Abstract: A blower (10) includes: at least two or at least three acoustic sensors or vibration sensors (31a to 31c) attached to a casing (12); and a position specifying means (34) for specifying a position of a source of abnormal sound or abnormal vibration from signals detected by the acoustic sensors or vibration sensors. When the position of the abnormal portion is specified in this way, a proper countermeasure can be taken quickly. Further, the blower (10) preferably includes an alarm output judging means (35) for judging whether or not an alarm should be outputted according to the position of the source of the abnormal sound or abnormal vibration specified by the position specifying means. A laser oscillator (100) having the blower (10) is also provided.

Abstract: Detection accuracy of a sensor is improved by reducing an influence of an exogenous noise. Acceleration acting on an object is detected based on a change of posture of a mass part supported by a flexible substrate. The flexible substrate is fixed at a frame and the mass part is fixed by soldering at the center thereof. When a force such as acceleration acts on the mass part, the posture of the mass part changes and the flexible substrate also becomes deformed. The change of posture of the mass part and the deformation of the flexible substrate are detected based on the amount of change of a circuit constant of a piezoresistive element as a detecting element provided at a beam part. A signal processing circuit for processing a signal detected by the detecting element is formed on an IC chip, by which the mass part is configured.

Abstract: A high-frequency discharge excited gas laser oscillator receiving power from a laser power supply controlled by a pulse command, the high-frequency discharge excited gas laser oscillator provided with a power detecting section for detecting supply power from the laser power supply to a discharge tube and a pulse command control section positioned at an upstream side of the laser power supply, comparing an allowable upper limit value of supply power found from a relationship between a discharge tube temperature and supply power and an actual supply power detected by the power detecting section, stopping the pulse command value to the discharge tube when the supply power is higher than the allowable upper limit value, and setting a pulse command value based on the allowable upper limit value.

Abstract: A laser processing device (100) includes a laser oscillator (2), a laser machine (11) and a control means (1) for controlling the laser oscillator and the laser machine. The control means includes a storage means (50) for storing the processing program (60) for the work to be processed. The storage means has stored therein a required laser gas pressure value (72) for the laser oscillator in the laser processing operation, which value is determined in accordance with the processing specifics the work (20). The control means includes a laser gas pressure command transmission means (52) for transmitting a laser gas pressure command based on the required laser gas pressure value to the laser oscillator. This further improves the processing performance of the laser processing apparatus. Further, the control means may include a required laser gas pressure value adjusting means (55) for adjusting the required laser gas pressure value.

Abstract: A plurality of discharge sections are formed in an optical resonance space and are provided with electrodes that are mutually different in for example shape, size and construction. Laser medium gas flows through a circulatory passage passing through a fan and heat exchangers. Mutually different modes can be obtained when discharge is produced independently in the discharge sections. When discharge is produced in both of the discharge sections, the various intermediate modes can be obtained, in accordance with the distribution of power supplied from power sources for discharge excitation that are independently operated.

Abstract: A gas laser oscillator of easy maintenance which is capable of switching a beam mode at high speed. Electric discharge sections in which gas medium is flown are formed in an optical resonating space in an electric discharge tube between a rear mirror and an output mirror. Electrodes are connected to electric discharge power sources (alternating current or direct current power sources). Coils are wound around the electric discharge tube at the respective electric discharge sections and excited by coil excitation circuits. Directions and intensities of the excitation currents from the coil excitation circuits are controlled by a controller. Regions in which the electric discharge currents flow between the electrodes in the respective electric discharge sections are varied by magnetic fields generated by the coils in accordance with the directions and intensities of the excitation currents of the coils, to thereby control the beam mode.

Abstract: Provided is a laser oscillator (2) including: a first electrode pair (7a); a second electrode pair (7b); a discharge power supply (4) that induces pulse discharge in the first and second electrode pairs (7a, 7b); and at least one of a discharge phase control unit (53) which extends control so that a first discharge phase (X1) to be attained in the first electrode pair (7a) and a second discharge phase (X2) to be attained in the second electrode pair (7b) will be different from each other during the pulse discharge induced by the discharge power supply (4), a duty cycle control unit (53) which extends control so that a first duty cycle (Y1) to be attained in the first electrode pair (7a) and a second duty cycle (Y2) to be attained in the second electrode pair (7b) will be different from each other during the pulse discharge, a pulse frequency control unit (53) which extends control so that a first pulse frequency (Z1) to be attained in the first electrode pair (7a) and a second pulse frequency (Z2) to be attai

Abstract: A laser oscillator capable of preventing contamination of optical components by organic matter such as oil mist. Gas laser medium in an optical resonator constituted by optical components is pumped by an electric discharge generated in an electric discharge tube to produce a laser beam. The gas medium flows at high speed in the electric discharge tube incorporated in a circulating path including a blower. A part of lubrication oil of the blower is evaporated and mixed into the gas medium. Since the optical components are cooled by retaining mechanisms to prevent temperature rise of the components and a gas stagnation occurs between the optical component and the electric discharge tube, the evaporated oil mist tends to be congealed and adhered to a surface of the optical component. A photocatalyst arranged in the vicinity of the optical component effectively decomposes and removes the oil mist.

Abstract: A gas laser apparatus including a laser oscillating section including a medium circuit allowing a medium gas to flow therethrough under pressure, and a gas-composition adjusting section for adjusting the composition of the medium gas flowing through the medium circuit of the laser oscillating section.

Abstract: Cooling chambers (R1, R2) for accommodating therein a cooling fluid for cooling a liquid crystal panel (441) are formed inside a pair of frame members (4405, 4406) constituting an optical modulator holder (4402). There are provided, in the pair of frame members (4405, 4406), inlet ports (4405D, 4406D) for inletting a cooling fluid into the cooling chambers (R1, R2), outlet ports (4405E, 4406E) for discharging the cooling fluid inside the cooling chambers (R1, R2) to the outside, and a buffer section (Bf1) for temporally accumulating the cooling fluid flowing therein via the inlet ports (4405D, 4406D) and rectifying a flow direction of the cooling fluid to a direction parallel to an optical modulation face and/or to a direction perpendicular to the optical modulation face.

Abstract: In an laser oscillator (100), a blower (10, 20, 120) for circulating a laser medium between an electric discharge tube (102) and a circulating passage (104) includes: a casing (12) having a suction port (12a) and an exhaust port (12b); and a blade (18) pivotally supported in the casing (12) so that the blade (18) can face the suction port (12a) and the exhaust port (12b). The blade (18) is formed into a shape in which a diameter of the blade (18) is different at a position on a cross section perpendicular to a rotary central line (O), and a gap (Go) between a portion, in which a diameter of the blade (18) is relatively large, and the casing is larger than a gap (Gi) between a portion, in which a diameter of the blade (18) is relatively small, and the casing. Due to the foregoing, a highly reliable blower used for a laser oscillator, the reduction of the blower efficiency of which is suppressed to be as small as possible, can be provided.

Abstract: A microchannel structure that has plural microchannels through which fluid flows, including: a housing section formed in a block; and a pipe array arranged in the housing section and formed by stacking plural pipes.

Abstract: A microchannel structure with a fine flow path through which a fluid flows, includes: a wavy plate member fabricated into a wavy form; an external peripheral wall member that surrounds the wavy plate member; and a spacer that ensures a spacing between opposed portions of the wavy plate member, wherein the fine flow path is defined by the wavy plate member and the external peripheral wall member.

Abstract: A laser processing system including a laser processing machine capable of operating along an inherent control axis, an axis driving section driving the control axis of the laser processing machine, a laser oscillator supplying a laser beam to the laser processing machine, a control unit controlling the axis driving section and the laser oscillator, and a transfer line connecting the axis driving section and the laser oscillator to the control unit in a daisy-chain mode.

Abstract: A laser oscillator capable of restraining the generation of a diffracted beam so as to obtain a laser beam with high power and high quality. The laser oscillator has an output mirror, a rear mirror and first and second concave mirrors. These mirrors cooperate together so as to form a laser beam profile. First and second beam waists are formed in the laser beam profile, between the output mirror and the first concave mirror and between the second concave mirror and the rear mirror, respectively. The laser oscillator includes a first aperture positioned generally in the middle of an optical path between the output mirror and the first beam waist and a second aperture positioned generally in the middle of the optical path between the first beam waist and the first concave mirror.

Abstract: This invention is to decrease the sensor pitch, prevent saturation by external light, accurately determine skimming, simplify skimming determination, and prevent any difference in influence of the transfer efficiency between the ON and OFF states. For this purpose, a distance measuring apparatus includes a light projection section for projecting light to an object, a sensor array for receiving reflected light from the object, a first transfer section for transferring charges from the sensor array, and a ring-shaped second charge transfer section for integrating the charges from the first transfer section, wherein the first charge transfer section transfers charges in a light projection ON state and charges in a light projection OFF state at a timing, the transfer frequency of the second charge transfer section is twice that of the first charge transfer section, and the timing of the first charge transfer section has a phase different from that of the second charge transfer section.

Abstract: A laser processing device having an effect similar to that obtained by changing a focal length of a condensing lens. A part of a laser beam entering into a flat surface portion of the condensing lens is not condensed and radiated on a condensing point on a workpiece as a parallel beam. This part of the laser beam serves as an auxiliary beam in laser processing. On the other hand, the other part of the laser beam entering into a curved surface portion is condensed and radiated on or near the circumference of the condensing point.

Abstract: A gas laser oscillator (10) provided with voltage detecting means (4a to 4d) for detecting the voltage of each of a plurality of discharge tube segments (6a to 6d) of a discharge tube before start of discharge and a discharge tube segment start judging means (1) for judging if each of the plurality of discharge tube segments (6a to 6d) has started based on the voltage of the discharge tube segments (6a to 6d) detected by the voltage detecting means (4a to 4d), wherein the discharge tube segment start judging means (1) allows all of the plurality of discharge tube segments (6a to 6d) to start only when the voltages of all of the discharge tube segments (6a to 6d) of the plurality of discharge tube segments are smaller than a predetermined voltage (Vb) is provided. Due to this, it is possible to judge an abnormality in the laser gas before the start of discharge without any work on the part of the operator and thereby prevent the discharge tube from being damaged.

Abstract: A laser-machining device (1) for machining a workpiece (W) by radiating it with the laser beam output from a nozzle (42) of a laser oscillator (31) is disclosed. A gap amount sensor (43) detects the gap amount between the workpiece and the nozzle. An approach unit (12, 41) causes the nozzle to approach the workpiece to a position suitable for the laser machining. The approach unit performs a first approach operation (12a) for making the nozzle approach the workpiece using the gap amount detected by the gap amount sensor until the gap amount comes to assume a predetermined value, and a second approach operation (12b), after the first approach operation, for causing the nozzle to approach the workpiece until the complete approach without using the gap amount detected by the gap amount sensor. As a result, the required time is shorter and a stable piercing process can be executed.

Abstract: A laser cutting apparatus capable of properly cutting a workpiece having a large thickness with a laser beam. The laser cutting apparatus includes a gas laser oscillator; and an optical system including a collective lens and transmitting and collecting a laser beam generated in the gas laser oscillator to irradiate a workpiece with the laser beam. An index M2 for evaluating a beam quality of the laser beam emerging from the optical system, with which the workpiece is irradiated, is in a range of 2.8 to 4.