magnetic shield. The magnetic shield includes highly conductive material layers and high-permeability material layers, and includes an air inlet of the air for cooling in each of the highly conductive material layers and the high-permeability material layers, and a gap that is a spatial clearance is provided between the highly conductive material layer and the high-permeability material layer in a portion where the air inlet is present.

Abstract: An image capturing mechanism includes: an optical measurement unit for optically observing a sample; a temperature conditioning unit for heating or cooling the sample, the temperature conditioning unit being mounted on a table by means of a support member; and a moving mechanism for moving the table in order to photograph the sample. The temperature conditioning unit includes: a temperature conditioning part for heating or cooling the sample, abutted on one face of a Peltier device; a heat conducting member abutted on the other face of the Peltier device; and the support member for holding the temperature conditioning part and the heat conducting member and securing the temperature conditioning part and the heat conducting member on the table. At least the heat conducting member is connected to a cooling means, and the thermal conductivity of the support member is low relative to the thermal conductivity of the heat conducting member.

Abstract: A girth welded joint of steel pipe 10 includes base metal portions 1a, 1b and a girth welded portion 2, wherein the girth welded portion 2 is formed of a weld metal portion 2a and weld heat affected zones 2b, 2c, the base metal portions 1a, 1b have a predetermined chemical composition, Pcm is within a range of 0.25 to 0.30, the weld metal portion 2a has a predetermined chemical composition, a content of B is 0.0010% or less, tensile strength of both base metal portions 1a, 1b and tensile strength of the girth welded portion 2 in a cross weld tensile test is 980 MPa or more, average hardness of the base metal portions 1a, 1b is 300 HV10 or more, an average softening width of the weld heat affected zones 2b, 2c is 4.0 mm or less, and an average softening degree is 80 HV10 or less.

Abstract: An image capturing mechanism includes: an optical measurement unit for optically observing a sample; a temperature conditioning unit for heating or cooling the sample, the temperature conditioning unit being mounted on a table by means of a support member; and a moving mechanism for moving the table in order to photograph the sample. The temperature conditioning unit includes: a temperature conditioning part for heating or cooling the sample, abutted on one face of a Peltier device; a heat conducting member abutted on the other face of the Peltier device; and the support member for holding the temperature conditioning part and the heat conducting member and securing the temperature conditioning part and the heat conducting member on the table. At least the heat conducting member is connected to a cooling means, and the thermal conductivity of the support member is low relative to the thermal conductivity of the heat conducting member.

Abstract: The present disclosure provides a wafer inspection technology that involves less degradation of the image quality even when an object to be observed has a variation in height due to warpage, etc. of a wafer. This wafer inspection apparatus obtains an image with less degradation by: adjusting the focal point of an observation optical system to a height measured by a height sensor for measuring wafer surface heights; and further, correcting a switching signal for a CCD line sensor on the basis of stage position data and optical magnification data corresponding to the height so as to make a correction corresponding to the wafer surface height.

Abstract: The present disclosure provides a wafer inspection technology that involves less degradation of the image quality even when an object to be observed has a variation in height due to warpage, etc. of a wafer. This wafer inspection apparatus obtains an image with less degradation by: adjusting the focal point of an observation optical system to a height measured by a height sensor for measuring wafer surface heights; and further, correcting a switching signal for a CCD line sensor on the basis of stage position data and optical magnification data corresponding to the height so as to make a correction corresponding to the wafer surface height.

Abstract: Provided is a light deflector deflecting a light beam, and including a reflector that reflects the light beam, a first gripper that grips one end of the reflector, a first driver that rotates a first rotating shaft coupled to the first gripper, a second gripper that grips the other end of the reflector, and a second driver that rotates a second rotating shaft coupled to the second gripper.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: In a total heat exchange element, a partition member has a heat transfer property, moisture permeability, and a gas blocking property. A spacer is formed in a hollow cylindrical shape polygonal in section extending substantially in parallel along the surface of the partition member and includes an overlapping wall that overlaps the partition member and supporting walls that rise from side ends of the overlapping wall and are vertically provided between the partition members respectively being upper and lower parts in a laminating direction to retain a space between the partition members. The overlapping wall has thickness smaller than that of the supporting walls and stuck to the partition member with an adhesive having moisture permeability.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: A total heat exchange element includes a first flow passage and a second flow passage extending orthogonal thereto. The first flow passage is an undulating flow passage that has a rectangular cross section and is formed by positioning a first wave-form plate member and a second wave-form plate member on top of each other and with a predetermined interval therebetween, and further causing spacers to hermetically close two lateral portions with respect to the traveling direction of the fluid. The second flow passage is a straight flow passage that has a substantially triangular cross section and is formed between a flat-plate-like member and one of the first and the second wave-form plate members.

Abstract: A heat exchange element includes a first flow passage and a second flow passage extending orthogonal thereto. The first flow passage is an undulating flow passage that has a rectangular cross section and is formed by positioning, a first wave-form plate member and a second wave-form plate member on top of each other and with a predetermined interval therebetween, and further causing spacers to hermetically close two lateral portions with respect to the traveling direction of the fluid. The second flow passage is a straight flow passage that has a substantially triangular cross section and is formed between a flat-plate-like member and one of the first and the second wave-form plate members, when the flat-plate-like member is positioned on the wave-like form of the one of the first and the second wave-form plate members so as to be in close contact therewith.

Abstract: Molding sand having a high spherical degree and a low hygroscopicity produced from powder containing Al2O3 and SiO2, as main components by a flame fusion method, from which a mold having an excellent strength and a smooth surface is produced.

Abstract: To increase productivity of organic thin-film transistors, in an organic thin-film transistor manufacturing equipment, a liquid containing at least either one of a wiring material and a semiconductor material is coated on a substrate to form a number of organic thin-film transistors. Substrate carrying means carry the substrate. The substrate is heated by a first heating means, and the temperature of the substrate is controlled by a controller. The liquid containing at least either one of the wiring material and the semiconductor material is heated by a second heating means, and the temperature of this liquid is controlled also by the controller.

Abstract: A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.