Patents by Inventor Akira SUWA
Akira SUWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240058894Abstract: A laser processing apparatus according to the present disclosure includes a placement base on which a processing receiving object is placed, an optical system that guides laser light to the processing receiving object, a gas supply port via which a gas is supplied to a laser light irradiated region of the processing receiving object, a gas recovery port via which the supplied gas is recovered, a mover that moves the irradiated region, and a controller that controls, in accordance with the moving direction of the irradiated region, the direction of the flow of the gas flowing from the gas supply port to the gas recovery port, and the controller changes the direction of the gas flow in response to a change in the moving direction of the irradiated region in such a way that the gas flows in the direction opposite the moving direction of the irradiated region.Type: ApplicationFiled: October 16, 2023Publication date: February 22, 2024Applicant: Gigaphoton Inc.Inventors: Akira SUWA, Osamu WAKABAYASHI, Masashi SHIMBORI, Masakazu KOBAYASHI
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Patent number: 11826852Abstract: A laser processing apparatus according to the present disclosure includes a placement base on which a processing receiving object is placed, an optical system that guides laser light to the processing receiving object, a gas supply port via which a gas is supplied to a laser light irradiated region of the processing receiving object, a gas recovery port via which the supplied gas is recovered, a mover that moves the irradiated region, and a controller that controls, in accordance with the moving direction of the irradiated region, the direction of the flow of the gas flowing from the gas supply port to the gas recovery port, and the controller changes the direction of the gas flow in response to a change in the moving direction of the irradiated region in such a way that the gas flows in the direction opposite the moving direction of the irradiated region.Type: GrantFiled: November 4, 2020Date of Patent: November 28, 2023Assignee: Gigaphoton Inc.Inventors: Akira Suwa, Osamu Wakabayashi, Masashi Shimbori, Masakazu Kobayashi
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Patent number: 11710660Abstract: A laser irradiation method of irradiating, with a pulse laser beam, an irradiation object in which an impurity source film is formed on a semiconductor substrate includes: reading fluence per pulse of the pulse laser beam with which a rectangular irradiation region set on the irradiation object is irradiated and the number of irradiation pulses the irradiation region is irradiated, the fluence being equal to or larger than a threshold at or beyond which ablation potentially occurs to the impurity source film when the irradiation object is irradiated with pulses of the pulse laser beam in the irradiation pulse number and smaller than a threshold at or beyond which damage potentially occurs to the surface of the semiconductor substrate; calculating a scanning speed Vdx; and moving the irradiation object at the scanning speed Vdx relative to the irradiation region while irradiating the irradiation region with the pulse laser beam at the repetition frequency f.Type: GrantFiled: April 22, 2020Date of Patent: July 25, 2023Assignees: Gigaphoton Inc., KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATIONInventors: Hiroshi Ikenoue, Osamu Wakabayashi, Hiroaki Oizumi, Akira Suwa
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Publication number: 20230219171Abstract: A glass processing method according to a viewpoint of the present disclosure includes generating a pulse laser beam by using a laser oscillator, and irradiating alkali-free glass to be processed with the pulse laser beam. The wavelength of the pulse laser beam ranges from 248 nm to 266 nm, and the pulse laser beam has an energy ratio greater than or equal to 91% but smaller than or equal to 99% in the region from 5 ns after a pulse rises to 400 ns.Type: ApplicationFiled: March 8, 2023Publication date: July 13, 2023Applicant: Gigaphoton Inc.Inventors: Yasufumi KAWASUJI, Akira SUWA, Yasuhiro ADACHI
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Patent number: 11604416Abstract: A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ?Zsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 ?m to 150 ?m inclusive at the transfer position.Type: GrantFiled: October 26, 2021Date of Patent: March 14, 2023Assignee: Gigaphoton Inc.Inventors: Koji Kakizaki, Masakazu Kobayashi, Akira Suwa, Osamu Wakabayashi
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Publication number: 20230071592Abstract: A laser processing method according to a viewpoint of the present disclosure includes radiating ultraviolet pulse laser light onto a workpiece having a stacked structure in which a conductor layer, an insulating layer, and a sacrificial layer are stacked on each other in the presented order, the pulse laser light radiated from the side facing the sacrificial layer, to change a laser ablation processing mode in the sacrificial layer and form a through hole in the sacrificial layer, radiating the pulse laser light onto the insulating layer through the through hole to form an opening in the insulating layer, and removing the sacrificial layer after the formation of the opening.Type: ApplicationFiled: November 8, 2022Publication date: March 9, 2023Applicant: Gigaphoton Inc.Inventors: Akira SUWA, Kouji KAKIZAKI, Masakazu KOBAYASHI, Junichi FUJIMOTO, Yasufumi KAWASUJI
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Publication number: 20220050382Abstract: A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ?Zsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 ?m to 150 ?m inclusive at the transfer position.Type: ApplicationFiled: October 26, 2021Publication date: February 17, 2022Applicant: Gigaphoton Inc.Inventors: Koji KAKIZAKI, Masakazu KOBAYASHI, Akira SUWA, Osamu WAKABAYASHI
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Patent number: 11194255Abstract: A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ?Zsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 ?m to 150 ?m inclusive at the transfer position.Type: GrantFiled: March 9, 2020Date of Patent: December 7, 2021Assignee: Gigaphoton Inc.Inventors: Koji Kakizaki, Masakazu Kobayashi, Akira Suwa, Osamu Wakabayashi
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Publication number: 20210046584Abstract: A laser processing apparatus according to the present disclosure includes a placement base on which a processing receiving object is placed, an optical system that guides laser light to the processing receiving object, a gas supply port via which a gas is supplied to a laser light irradiated region of the processing receiving object, a gas recovery port via which the supplied gas is recovered, a mover that moves the irradiated region, and a controller that controls, in accordance with the moving direction of the irradiated region, the direction of the flow of the gas flowing from the gas supply port to the gas recovery port, and the controller changes the direction of the gas flow in response to a change in the moving direction of the irradiated region in such a way that the gas flows in the direction opposite the moving direction of the irradiated region.Type: ApplicationFiled: November 4, 2020Publication date: February 18, 2021Applicant: Gigaphoton Inc.Inventors: Akira SUWA, Osamu WAKABAYASHI, Masashi SHIMBORI, Masakazu KOBAYASHI
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Publication number: 20200290156Abstract: A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light includes: A. a positioning step of performing positioning so that a transfer position of a transfer image is set at a position inside the transparent material at a predetermined depth ?Zsf from a surface of the transparent material in an optical axis direction; B. an irradiation condition acquisition step; C. a determination step of determining whether a maximum fluence of a pulse laser beam at the surface of the transparent material is within a predetermined range based on irradiation conditions; and D. a control step of allowing irradiation with the pulse laser beam when the maximum fluence is determined to be in the predetermined range.Type: ApplicationFiled: June 1, 2020Publication date: September 17, 2020Applicant: Gigaphoton Inc.Inventors: Akira SUWA, Kouji KAKIZAKI, Masakazu KOBAYASHI, Osamu WAKABAYASHI
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Patent number: 10762787Abstract: Provided is a communication apparatus installed in a vehicle, the communication apparatus including: an acquisition unit configured to acquire, via a network installed in the vehicle, a plurality of types of status information each indicating a status of the vehicle; an information creation unit configured to create, on the basis of each piece of the status information acquired by the acquisition unit, feature information having a data amount smaller than a total of data amounts of the respective pieces of the status information, the feature information including a feature amount of a traveling status of the vehicle; and a transmission unit configured to transmit vehicle information based on the feature information created by the information creation unit, to another communication apparatus.Type: GrantFiled: May 1, 2017Date of Patent: September 1, 2020Assignee: Sumitomo Electric Industries, Ltd.Inventors: Jun Hayakawa, Akira Suwa, Susumu Takeshima
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Publication number: 20200266105Abstract: A laser irradiation method of irradiating, with a pulse laser beam, an irradiation object in which an impurity source film is formed on a semiconductor substrate includes: reading fluence per pulse of the pulse laser beam with which a rectangular irradiation region set on the irradiation object is irradiated and the number of irradiation pulses the irradiation region is irradiated, the fluence being equal to or larger than a threshold at or beyond which ablation potentially occurs to the impurity source film when the irradiation object is irradiated with pulses of the pulse laser beam in the irradiation pulse number and smaller than a threshold at or beyond which damage potentially occurs to the surface of the semiconductor substrate; calculating a scanning speed Vdx; and moving the irradiation object at the scanning speed Vdx relative to the irradiation region while irradiating the irradiation region with the pulse laser beam at the repetition frequency f.Type: ApplicationFiled: April 22, 2020Publication date: August 20, 2020Applicants: Gigaphoton Inc., KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATIONInventors: Hiroshi IKENOUE, Osamu WAKABAYASHI, Hiroaki OIZUMI, Akira SUWA
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Publication number: 20200209760Abstract: A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ?Zsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 ?m to 150 ?m inclusive at the transfer position.Type: ApplicationFiled: March 9, 2020Publication date: July 2, 2020Applicant: Gigaphoton Inc.Inventors: Koji KAKIZAKI, Masakazu KOBAYASHI, Akira SUWA, Osamu WAKABAYASHI
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Patent number: 10475650Abstract: A laser doping device includes: a solution supply system configured to supply a solution containing dopant to a doping region; a pulse laser system configured to output pulse laser light including a plurality of pulses, the pulse laser light transmitting through the solution; a first control unit configured to control a number of pulses of the pulse laser light for allowing the doping region to be irradiated, and to control a fluence of the pulse laser light in the doping region; and a second control unit configured to control a flow velocity of the solution so as to move bubbles, from the doping region, occurring in the solution every time of irradiation with the pulse.Type: GrantFiled: August 6, 2018Date of Patent: November 12, 2019Assignees: KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION, Gigaphoton Inc.Inventors: Hiroshi Ikenoue, Akira Suwa, Osamu Wakabayashi
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Patent number: 10446026Abstract: An on-vehicle device comprises an image data acquisition unit that acquires image data obtained by photographing a road from a vehicle, an object detection unit that detects an object included in an image of the road, a location detection unit that detects a location of the vehicle, an image data transmission unit that, in the case where the object is detected by the object detection unit, transmits to an external device image data including the object and location information of the vehicle at the time of detecting the object, and an previously-notifying information transmission unit that transmits to another vehicle previously-notifying abnormality information including the location information of the vehicle at the time of detecting the object and previously notifying abnormality on the road.Type: GrantFiled: January 30, 2017Date of Patent: October 15, 2019Assignee: Sumitomo Electric Industries, Inc.Inventors: Jun Hayakawa, Akira Suwa, Susumu Takeshima
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Publication number: 20190236957Abstract: Provided is a communication apparatus installed in a vehicle, the communication apparatus including: an acquisition unit configured to acquire, via a network installed in the vehicle, a plurality of types of status information each indicating a status of the vehicle; an information creation unit configured to create, on the basis of each piece of the status information acquired by the acquisition unit, feature information having a data amount smaller than a total of data amounts of the respective pieces of the status information, the feature information including a feature amount of a traveling status of the vehicle; and a transmission unit configured to transmit vehicle information based on the feature information created by the information creation unit, to another communication apparatus.Type: ApplicationFiled: May 1, 2017Publication date: August 1, 2019Inventors: Jun Hayakawa, Akira Suwa, Susumu Takeshima
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Publication number: 20190043274Abstract: An on-vehicle device comprises an image data acquisition unit that acquires image data obtained by photographing a road from a vehicle, an object detection unit that detects an object included in an image of the road, a location detection unit that detects a location of the vehicle, an image data transmission unit that, in the case where the object is detected by the object detection unit, transmits to an external device image data including the object and location information of the vehicle at the time of detecting the object, and an previously-notifying information transmission unit that transmits to another vehicle previously-notifying abnormality information including the location information of the vehicle at the time of detecting the object and previously notifying abnormality on the road.Type: ApplicationFiled: January 30, 2017Publication date: February 7, 2019Applicant: Sumitomo Electric Industries, Ltd.Inventors: Jun Hayakawa, Akira Suwa, Susumu Takeshima
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Publication number: 20180342397Abstract: A laser doping device includes: a solution supply system configured to supply a solution containing dopant to a doping region; a pulse laser system configured to output pulse laser light including a plurality of pulses, the pulse laser light transmitting through the solution; a first control unit configured to control a number of pulses of the pulse laser light for allowing the doping region to be irradiated, and to control a fluence of the pulse laser light in the doping region; and a second control unit configured to control a flow velocity of the solution so as to move bubbles, from the doping region, occurring in the solution every time of irradiation with the pulse.Type: ApplicationFiled: August 6, 2018Publication date: November 29, 2018Applicants: KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION, GIGAPHOTON INC.Inventors: Hiroshi IKENOUE, Akira SUWA, Osamu WAKABAYASHI
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Patent number: 10103509Abstract: The excimer laser device receives data on a target value of pulse energy from an external device and outputs a pulse laser beam. The excimer laser device includes a master oscillator, at least one power amplifier including a chamber provided in an optical path of the pulse laser beam outputted from the master oscillator, a pair of electrodes provided in the chamber, and an electric power source configured to apply voltage to the pair of electrodes, and a controller configured to control the electric power source of one power amplifier of the at least one power amplifier to stop applying the voltage to the pair of electrodes based on the target value of the pulse energy.Type: GrantFiled: December 10, 2017Date of Patent: October 16, 2018Assignee: Gigaphoton Inc.Inventors: Kouji Kakizaki, Akira Suwa, Osamu Wakabayashi, Hiroshi Umeda
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Patent number: 10096966Abstract: A gas laser device may include: a laser chamber containing laser gas; a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; and a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode.Type: GrantFiled: October 11, 2016Date of Patent: October 9, 2018Assignee: Gigaphoton Inc.Inventors: Akira Suwa, Kouji Kakizaki, Hiroaki Tsushima, Tomoyuki Ohkubo, Hiroshi Umeda, Hisakazu Katsuumi