Abstract: A substrate processing apparatus includes a process module in which a substrate is processed, a first substrate storing container, a second substrate storing container, and a transferring module that conveys the substrate between locations connected by the transferring module, wherein the process module, the first substrate storing container, and the second substrate storing container are connected by the transferring module, the method including the successive steps of, conveying an unprocessed substrate stored in the first substrate storing container to the second substrate container, conveying the unprocessed substrate stored in the second substrate storing container to the process module to process the unprocessed substrate, conveying the processed substrate processed in the process module to the first substrate storing container, and introducing inactive gas into the first substrate storing container.

Abstract: A method of processing an object to by using a processing apparatus is provided. The apparatus includes a plurality of containers to contain the object, a plurality of process chambers to perform a desired process on the object, a temporary storage chamber to temporarily store the object, and a transfer device to transfer the object. The method includes a first step of transferring an unprocessed object from the containers to the process chambers, and a second step of transferring a processed object from the process chambers to the temporary storage chamber. The method further includes a third step of collecting the processed object into one of the containers starting a collection of the processed object from the temporary storage chamber depending on a timing of processing a last object of the one of the containers prior to collecting the processed object into the other containers from the temporary storage chamber.

Abstract: A substrate processing apparatus includes a process module in which a substrate is processed, a first substrate storing container, a second substrate storing container, and a transferring module that conveys the substrate between locations connected by the transferring module, wherein the process module, the first substrate storing container, and the second substrate storing container are connected by the transferring module, the method including the successive steps of, conveying an unprocessed substrate stored in the first substrate storing container to the second substrate container, conveying the unprocessed substrate stored in the second substrate storing container to the process module to process the unprocessed substrate, conveying the processed substrate processed in the process module to the first substrate storing container, and introducing inactive gas into the first substrate storing container.

Abstract: A method of processing an object to by using a processing apparatus is provided. The apparatus includes a plurality of containers to contain the object, a plurality of process chambers to perform a desired process on the object, a temporary storage chamber to temporarily store the object, and a transfer device to transfer the object. The method includes a first step of transferring an unprocessed object from the containers to the process chambers, and a second step of transferring a processed object from the process chambers to the temporary storage chamber. The method further includes a third step of collecting the processed object into one of the containers starting a collection of the processed object from the temporary storage chamber depending on a timing of processing a last object of the one of the containers prior to collecting the processed object into the other containers from the temporary storage chamber.

Abstract: In lower structures for vehicle front pillars, there are paired right and left side sills arranged in lower portions on both sides of a vehicle, respectively; an outer portion, in a vehicle width direction, of each side sill is formed of an outer reinforcement for a side sill; a inner panel for the side sill is arranged on an inner side, in the vehicle width direction, of each side sill; the front pillars are formed so as to stand on front ends of the side sills, respectively; outer panels for side bodies cover outer reinforcements for the respective front pillars and parts of the respective side sills; each outer reinforcement for side sill is segmented, in the vehicle front and rear direction, into three parts, that is to say, first to third components positioning sequentially from a front of the vehicle; strengths of the first to third components are set to be higher sequentially in this order; and the first, second, and third components are joined and integrated together.

Abstract: A pillar structure of a vehicle body includes a pillar that forms a closed cross-sectional structure made up of an outer panel and an inner panel and that extends substantially along the vertical direction. The inner panel defines an opening and a reinforcing member is joined to a part including at least the periphery of the opening in the inner panel of the pillar.

Abstract: In lower structures for vehicle front pillars, there are paired right and left side sills arranged in lower portions on both sides of a vehicle, respectively; an outer portion, in a vehicle width direction, of each side sill is formed of an outer reinforcement for a side sill; a inner panel for the side sill is arranged on an inner side, in the vehicle width direction, of each side sill; the front pillars are formed so as to stand on front ends of the side sills, respectively; outer panels for side bodies cover outer reinforcements for the respective front pillars and parts of the respective side sills; each outer reinforcement for side sill is segmented, in the vehicle front and rear direction, into three parts, that is to say, first to third components positioning sequentially from a front of the vehicle; strengths of the first to third components are set to be higher sequentially in this order; and the first, second, and third components are joined and integrated together.

Abstract: A pillar structure of a vehicle body is provided with a pillar that forms a closed cross-sectional structure by means of an outer panel and an inner panel and extends substantially along the vertical direction. In the pillar structure, a reinforcing member is joined to a part including at least the periphery of an opening of the inner panel of the pillar.

Abstract: In a structure for attaching an interior trim panel around an automotive front pillar, in which an airbag (6) is stored in a space in the range from the inside of a front pillar trim (2) to the inside of a roof lining (3), an engagement projection (92) projecting in almost the same direction as the deployment direction of the airbag is provided at intervals in the range from a flange (11) of a door opening (7) to the inside of a vehicle compartment in a portion which is adjacent to a joint portion (L1) of the front pillar trim and the roof lining and extends along the door opening of a vehicle body panel (10) located on the inside of the front pillar trim, and on the other hand, an engagement portion (24) projecting in the substantially opposite direction to the deployment direction of the airbag is provided on the back surface of an end edge portion on the door opening side of the front pillar trim (2), whereby the engagement portion (24) is engaged to the engagement projection (92).

Abstract: In a structure for attaching an interior trim panel around an automotive front pillar, in which an airbag (6) is stored in a space in the range from the inside of a front pillar trim (2) to the inside of a roof lining (3), an engagement projection (92) projecting in almost the same direction as the deployment direction of the airbag is provided at intervals in the range from a flange (11) of a door opening (7) to the inside of a vehicle compartment in a portion which is adjacent to a joint portion (L1) of the front pillar trim and the roof lining and extends along the door opening of a vehicle body panel (10) located on the inside of the front pillar trim, and on the other hand, an engagement portion (24) projecting in the substantially opposite direction to the deployment direction of the airbag is provided on the back surface of an end edge portion on the door opening side of the front pillar trim (2), whereby the engagement portion (24) is engaged to the engagement projection (92).