Abstract: A method for inspecting a photomask, comprising generating a laser beam, changing a phase of the laser beam to smooth the brightness distribution of the laser beam, applying the smoothed laser beam to the photomask, acquiring an image of the photomask using a sensor while the laser beam and the photomask are relatively moved, examining the image of the photomask for a defect of the mask-pattern of the photomask.

Abstract: A method for inspecting a photomask, comprising generating a laser beam, changing a phase of the laser beam to smooth the brightness distribution of the laser beam, applying the smoothed laser beam to the photomask, acquiring an image of the photomask using a sensor while the laser beam and the photomask are relatively moved, examining the image of the photomask for a defect of the mask-pattern of the photomask.

Abstract: In the region in which a coil and a connector are provided, the leakage of a fluid to which coil and connector is prevented by a seal member, a passage extending from the seal member to a position in the vicinity of a terminal of the connector is formed. At the time of completion of the production of a solenoid valve assembly, an air-tightness test on the seal member can be conducted directly through the passage, so that the detection of damage to the seal member, the detection of bite into the seal member, the detection of a defect of the seal member and so on can be carried out at the time of completion of the production of the mentioned assembly. Namely, the detection of the sealability of the seal member is rendered possible.

Abstract: A method for inspecting a photomask, comprising generating a laser beam, changing a phase of the laser beam to smooth the brightness distribution of the laser beam, applying the smoothed laser beam to the photomask, acquiring an image of the photomask using a sensor while the laser beam and the photomask are relatively moved, examining the image of the photomask for a defect of the mask-pattern of the photomask.

Abstract: A method for inspecting a photomask, comprising generating a laser beam, changing a phase of the laser beam to smooth the brightness distribution of the laser beam, applying the smoothed laser beam to the photomask, acquiring an image of the photomask using a sensor while the laser beam and the photomask are relatively moved, examining the image of the photomask for a defect of the mask-pattern of the photomask.

Abstract: The invention is to improve wear resistance and resistance to crack growth of an off-the-road tire having a gauge of a tread rubber of 60-200 mm, in which a plurality of widthwise grooves extending substantially in a widthwise direction of the tire are arranged in each side region of the tread, and a pair of circumferential fine grooves continuously extending straight-forward or zigzag in a circumferential direction of the tire are arranged in a central zone of the tread, and a plurality of widthwise fine grooves extending substantially in the widthwise direction of the tire and contacting their grooves walls with each other in a ground contact area are arranged between these circumferential fine grooves.

Abstract: A power ratchet wrench including a yoke that is in sliding contact with opposing faces of a distal end bifurcated portion of the wrench housing, guide bushings fitted and fixed in the distal end bifurcated portion and inserted in the hole of the yoke to support the yoke, a spindle inserted in the yoke, and a protruding member that prevents the spindle from being pulled out. The spindle that turns a workpiece is supported by the guide bushings. The motion converter of the wrench includes a swing lever rotatable in a back-and-forth fashion in the wrench housing; and the engagement portion at one end of the swing lever engages a ball on an eccentric shaft of a speed-reduction assembly, and a cylindrical portion at another end of the swing lever is slidably engaged with a U-shaped groove of the yoke.

Abstract: The semiconductor manufacturing system includes semiconductor production equipment as the passive equipment and an AMHS as the active equipment. The semiconductor production equipment control panel includes a circuit which turns off an ES signal being applied via an optical I/O to the AMHS in response to an input from an ES button, without stopping the operation of the semiconductor production equipment. The AMHS includes a circuit which brings a vehicle and a hand of the AMHS to an emergency stop when the ES signal received via the optical I/O turns off.

Abstract: In the region in which a coil and a connector are provided, the leakage of a fluid to which coil and connector is prevented by a seal member, a passage extending from the seal member to a position in the vicinity of a terminal of the connector is formed. At the time of completion of the production of a solenoid valve assembly, an air-tightness test on the seal member can be conducted directly through the passage, so that the detection of damage to, bite into and a defect of the seal member can be carried out at the time of completion of the production of the mentioned assembly. Namely, the detection of the sealability of the seal member is rendered possible.

Abstract: A half bearing constituting a cylindrical plain bearing for supporting a shaft for rotation when two of the half bearings are combined together. The half bearing has two circumferential ends each of which has a plurality of circumferential grooves without formation of any crush relief surface. The grooves extend substantially over an overall circumferential dimension of the half bearing and include portions located at both circumferential ends of the half bearing respectively. Each portion has a larger axially sectional area than the grooves formed in a portion of the half bearing mainly subjected to load during rotation of the shaft.

Abstract: The semiconductor manufacturing system includes semiconductor production equipment as the passive equipment and an AMHS as the active equipment. The semiconductor production equipment control panel includes a circuit which turns off an ES signal being applied via an optical I/O to the AMHS in response to an input from an ES button, without stopping the operation of the semiconductor production equipment. The AMHS includes a circuit which brings a vehicle and a hand of the AMHS to an emergency stop when the ES signal received via the optical I/O turns off.

Abstract: A shaft bearing member includes an inner circumferential face serving as a sliding surface, an oil groove formed in the inner circumferential face so as to circumferentially extend, and a recess formed in the inner circumferential face so as to extend from at least one of both widthwise sides of the oil groove toward axial end side of the inner circumferential face with respect to the shaft so that the recess is rendered shallower and shallower.

Abstract: A shaft bearing member for supporting a shaft so that the shaft is rotatable has an inner circumferential face serving as a sliding surface. The shaft bearing member includes an oil groove formed in the inner circumferential face so as to circumferentially extend, and a plurality of narrow grooves formed on the inner circumferential face so as to extend at a predetermined angle relative to a rotation direction of the shaft from at least one of both widthwise sides of the oil groove toward an axial end side of the inner circumferential face with respect to the shaft. The narrow grooves guide a lubrication oil from the oil groove toward the axial end side with rotation of the shaft. The narrow grooves are shallower and narrower than the oil groove.

Abstract: A power ratchet wrench including a yoke that is in sliding contact with opposing faces of a distal end bifurcated portion of the wrench housing, guide bushings fitted and fixed in the distal end bifurcated portion and inserted in the hole of the yoke to support the yoke, a spindle inserted in the yoke, and a protruding member that prevents the spindle from being pulled out. The spindle that turns a workpiece is supported by the guide bushings. The motion converter of the wrench includes a swing lever rotatable in a back-and-forth fashion in the wrench housing; and the engagement portion at one end of the swing lever engages a ball on an eccentric shaft of a speed-reduction assembly, and a cylindrical portion at another end of the swing lever is slidably engaged with a U-shaped groove of the yoke.

Abstract: It is an object of the invention to improve wear resistance and an anti-seizure property of a portion , on which a radial load operates owing to tension of a cogged belt or a V-belt, of a plain bearing for an engine. A main shaft portion of a crankshaft is in uneven contact with an upper half bearing owning to tension of the cogged belt and/or the V-belt. A branch groove is formed in a portion forwarder than an oil groove formed on the bearing surface of a upper half bearing of a plain bearing, the branch groove branching off from the oil groove. When an engine stops, lubricant is stored within the branch grooves, and when the engine restarts, the lubricant within the branch grooves is immediately supplied to the uneven contact portion of the main shaft portion though the rotation thereof.

Abstract: A plain bearing which is mounted in an end of a connecting rod consists of a pair of hemi-circular bearing halves of which axial ends are provided with flanges being integrally fixed by welding. The flanges improve the rigidity of the bearing halves. The big end of the connecting rod can have improved rigidity by mounting the bearing halves therein.

Abstract: The coil winding machine includes bobbin holding means for holding a coil bobbin having at each end portion a circumferential guide groove, a nozzle for feeding out a conducting wire for a deflection coil, the nozzle being movable along the inner peripheral surface of the coil bobbin, and a winding guide for restricting the position of the conducting wire. The winding guide has a tip portion movable in and out of the circumferential guide groove of the coil bobbin. The tip portion has a stepped portion capable of being engaged/disengaged with/from the conducting wire due to the relative positional relationship between the stepped portion and the nozzle in the center axial direction of the coil bobbin and a guide portion for restricting the feeding position of the conducting wire released from the stepped portion.

Abstract: A semiconductor wafer carrier 1 measures a transferring speed of a semiconductor wafer carrier transfer system; a result of measured speed is compared with a threshold value to obtain a result of comparison, and the result of comparison is transmitted to a semiconductor wafer carrier automatic transferring device 8 to adjust an operational parameter, whereby all constructive device elements of the semiconductor wafer carrier automatic transferring system can be automatically adjusted and a time for setting-up can be shortened as well as saving man power.

Abstract: A half bearing constituting a cylindrical plain bearing for supporting a shaft for rotation when two of the half bearings are combined together. The half bearing has two circumferential ends each of which has a plurality of circumferential grooves without formation of any crush relief surface. The grooves extend substantially over an overall circumferential dimension of the half bearing and include portions located at both circumferential ends of the half bearing respectively. Each portion has a larger axially sectional area than the grooves formed in a portion of the half bearing mainly subjected to load during rotation of the shaft.