Abstract: A method for producing a first vadadustat intermediate represented by the following formula (3) comprising reacting a compound represented by the following formula (1) with glycine or a glycine derivative represented by the following formula (2) or a salt of the glycine or the glycine derivative in the presence of carbon monoxide. The method produces a vadadustat intermediate through a clean reaction with high atom conversion efficiency.

Abstract: Provided is a method for preventing corrosion of a cable including a plurality of bundled wires and a covering tube which covers the plurality of wires, the method including a mixed gas generation step of mixing a low-oxygen gas having an oxygen concentration lower than an oxygen concentration of air with the air, and a mixed gas supply step of supplying the mixed gas into the covering tube to flow the mixed gas around each of the wires.

Abstract: Provided is a method for preventing corrosion of a cable including a plurality of bundled wires and a covering tube which covers the plurality of wires, the method including a mixed gas generation step of mixing a low-oxygen gas having an oxygen concentration lower than an oxygen concentration of air with the air, and a mixed gas supply step of supplying the mixed gas into the covering tube to flow the mixed gas around each of the wires.

Abstract: A production efficiency improving apparatus includes a first communicating means for communicating information with a plurality of processing apparatuses that process objects, and a second communicating means for communicating conveyance control information, with a conveyance system comprising conveyance apparatuses for conveying the objects between the plurality of processing apparatuses. A means for predicting, on the basis of information communicated by the first communicating means, the conveying timing at which the processing apparatus needs to send out processed objects, and the conveying timing at which the processing apparatus needs to bring in unprocessed objects. A generating means generates the control information such that the conveyance apparatus will arrive at the processing apparatus that is the destination of the communication of information at the predicted timing predicted by the means for predicting.

Abstract: A production efficiency improving apparatus includes a first communicating means for communicating information with a plurality of processing apparatuses that process objects, and a second communicating means for communicating conveyance control information, with a conveyance system comprising conveyance apparatuses for conveying the objects between the plurality of processing apparatuses. A means for predicting, on the basis of information communicated by the first communicating means, the conveying timing at which the processing apparatus needs to send out processed objects, and the conveying timing at which the processing apparatus needs to bring in unprocessed objects. A generating means generates the control information such that the conveyance apparatus will arrive at the processing apparatus that is the destination of the communication of information at the predicted timing predicted by the means for predicting.

Abstract: A factory-side client 100 at a factory where a semiconductor manufacturing apparatus is installed and a vendor-side server 200 at a vendor who executes maintenance management for semiconductor manufacturing apparatuses are connected to the Internet 300 which is a network enabling bidirectional communication and thus can exchange data with each other. The client 100 collects status information with regard to the apparatus and transmits the status information to the server 200. Based upon the status information, the server 200 executes a judgment as to whether or not an abnormality or a semi-abnormality has occurred in the apparatus, infers a probable cause and the corresponding corrective measures to be taken by conducting a search of the database in the event of an abnormality or a semi-abnormality and provides the client 100 with maintenance information and an instruction indicating the cause and corrective measures.

Abstract: A wafer transporter comprising a plurality of plane electrodes which are horizontally coplanar with each other. The plane electrodes face the wafer to be transported. A plurality of air nozzles are provided through the electrodes, and air is blown from the nozzles perpendicularly toward the wafer surface. A voltage is applied between the electrodes facing the wafer. The applied voltage is divided by the capacitances between the wafer which is electrically conductive, and the electrodes, thus the wafer is attracted vertically toward the electrode, and is maintained without friction by the balance of the repulsive force of the air blowing and the attractive electrostatic force. The divided voltages become unequal due to the difference of the wafer area facing respective electrodes. This voltage difference produces a horizontal force which moves the wafer in a horizontal direction. The wafer is forced to stay at a balancing point where the induced voltages are equal.

Abstract: A compact wafer carrier for storing spaced semiconductor wafers in parallel with each other, is provided for fabrication processes of a semiconductor device requiring a high particulate contamination control. The wafer carrier has an air cleaning device, including a secondary battery as a power source, a motor fan, and a particulate air filter, and a storing chamber directly connected to the air cleaning device for storing the wafers. The storing chamber has a first opening for receiving the filtered air flow, and a second opening for loading and unloading the wafers, both openings facing each other. As a result, the major part of the filtered air flows in a laminated stream passing along the surfaces of the wafers stored with a fairy high speed, serving to protect the wafers from the intrusion of the particles contained in the environmental air, and removing the particles originally adhered to the surfaces of the wafers.