Abstract: A polishing apparatus (30) has a polishing surface (32), a top ring (36) for holding a wafer (W), motors (46, 56) to move the polishing surface (32) and the wafer (W) relative to each other at a relative speed, and a vertical movement mechanism (54) to press the wafer (W) against the polishing surface (32) under a pressing pressure. The polishing apparatus (30) also has a controller (44) to adjust a polishing condition in a non-Preston range in which a polishing rate is not proportional to a product of the pressing pressure and the relative speed. The polishing apparatus (30) can simultaneously achieve uniform supply of a chemical liquid to a surface of the wafer (W) and a uniform polishing rate within the surface of the wafer (W).

Abstract: A polishing method can prevent scratches in a polished surface of a polishing object, caused by foreign matter adhering to a surface of a polishing member, thus preventing the attendant lowering of the yield even when the polishing object is large-sized. The polishing method includes: specifying a foreign matter adhesion position or a foreign matter adhesion area in a surface of the polishing member; and intensively cleaning the foreign matter adhesion position or the foreign matter adhesion area in the surface of the polishing member.

Abstract: A polishing method can automatically reset polishing conditions according to a state of a polishing member based on data on a polishing profile changing with time, thereby extending life of the polishing member and obtaining flatness of a polished surface with higher accuracy. The polishing method, includes steps of: independently applying a desired pressure by each of pressing portions of a top ring on a polishing object; estimating a polishing profile of the polishing object based on set pressure values, and calculating a recommended polishing pressure value so that a difference between the polishing profile of the polishing object after it is polished under certain polishing conditions and a desired polishing profile becomes smaller; and polishing the polishing object with the recommended polishing pressure value.

Abstract: A polishing apparatus (30) has a polishing surface (32), a top ring (36) for holding a wafer (W), motors (46, 56) to move the polishing surface (32) and the wafer (W) relative to each other at a relative speed, and a vertical movement mechanism (54) to press the wafer (W) against the polishing surface (32) under a pressing pressure. The polishing apparatus (30) also has a controller (44) to adjust a polishing condition in a non-Preston range in which a polishing rate is not proportional to a product of the pressing pressure and the relative speed. The polishing apparatus (30) can simultaneously achieve uniform supply of a chemical liquid to a surface of the wafer (W) and a uniform polishing rate within the surface of the wafer (W).

Abstract: A polishing method can automatically reset polishing conditions according to a state of a polishing member based on data on a polishing profile changing with time, thereby extending life of the polishing member and obtaining flatness of a polished surface with higher accuracy. The polishing method, includes steps of: independently applying a desired pressure by each of pressing portions of a top ring on a polishing object; estimating a polishing profile of the polishing object based on set pressure values, and calculating a recommended polishing pressure value so that a difference between the polishing profile of the polishing object after it is polished under certain polishing conditions and a desired polishing profile becomes smaller; and polishing the polishing object with the recommended polishing pressure value.

Abstract: A polishing method can automatically reset polishing conditions according to a state of a polishing member based on data on a polishing profile changing with time, thereby extending life of the polishing member and obtaining flatness of a polished surface with higher accuracy. The polishing method, includes steps of: independently applying a desired pressure by each of pressing portions of a top ring on a polishing object; estimating a polishing profile of the polishing object based on set pressure values, and calculating a recommended polishing pressure value so that a difference between the polishing profile of the polishing object after it is polished under certain polishing conditions and a desired polishing profile becomes smaller; and polishing the polishing object with the recommended polishing pressure value.

Abstract: An image output apparatus for outputting an image to an image capturing apparatus comprises a first acquisition part for acquiring information concerning a display resolution of a display of the image capturing apparatus, a change part for changing an output resolution of the image in accordance with the display resolution, and an output part for outputting the image with the output resolution changed by the change part to the image capturing apparatus. The change part changes the output resolution to a resolution lower than an original resolution of the image.

Abstract: A polishing method can automatically reset polishing conditions according to a state of a polishing member based on data on a polishing profile changing with time, thereby extending life of the polishing member and obtaining flatness of a polished surface with higher accuracy. The polishing method, includes steps of: independently applying a desired pressure by each of pressing portions of a top ring on a polishing object; estimating a polishing profile of the polishing object based on set pressure values, and calculating a recommended polishing pressure value so that a difference between the polishing profile of the polishing object after it is polished under certain polishing conditions and a desired polishing profile becomes smaller; and polishing the polishing object with the recommended polishing pressure value.

Abstract: A beam source has a plasma generating chamber, an antenna for generating plasma in the plasma generating chamber, a first electrode disposed in the plasma generating chamber, and a second electrode disposed in the plasma generating chamber. Both of the antenna and the second electrode face the first electrode. The beam source also includes a power supply for applying a voltage between the first electrode and the second electrode to extract particles from the plasma generated by the antenna. The beam source applies various kinds of beams having a large diameter, such as a positive ion beam, a negative ion beam, and a neutral particle beam, uniformly to a workpiece.

Abstract: A beam source has a plasma generating chamber and a gas inlet port for introducing a gas into the plasma generating chamber. The beam source includes a plasma generator for generating positive-negative ion plasma containing positive ions at a density of at least 1010 ions/cm3 and negative ions from the gas. The beam source also includes a plasma potential adjustment electrode disposed in the plasma generating chamber and a grid electrode having a plurality of beam extraction holes formed therein. The beam extraction holes have a diameter of at least 0.5 mm. The beam source has a first power supply for applying a voltage of at most 500 V between the plasma potential adjustment electrode and the grid electrode.

Abstract: A polishing method can automatically reset the polishing conditions according to the state of a polishing member based on data on the polishing profile changing with time, thereby extending the life of the polishing member and obtaining flatness of the polished surface with higher accuracy. The polishing method, including the steps of: independently applying a desired pressure by each of the pressing portions of the top ring on the polishing object; estimating a polishing profile of the polishing object based on set pressure values, and calculating a recommended polishing pressure value so that the difference between the polishing profile of the polishing object after it is polished under certain polishing conditions and a desired polishing profile becomes smaller; and polishing the polishing object with the recommended polishing pressure value.

Abstract: A digital-type camera having a printing mechanism which assures a high quality of prints in an environment with a low temperature. The digital-type camera has an arrangement in which an ink cartridge, for storing ink fed to a printer head of a printing part, is installed on a rear surface of a substrate on a front surface of which a CCD of a heat-generating component is installed. Heat generated from the CCD is conducted to the ink cartridge via the substrate, so that the ink stored inside the ink cartridge is prevented from dropping down in temperature, and so that the temperature of the ink is kept within a thermal region within which its printing operation is guaranteed.

Abstract: The present invention relates to a microchip apparatus using liquids. More specifically, the invention provides a liquid mixing apparatus comprising at least two microchannels for introducing liquids and a mixing microchannel that connects to the at least two liquid-introducing microchannels, wherein the liquids are transported from the respective liquid-introducing microchannels toward the mixing microchannel, the apparatus further comprising means for enhancing the mixing of the liquids that converge in the mixing microchannel. The invention also provides an electrophoretic apparatus and a microchip electrophoretic apparatus for denaturing gradient gel electrophoresis.

Abstract: There is provided a digital camera having a printing function, the camera having a moving member for moving from an out-of-use position to an in-use position to perform a shooting operation, a selector for selecting a printing operation to be performed, and a controller for bringing the moving member into the out-of-use position in response to the selection of the printing operation by the selector.

Abstract: A beam source has a plasma generating chamber and a gas inlet port for introducing a gas into the plasma generating chamber. The beam source includes a plasma generator for generating positive-negative ion plasma containing positive ions at a density of at least 1010 ions/cm3 and negative ions from the gas. The beam source also includes a plasma potential adjustment electrode disposed in the plasma generating chamber and a grid electrode having a plurality of beam extraction holes formed therein. The beam extraction holes have a diameter of at least 0.5 mm. The beam source has a first power supply for applying a voltage of at most 500 V between the plasma potential adjustment electrode and the grid electrode.

Abstract: A beam source has a plasma generating chamber, an antenna for generating plasma in the plasma generating chamber, a first electrode disposed in the plasma generating chamber, and a second electrode disposed in the plasma generating chamber. Both of the antenna and the second electrode face the first electrode. The beam source also includes a power supply for applying a voltage between the first electrode and the second electrode to extract particles from the plasma generated by the antenna. The beam source applies various kinds of beams having a large diameter, such as a positive ion beam, a negative ion beam, and a neutral particle beam, uniformly to a workpiece.

Abstract: A digital camera having a printing function which is driven by a battery comprises a printer unit operable when the voltage of the battery is equal to or higher than a first voltage, a camera unit operable when the voltage of the battery is equal to or higher than a second voltage, and a voltage detecting unit for detecting the voltage of the battery. The digital camera further comprises controller which compares the voltage of the battery detected by the voltage detecting unit with the first and second voltages and performs, based on the result of comparison, a control operation whereby the respective operations of the printer unit and the camera unit are enabled or disabled.

Abstract: A digital camera (image capturing apparatus) includes a liquid crystal display (LCD), a crossed switch constructed by a plurality of buttons, and a turnable dial. The digital camera has a plurality of function modes including an exposure correction mode and a histogram display mode of displaying a finder image and a histogram (luminance distribution) of the finder image on an LCD prior to an image capturing operation. In the exposure correction mode, an exposure correction value is changed by an operation input of two or more steps (actions) of the user on the buttons of the crossed switch. On the other hand, in the histogram display mode, an exposure correction value is changed by an operation input of a single step on the dial. With the configuration, in the case of displaying the luminance distribution regarding a finder image, a simple exposure setting can be made.

Abstract: There is provided a digital camera having a printing function, the camera comprising a detector for detecting the amount of camera shake during shooting, a recording medium for recording each of shot images and camera shake data on the amount of camera shake detected by the detector, a selector for selecting a shot image to be printed from the shot images recorded on the recording medium, and a controller for judging, for the shot image selected by the selector, whether or not proper printing of the shot image can be performed. The digital camera further comprises an indicator for giving a warning when it is judged that proper printing cannot be performed.

Abstract: A digital camera has a display such as an LCD. A viewfinder image obtained by a CCD before photographing is displayed on the display, and a pointer which can be moved up, down, right and left by operation of the user is displayed so as to be superimposed on the viewfinder image. A histogram indicative of a luminance distribution of the whole viewfinder image and a marker indicative of luminance of a pixel of a portion designated by the pointer are displayed so as to be superimposed on the viewfinder image. By displaying the marker, the user can grasp luminance information of a part of the viewfinder image.