Patents by Inventor Akira Horiguchi

Akira Horiguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10376899
    Abstract: A magnetic-matter removing apparatus includes: endless chains arranged to run in circles between inside liquid containing a magnetic matter and above the liquid; magnetic-matter attracting means supported on the endless chains for attracting the magnetic matter in the liquid with a magnetic force; a drum arranged above the liquid, having a magnetic force stronger than the magnetic force of the magnetic-matter attracting means, and configured to detach the magnetic matter attracted to the magnetic-matter attracting means from the magnetic-matter attracting means and attract the magnetic matter; and discharging means for scraping the magnetic matter attracted to the drum and discharging the magnetic matter to outside the apparatus.
    Type: Grant
    Filed: March 4, 2016
    Date of Patent: August 13, 2019
    Assignee: PRIMETALS TECHNOLOGIES JAPAN, LTD.
    Inventors: Akira Horiguchi, Norihiko Ikenaga, Hirofumi Honda
  • Patent number: 10347499
    Abstract: In a method of an embodiment, radicals, which are generated from a processing gas, is adsorbed to a layer to be etched without applying a high-frequency bias to a lower electrode, in an adsorption step. In the subsequent etching step, ions, which are generated from the processing gas, are drawn into the layer to be etched by applying a high-frequency bias to the lower electrode. The adsorption step and the etching step are alternately repeated. In the adsorption step, a density of radicals is 200 or greater times a density of ions. In the etching step, RF energy having a power density of 0.07 W/cm2 or less is supplied to the lower electrode or a high-frequency bias having a power density of 0.14 W/cm2 or less is supplied to the lower electrode for a period of 0.5 seconds or less.
    Type: Grant
    Filed: April 6, 2016
    Date of Patent: July 9, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Koji Maruyama, Akira Koshiishi, Toshio Haga, Masato Horiguchi, Makoto Kato
  • Publication number: 20160271621
    Abstract: A magnetic-matter removing apparatus includes: endless chains arranged to run in circles between inside liquid containing a magnetic matter and above the liquid; magnetic-matter attracting means supported on the endless chains for attracting the magnetic matter in the liquid with a magnetic force; a drum arranged above the liquid, having a magnetic force stronger than the magnetic force of the magnetic-matter attracting means, and configured to detach the magnetic matter attracted to the magnetic-matter attracting means from the magnetic-matter attracting means and attract the magnetic matter; and discharging means for scraping the magnetic matter attracted to the drum and discharging the magnetic matter to outside the apparatus.
    Type: Application
    Filed: March 4, 2016
    Publication date: September 22, 2016
    Applicant: PRIMETALS TECHNOLOGIES JAPAN, LTD.
    Inventors: Akira HORIGUCHI, Norihiko IKENAGA, Hirofumi HONDA
  • Patent number: 8870627
    Abstract: To propose a method for realizing appropriate delivering of works to carriers in the conventional transfer process. Specifically, in a polishing method for polishing a work retained in a carrier, at least one carrier for retaining a work to be polished is placed between an upper plate and a lower plate; the work is fit in a hole of the carrier; the carrier and the work are inserted between the upper plate and the lower plate; and at least one of the upper plate and the lower plate is rotated while supplying a polishing agent to a space between the upper plate and the lower plate. In fitting the work in the hole of the carrier, an end portion of the work is held and the work is carried to a position above the lower plate; the work is positioned with respect to the hole of the carrier on the lower plate; and the work is released from the hold and guided by a guide to be slowly carried down toward the hole.
    Type: Grant
    Filed: August 20, 2010
    Date of Patent: October 28, 2014
    Assignee: Sumco Corporation
    Inventors: Hiroto Fukushima, Akira Horiguchi, Ken Isobe, Tomonori Miura, Shoji Nakao
  • Patent number: 8564210
    Abstract: A light source module includes a substrate unit for mounting multiple light emitting diodes thereon to electrically connecting them; first and second electrical connecting terminals for supplying a current to the light emitting diodes based on a voltage applied from outside the substrate unit; and a characteristic setting unit for presetting characteristic information corresponding to a electrical characteristic of the light emitting diodes. Further, the light source module includes a third electrical connecting terminal for outputting a setting signal based on the characteristic information preset in the characteristic setting unit, and the characteristic setting unit is connected at least between the third and first electrical connecting terminals or between the third and second electrical connecting terminals, and the characteristic setting unit responds to a set-up power inputted from the third electrical connecting terminal to generate the setting signal.
    Type: Grant
    Filed: February 28, 2011
    Date of Patent: October 22, 2013
    Assignee: Panasonic Corporation
    Inventors: Katunobu Hamamoto, Akira Horiguchi, Hiroshi Sugawara, Kei Mitsuyasu
  • Publication number: 20120220200
    Abstract: To propose a method for realizing appropriate delivering of works to carriers in the conventional transfer process. Specifically, in a polishing method for polishing a work retained in a carrier, at least one carrier for retaining a work to be polished is placed between an upper plate and a lower plate; the work is fit in a hole of the carrier; the carrier and the work are inserted between the upper plate and the lower plate; and at least one of the upper plate and the lower plate is rotated while supplying a polishing agent to a space between the upper plate and the lower plate. In fitting the work in the hole of the carrier, an end portion of the work is held and the work is carried to a position above the lower plate; the work is positioned with respect to the hole of the carrier on the lower plate; and the work is released from the hold and guided by a guide to be slowly carried down toward the hole.
    Type: Application
    Filed: August 20, 2010
    Publication date: August 30, 2012
    Inventors: Hiroto Fukushima, Akira Horiguchi, Ken Isobe, Tomonori Miura, Shoji Nakao
  • Publication number: 20110210675
    Abstract: A light source module includes a substrate unit for mounting multiple light emitting diodes thereon to electrically connecting them; first and second electrical connecting terminals for supplying a current to the light emitting diodes based on a voltage applied from outside the substrate unit; and a characteristic setting unit for presetting characteristic information corresponding to a electrical characteristic of the light emitting diodes. Further, the light source module includes a third electrical connecting terminal for outputting a setting signal based on the characteristic information preset in the characteristic setting unit, and the characteristic setting unit is connected at least between the third and first electrical connecting terminals or between the third and second electrical connecting terminals, and the characteristic setting unit responds to a set-up power inputted from the third electrical connecting terminal to generate the setting signal.
    Type: Application
    Filed: February 28, 2011
    Publication date: September 1, 2011
    Applicant: Panasonic Electric Works Co., Ltd.
    Inventors: Katunobu Hamamoto, Akira Horiguchi, Hiroshi Sugawara, Kei Mitsuyasu
  • Patent number: 8002610
    Abstract: To provide a technique for rotating a plurality of carriers 500 between an upper and a lower rotary surface plates to simultaneously polish both surfaces of a plurality of works 400. The work 400 is merged with the carrier 500 outside a polishing apparatus main body 110. The work 400 is supplied onto a lower rotary surface plate 111 of the polishing apparatus main body 110 while remaining merged with the carrier 500. The present invention enables the work 400 on the lower rotary surface plate 111 to be perfectly automatically supplied. After double side polishing has been completed and when an upper rotary surface plate, a liquid such as a water is injected from the upper rotary surface plate to hold the plurality of works 400 to have both surfaces thereof polished, on the lower rotary surface plate 111. The present invention enables the works 400 to be automatically ejected from the lower rotary surface plate 111.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: August 23, 2011
    Assignee: Sumitomo Mitsubishi Silicon Corporation
    Inventors: Akira Horiguchi, Ken Isobe, Heigo Tanaka, Tomio Fukushima, Kiyohide Murata, Tsuneo Takeda, Yoshiaki Uzu, Hiroshi Matsumoto
  • Publication number: 20100130111
    Abstract: To provide a technique for rotating a plurality of carriers 500 between an upper and a lower rotary surface plates to simultaneously polish both surfaces of a plurality of works 400. The work 400 is merged with the carrier 500 outside a polishing apparatus main body 110. The work 400 is supplied onto a lower rotary surface plate 111 of the polishing apparatus main body 110 while remaining merged with the carrier 500. The present invention enables the work 400 on the lower rotary surface plate 111 to be perfectly automatically supplied. After double side polishing has been completed and when an upper rotary surface plate, a liquid such as a water is injected from the upper rotary surface plate to hold the plurality of works 400 to have both surfaces thereof polished, on the lower rotary surface plate 111. The present invention enables the works 400 to be automatically ejected from the lower rotary surface plate 111.
    Type: Application
    Filed: November 24, 2009
    Publication date: May 27, 2010
    Inventors: Akira Horiguchi, Ken Isobe, Heigo Tanaka, Tomio Fukushima, Kiyohide Murata, Tsuneo Takeda, Yoshiaki Uzu, Hiroshi Matsumoto
  • Patent number: 7648409
    Abstract: A method of polishing the double sides of a plurality of works simultaneously by rotating a plurality of carriers between upper and lower rotating surface plates, comprising the steps of forming the works (400) integrally with the carriers (500) on the outside of a polishing device main body (110), feeding the works (400) onto a rotating surface plate (111) on the underside of the polishing device main body (110) with the works formed integrally with the carriers (500), injecting liquid such as water from the upper side rotating surface plate when the upper side rotating surface plate is raised after the double sides are polished, holding the plurality of works (400) on the lower side rotating surface plate (111) after the double sides are polished, enabling the works (400) to be discharged automatically from the lower side rotating surface plate (111), providing a brush storage part (180) and a dresser storage part (190) near the polishing device main body (110), and frequently treating a polishing cloth ins
    Type: Grant
    Filed: May 17, 2000
    Date of Patent: January 19, 2010
    Assignees: Sumitomo Mitsubishi Silicon Corporation, Kashiwara Machine Mfg. Co., Ltd.
    Inventors: Akira Horiguchi, Ken Isobe, Heigo Tanaka, Tomio Fukushima, Kiyohide Murata, Tsunco Takeda, Yoshiaki Uzu, Hiroshi Matsumoto
  • Publication number: 20060128276
    Abstract: In a carrier of the invention, a thick ring-shaped support frame is provided at an outer periphery of a carrier body in which a workpiece housing hole for holding a workpiece is opened. An outer periphery of the support frame is provided with a teeth portion for engaging with driving gears for driving the carrier. The support frame is made of a different member from the carrier body. The carrier body is removably attached to the support frame by screws. The carrier body is made of a material suitable for holding a wafer. The support frame is made of a material suitable for engaging with driving gears for moving the carrier.
    Type: Application
    Filed: December 8, 2005
    Publication date: June 15, 2006
    Applicant: SUMCO CORPORATION
    Inventors: Akira Horiguchi, Shoji Nakao
  • Patent number: 7029380
    Abstract: In order to improve a flatness of a work in single wafer type double-side polishing in which one wafer is polished with one carrier, a carrier larger in diameter than upper and lower surface plates that rotate is inserted between the surface plates, and a wafer smaller in diameter than the surface plates is held with the carrier. The carrier is rotated by plural eccentric gears that mesh with external gear teeth formed on the outer peripheral surface of the carrier at plural positions along a circumferential direction thereof and revolve around positions spaced from the centers as centers in synchronism with each other or one another at the plural positions of meshing. The carrier rotates about its center and moves circularly around the center of the surface plates spaced from the center thereof. The upper surface plate is reciprocated in a direction perpendicular to the central axis when required.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: April 18, 2006
    Assignees: Kashiwara Machine Mfg. Co., Ltd., Sumitomo Mitsubishi Silicon Corporation
    Inventors: Akira Horiguchi, Shoji Nakao
  • Publication number: 20060011462
    Abstract: In the presence of a catalytic system, an alcohol having “n” carbon atom(s) or a derivative thereof is allowed to react with carbon monoxide in a reactor 3 continuously, a higher bp catalyst component is separated from the resultant reaction mixture by a catalyst-separating column 5 to give a crude mixture, the crude mixture is fed to a higher bp component-separation column 8 to separate an overhead fraction from a bottom fraction containing at least a carboxylic acid having “n+2” carbon atoms, the overhead fraction is fed to a carboxylic acid-separating column 11, and are distilled in the presence of at least water and an ester of the carboxylic acid with the alcohol to separate a overhead fraction containing at least the ester and water from a bottom fraction containing the carboxylic acid having “n+1” carbon atoms. The overhead fraction from the carboxylic acid-separating column is fed to an aldehyde-separating column 14 to remove an overhead fraction containing an aldehyde.
    Type: Application
    Filed: October 3, 2003
    Publication date: January 19, 2006
    Inventors: Akira Horiguchi, Tomohide Ina, Hiroyuki Miura
  • Publication number: 20050159089
    Abstract: In order to improve a flatness of a work in single wafer type double-side polishing in which one wafer is polished with one carrier, a carrier larger in diameter than upper and lower surface plates that rotate is inserted between the surface plates, and a wafer smaller in diameter than the surface plates is held with the carrier. The carrier is rotated by plural eccentric gears that mesh with external gear teeth formed on the outer peripheral surface of the carrier at plural positions along a circumferential direction thereof and revolve around positions spaced from the centers as centers in synchronism with each other or one another at the plural positions of meshing. The carrier rotates about its center and moves circularly around the center of the surface plates spaced from the center thereof. The upper surface plate is reciprocated in a direction perpendicular to the central axis when required.
    Type: Application
    Filed: December 20, 2004
    Publication date: July 21, 2005
    Applicants: Kashiwara Machine Mfg. Co., Ltd., Sumitomo Mitsubishi Silicon Corporation
    Inventors: Akira Horiguchi, Shoji Nakao
  • Patent number: 6107064
    Abstract: The present invention relates to a process for producing a xanthine derivative represented by formula (II), comprising converting a xanthine derivative represented by formula (I) {hereinafter, referred to as Compound (I)}: ##STR1## (wherein R.sup.1 and R.sup.2 independently represent hydrogen, or hydroxy-substituted, oxo-substituted, or unsubstituted lower alkyl) into a xanthine derivative represented by formula (II) {hereinafter, referred to as Compound (II)}: ##STR2## (wherein R.sup.3 and R.sup.4 independently represent hydrogen, or hydroxy-substituted, oxo-substituted, or unsubstituted lower alkyl; R.sup.5 and R.sup.6 independently represent hydrogen, hydroxy, or oxo; with the proviso that R.sup.5 and R.sup.6 are both hydrogen, at least one of R.sup.3 and R.sup.
    Type: Grant
    Filed: January 17, 1996
    Date of Patent: August 22, 2000
    Assignee: Kyowa Hakko Kogyo Co., Ltd.
    Inventors: Junichi Shimada, Tamotsu Eguchi, Kenichi Mochida, Akira Horiguchi, Tohru Yasuzawa, Hideaki Kusaka, Hiromi Nonaka, Fumio Suzuki
  • Patent number: 5874624
    Abstract: Disclosed are a process for the preparation of a dihydroxyamino compound in which water and discoloring ingredients are removed while preventing decomposition of a dihydroxyamino compound by distilling a crude reaction liquid containing an epoxy compound and an amino compound at a specified temperature and pressure, a process for improving a yield of a dihydroxyamino compound having high purity by recirculating an aqueous solution of an amino compound recollected from a crude reaction liquid into a reaction step, and a process in which there are prevented discoloration and a yield decline of a dihydroxyamino compound.
    Type: Grant
    Filed: October 21, 1997
    Date of Patent: February 23, 1999
    Assignee: Daicel Chemical Industries, Ltd.
    Inventors: Akira Horiguchi, Akihisa Takabe, Etsuo Takemoto
  • Patent number: 5756780
    Abstract: Disclosed are an improvement of a process for the preparation of a purified 3,4-epoxycyclohexyl methyl(meth)acrylate, and a stabilized 3,4-epoxycyclohexyl methyl(meth)acrylate.
    Type: Grant
    Filed: August 23, 1996
    Date of Patent: May 26, 1998
    Assignee: Daicel Chemical Industries, Ltd.
    Inventors: Kyuichi Ohyama, Akira Horiguchi
  • Patent number: 5466856
    Abstract: An alcohol, e.g. methanol, carbon monoxide and oxygen are allowed to react in a gas phase in the presence of a solid catalyst comprising a catalyst component, for instance, containing halogen and copper atoms supported on a solid support. The alcohol and carbon monoxide contents of the reactor feed gas are controlled at 1 to 20 volume % and 70 to 95 volume %, respectively. Because the alcohol and carbon monoxide contents of the feed reactant gas are thus controlled, side reactions are considerably inhibited and the object carbonic diester is produced with high selectivity.
    Type: Grant
    Filed: August 3, 1994
    Date of Patent: November 14, 1995
    Assignee: Daicel Chemical Industries, Ltd.
    Inventors: Akira Horiguchi, Shingo Oda
  • Patent number: 4841916
    Abstract: An evaporating apparatus includes an evaporator (E) for converting a liquid into vapor and a preheater (2) for heating the liquid before it is fed to the evaporator (E). A pump (6) for feeding the liquid to the preheater (2) and another pump (8) for pressurizing the liquid passing from the preheater (2) to the evaporator (E) are provided, where the former maintains the liquid at a saturation pressure with respect to a temperature slightly higher than a saturation temperature (t.sub.o) at the preheater outlet, and the latter serves to raise the liquid pressure to a saturation pressure with respect to a desired evaporation temperature (t.sub.2). Rate of flow of a heating medium for the preheater (2) is controlled so that its temperature (t.sub.w3) is slightly higher than a liquid preheater outlet temperature (t.sub.ex). Thus, in the preheater (2), the liquid temperature (t.sub.ex) is maintained lower than saturation temperature (t.sub.o), ensuring a greater amount of heat transfer by subcool boiling.
    Type: Grant
    Filed: May 23, 1988
    Date of Patent: June 27, 1989
    Assignee: Hisaka Works, Limited
    Inventors: Hiroyuki Sumitomo, Akira Horiguchi
  • Patent number: 4827877
    Abstract: A heat recovery system including a closed working fluid loop constituted by connecting an evaporating apparatus supplied with warm waste water, a steam turbine having an output shaft to be coupled to the load, and a condensing apparatus supplied with cooling water, works on the basis of a Rankine cycle and utilize non-azeotropic mixture as the working fluid.
    Type: Grant
    Filed: March 16, 1988
    Date of Patent: May 9, 1989
    Assignee: Hisaka Works, Limited
    Inventors: Hiroyuki Sumitomo, Akira Horiguchi