Abstract: A control unit obtains a captured image of a reference workpiece by a second image capturing unit after a droplet ejected from a droplet ejecting head lands toward a reference mark formed on an upper surface of the reference workpiece, detects a positional deviation amount of a position of the reference mark and a landing position of the droplet based on the captured image, and calculates the correction amounts of the relative positions of a workpiece table and a droplet ejecting head based on the positional deviation amount.

Abstract: Disclosed is droplet ejecting apparatus that ejects droplets of a functional liquid onto a workpiece to draw a pattern. The droplet ejecting apparatus includes: a workpiece table; a droplet ejecting head configured to eject the droplets onto the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the droplet ejecting head in a main scanning direction and a sub-scanning direction; and a control unit configured to: detect a position of the workpiece or a position of the workpiece table while relatively moving the workpiece table and the droplet ejecting head along a plurality of scanning lines extending in the main scanning direction and set side by side in the sub-scanning direction; and create, based on a detection result, a correction table that indicates a correlation between a position of the movement mechanism and a positional correction amount of the workpiece table.

Abstract: A control unit obtains a captured image of a reference workpiece by a second image capturing unit after a droplet ejected from a droplet ejecting head lands toward a reference mark formed on an upper surface of the reference workpiece, detects a positional deviation amount of a position of the reference mark and a landing position of the droplet based on the captured image, and calculates the correction amounts of the relative positions of a workpiece table and a droplet ejecting head based on the positional deviation amount.

Abstract: Disclosed is droplet ejecting apparatus that ejects droplets of a functional liquid onto a workpiece to draw a pattern. The droplet ejecting apparatus includes: a workpiece table; a droplet ejecting head configured to eject the droplets onto the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the droplet ejecting head in a main scanning direction and a sub-scanning direction; and a control unit configured to: detect a position of the workpiece or a position of the workpiece table while relatively moving the workpiece table and the droplet ejecting head along a plurality of scanning lines extending in the main scanning direction and set side by side in the sub-scanning direction; and create, based on a detection result, a correction table that indicates a correlation between a position of the movement mechanism and a positional correction amount of the workpiece table.

Abstract: Disclosed is a coating apparatus. A first imaging unit captures an image of the substrate disposed on the stage. A second imaging unit captures an image of the substrate disposed on the stage with a narrower viewing angle and higher resolution than the first imaging unit. The control unit performs a pre-alignment processing of capturing an image of a circular pre-alignment mark formed on the substrate using the first imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image and, after the pre-alignment processing, performs a fine-alignment processing of capturing an image of a circular fine-alignment mark formed on the substrate using the second imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image.

Abstract: Disclosed is a coating apparatus. A first imaging unit captures an image of the substrate disposed on the stage. A second imaging unit captures an image of the substrate disposed on the stage with a narrower viewing angle and higher resolution than the first imaging unit. The control unit performs a pre-alignment processing of capturing an image of a circular pre-alignment mark formed on the substrate using the first imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image and, after the pre-alignment processing, performs a fine-alignment processing of capturing an image of a circular fine-alignment mark formed on the substrate using the second imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image.