Patents by Inventor Akira FUJIO

Akira FUJIO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR DETECTING ABNORMAL GROWTH OF GRAPHENE, MEASUREMENT APPARATUS, AND FILM FORMATION SYSTEM
    Publication number: 20220185673
    Abstract: A method for detecting abnormal growth of graphene includes: measuring, through spectroscopic ellipsometry, a reflection spectrum of a measurement object having a graphene film formed through CVD on a substrate; creating a film structure model, calculating polarization parameters, and matching calculated values of the polarization parameters to measured values through fitting; and detecting abnormal growth of the graphene based on a value of goodness of fit obtained when fitting the polarization parameters.
    Type: Application
    Filed: March 5, 2020
    Publication date: June 16, 2022
    Inventors: Ryota IFUKU, Takashi MATSUMOTO, Akira FUJIO, Shin KONO
  • METHOD AND APPARATUS FOR DETECTING ABNORMAL GROWTH OF GRAPHENE
    Publication number: 20220155242
    Abstract: A method of detecting an abnormal growth of graphene includes: preparing an inspection target having a graphene film formed on a substrate by CVD; receiving light from the graphene film by using a dark field optical system; and inspecting the received light, thereby detecting the abnormal growth of the graphene.
    Type: Application
    Filed: February 26, 2020
    Publication date: May 19, 2022
    Inventors: Ryota IFUKU, Takashi MATSUMOTO, Akira FUJIO, Kousaku SAITO