Abstract: In the related art, no consideration is given to a configuration of a deformation detecting device, an installation place or an installation method for the measurement target.

Abstract: In the related art, no consideration is given to a configuration of a deformation detecting device, an installation place or an installation method for the measurement target.

Abstract: An acceleration sensor and an angular velocity sensor are sealed in respective pressure atmospheres suitable therefor in the process of a series of bonding steps, thereby improving the detection sensibilities of the sensors. A movable member 111 of an acceleration sensor 11 and a vibrator 121 of an angular velocity sensor 12 are fabricated on the same sensor wafer 10 with a wall 16 interposed therebetween. A cap wafer 20 is formed in which gaps 21, 22 corresponding to the movable member 111 of the acceleration sensor 11 and the vibrator 121 of the angular velocity sensor 12 are provided. Bumps 23 are disposed near the gap 22 of the angular velocity sensor 12. The acceleration sensor 11 is sealed at atmospheric pressure. Then, the angular velocity sensor 12 is subjected to high temperature and a high-load and is vacuum-sealed. Thereafter, cutting with a diamond grindstone and mounting of circuit substrates and a wiring substrate are performed to form a combined sensor.

Abstract: A culturing apparatus has a culture vessel having a first elastic seal bonded on its upper surface and a culture space formed thereon, and a joint for supplying solution such as a medium to the culture vessel and a second elastic seal having microprojection formed at the lower face. The first elastic seal has a valve for supplying or discharging solution. The second elastic seal is formed with microprojection at the position corresponding to a valve for preventing a spill. The culture vessel and the joint are sucked between the first elastic seal and the second elastic seal, thereby forming an integral seeding device.

Abstract: A light scanning mirror device is provided, which can be improved low power consumption, low voltage, small size, and a large scanning angle. The light scanning mirror device comprises a reflective mirror; and a torsion beam connecting the reflective mirror with a frame structure so as to enable the reflective mirror to rotate around an axis; a pair of cantilevers arranged perpendicular to the axis of rotation of the reflective mirror, and in axial symmetry centering on the axis of rotation; and a fixed electrode arranged oppositely to the cantilever in parallel at rest. The fixed electrode comprises an adsorptive fixed electrode on the free end side of the cantilever, and a rotation controlling fixed electrode on the fixed end side of the cantilever. The cantilever, the adsorptive fixed electrode, and the rotation controlling fixed electrode are configured to be separated electrically with each other.

Abstract: A movable device of acceleration sensors and a vibration device of a gyroscope are formed on the same sensor wafer spaced apart from each other by a wall. A cap wafer having gaps corresponding to the movable mechanical components of the acceleration sensors and gyroscope is provided for the wafer and an adsorbent divided into a plurality of divisional portions is disposed in the gap for the gyroscope. After the sensor wafer and the cap wafer have been bonded together at a temperature of inactivation of the adsorbent and in an atmospheric pressure ambience of noble gas and activated gas, the adsorbent divisional portions are activated in sequence to adsorb the activated gas so as to adjust the pressure inside the gyroscope, thus manufacturing a combined sensor wafer.

Abstract: An acceleration sensor and an angular velocity sensor are sealed in respective pressure atmospheres suitable therefor in the process of a series of bonding steps, thereby improving the detection sensibilities of the sensors. A movable member 111 of an acceleration sensor 11 and a vibrator 121 of an angular velocity sensor 12 are fabricated on the same sensor wafer 10 with a wall 16 interposed therebetween. A cap wafer 20 is formed in which gaps 21, 22 corresponding to the movable member 111 of the acceleration sensor 11 and the vibrator 121 of the angular velocity sensor 12 are provided. Bumps 23 are disposed near the gap 22 of the angular velocity sensor 12. The acceleration sensor 11 is sealed at atmospheric pressure. Then, the angular velocity sensor 12 is subjected to high temperature and a high-load and is vacuum-sealed. Thereafter, cutting with a diamond grindstone and mounting of circuit substrates and a wiring substrate are performed to form a combined sensor.

Abstract: In a biaxial mirror device where beams for connecting a first movable frame to a second movable frame and the second movable frame to a fixed frame pass a center of the mirror along an axis, an actuator for moving the second movable frame is composed of two first and second actuators and in a state that rotational angles of the movable frames are zero, the first actuator permits the second movable frame to start rotation and when it reaches a specific rotational angle, the second actuator permits the second movable frame to rotate, thus a large deflection angle is obtained even by the dissonance drive.

Abstract: A movable device of acceleration sensors and a vibration device of a gyroscope are formed on the same sensor wafer spaced apart from each other by a wall. A cap wafer having gaps corresponding to the movable mechanical components of the acceleration sensors and gyroscope is provided for the wafer and an adsorbent divided into a plurality of divisional portions is disposed in the gap for the gyroscope. After the sensor wafer and the cap wafer have been bonded together at a temperature of inactivation of the adsorbent and in an atmospheric pressure ambience of noble gas and activated gas, the adsorbent divisional portions are activated in sequence to adsorb the activated gas so as to adjust the pressure inside the gyroscope, thus manufacturing a combined sensor wafer.

Abstract: A culturing apparatus has a culture vessel having a first elastic seal bonded on its upper surface and a culture space formed thereon, and a joint for supplying solution such as a medium to the culture vessel and a second elastic seal having microprojection formed at the lower face. The first elastic seal has a valve for supplying or discharging solution. The second elastic seal is formed with microprojection at the position corresponding to a valve for preventing a spill. The culture vessel and the joint are sucked between the first elastic seal and the second elastic seal, thereby forming an integral seeding device.

Abstract: A culturing apparatus has a culture vessel having a first elastic seal bonded on its upper surface and a culture space formed thereon, and a joint for supplying solution such as a medium to the culture vessel and a second elastic seal having microprojection formed at the lower face. The first elastic seal has a valve for supplying or discharging solution. The second elastic seal is formed with microprojection at the position corresponding to a valve for preventing a spill. The culture vessel and the joint are sucked between the first elastic seal and the second elastic seal, thereby forming an integral seeding device.

Abstract: A dent is formed on a side surface of a first substrate. A second substrate faces to the side surface of the first substrate. A third substrate is arranged so that the first and second substrates contact each other closely. A micro flow path and a micro chamber are formed between the first and second substrates. The micro flow path and the micro chamber communicate with each other and including an inlet and outlet respectively. A fifth substrate contains the first, second and third substrates. A fourth substrate fits in the fifth substrate. The first and second substrates are pressed against each other by thread fastening (pressing means) for the fourth and fifth substrates.

Abstract: The invention relates to a micro fluid chip that leads liquids supplied from a plurality of liquid supply ports, respectively, to a minute flow passage, performs mixing and reaction (chemical reaction) of the liquids in the minute flow passage, and obtains a liquid having been processed from a liquid discharge port.

Abstract: A reaction apparatus comprises a first supply flow channel having a fine flow channel cross sectional area for a liquid pressurized by a pressurizing device, a gas supply flow channel having a fine flow channel cross sectional area for supplying a gas, a two-phase flow channel having a fine flow channel cross sectional area in communication with a joined portion for the first supply flow channel and the second supply flow channel for flowing a gas/liquid two-phase fluid, a gas bubble reaction flow channel in communication with the exit of the gas/liquid two-phase channel and having a flow channel cross sectional area larger than that of the gas/liquid two-phase flow channel, and a liquid discharge flow channel for discharging the liquid in the gas bubble reaction flow channel. Therefore, in the reaction apparatus, a stable mixing ratio of a gas to a liquid can be obtained and the mixing speed of the gas to the liquid is increased.

Abstract: In a chemical reactor, a gas and a liquid which are in trace volumes are used to produce air bubbles and thus increase the interface area between the gas and liquid, substantially enhancing the efficiency of reaction between the gas and liquid. The chemical reactor comprises the following: a sheath flow forming block which forms a plurality of alternating sheath flows with two mutually unmixable fluids; a plurality of inlet ports through which said two fluids flow into the sheath flow forming block; a contraction zone which simultaneously contracts a plurality of sheath flows formed in the sheath flow forming block; and reaction flow channels each of which is connected with said contraction zone and is smaller in width than the sheath flow forming block.

Abstract: Provided is a liquid feed apparatus for feeding liquid by operating a diaphragm at a high frequency, in which an inlet valve and an outlet valve are integrally incorporated with a liquid feed chamber, the positions of the valve are shifted into peripheral parts of the liquid feed chamber so as to allow fluid to smoothly flow from the inlet to the outlet in order to prevent air bubbles from causing pressure fluctuation during liquid feed, from remaining in the liquid feed chamber. Further, the valve has a center beam structure in which a protrusion having a height greater than several micron meters, is formed in the seat part of the valve so as to deform a center beam for pressurizing the valve in order to enhance the shut-off ability of the valve, and the center beam has a small surface area in the direction of displacement of the valve.

Abstract: A dent is formed on a side surface of a first substrate. A second substrate faces to the side surface of the first substrate. A third substrate is arranged so that the first and second substrates contact each other closely. A micro flow path and a micro chamber are formed between the first and second substrates. The micro flow path and the micro chamber communicate with each other and including an inlet and outlet respectively. A fifth substrate contains the first, second and third substrates. A fourth substrate fits in the fifth substrate. The first and second substrates are pressed against each other by thread fastening (pressing means) for the fourth and fifth substrates.

Abstract: The windows 5a, 5b are configured so that the thickness of the upper and lower parts of the substrate formed therein with the channels becomes thinner in these parts than in other parts. An air space is defined in the vicinity of the one side wall of the channel within a part where the first outgoing window 5a is formed, so as to serve as a window, and the second outgoing window 5b has a shape such as to be recessed inward from the one side wall of the planar plate 10, in comparison with the other part thereof. Further, the fluorescence transmission path 6b is also formed on opposite sides with air spaces. It is noted that a rod-like fiber or the like may be embedded in the planar plate 10 on the outgoing side of the planar plate 10 at the time of forming the separation channel 21 and the like.

Abstract: A mixed liquid manufacturing apparatus comprises: an information input unit, in which information of an object, to which a mixed liquid is offered, is input; a material storage system that stores a plurality of materials for a mixed liquid; a product information system that selects kinds and quantities of the stored materials on the basis of the input information of the object, to which a mixed liquid is offered; a liquid transfer unit, by which the selected materials are taken out from the material storage system; a mixing unit, in which the materials supplied from the liquid transfer unit are mixed; an injection unit, by which the mixed liquid is injected into a mixed liquid container; an input unit, by which matters being declared on a label of the mixed liquid container are input; and a label formation unit, in which the input matters are printed on the label and the label is stuck on the mixed liquid container, and wherein the label formation unit begins printing before the injection unit completes injec

Abstract: A culturing apparatus has a culture vessel having a first elastic seal bonded on its upper face and a culture space formed thereon, and a joint having supplying means for supplying solution such as a medium to this culture vessel and a second elastic seal having microprojection formed at the lower face. The first elastic seal has a valve for supplying or discharging solution. The second elastic seal is formed with microprojection at the position corresponding to a valve for preventing a spill. The culture vessel and the joint are sucked by the adsorbing means between the first elastic seal and the second elastic seal, thereby forming an integral seeding device.