Abstract: A fundamental wavelength light generating unit generates light of a fundamental wavelength in accordance with an output wavelength instruction signal. An optical amplifier unit amplifies the light of the fundamental wavelength. A wavelength converting part includes nonlinear optical crystals that each perform wavelength conversion and temperature regulators that each regulate the temperature of the corresponding nonlinear optical crystal, wherein the wavelength converting part converts the light amplified by the optical amplifier unit to light of the wavelength indicated by the output wavelength instruction signal. A storage unit stores correspondence information that indicates a correspondence relationship between the wavelength of the output light and the temperature of each of the nonlinear optical crystals based on the corresponding wavelength.

Abstract: When the laser light source is caused to standby, the temperatures of semiconductor lasers are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by the semiconductor lasers change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifiers, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.

Abstract: An ultraviolet laser device, includes: a first laser light output unit outputs a first infrared laser light; a second laser light output unit outputs a second infrared laser light; a first wavelength conversion optical system generates a first ultraviolet laser light of a fifth harmonic of the first infrared laser light; and a second wavelength conversion optical system to which the first ultraviolet laser light and the second infrared laser light enter, wherein the second wavelength conversion optical system includes a first wavelength conversion optical element which generates a second ultraviolet laser light by sum frequency generation of the first ultraviolet laser light and the second infrared laser light, and a second wavelength conversion optical element which generates a deep ultraviolet laser light by sum frequency generation of the second ultraviolet laser light and the second infrared laser light.

Abstract: A laser device includes: an optical fiber amplifier that amplifies and emits a signal light; a control unit that controls pumping power for pumping the optical fiber amplifier; and a signal light detector that detects signal light being propagated to the optical fiber amplifier or an ASE photodetector that detects light that is emitted from the optical fiber amplifier and that has wavelength for which the gain is higher than for the signal light, wherein the control unit suppresses the pumping power for pumping the optical fiber amplifier, when the intensity of the signal light detected by the signal light detector becomes less than or equal to a predetermined signal reference value, or when the intensity of the spontaneously emitted light detected by the ASE photodetector becomes greater than or equal to a predetermined ASE reference value.

Abstract: An ultraviolet laser device comprises a laser beam output unit that outputs infra-red laser beams, and a wavelength conversion unit that wavelength converts the infra-red laser beams. The laser beam output unit comprises a first laser beam output unit that outputs a first infra-red laser beam whose wavelength is 1900-2000 nm, and a second laser beam output unit that outputs a second infra-red laser beam whose wavelength is 1000-1100 nm. The wavelength conversion unit comprises a first element series that the first infra-red light beam is incident upon and propagated through, and a second element series that the laser light propagated through the first element series and the second infra-red laser beam are incident upon, combined in, and propagated through, and constructed so that ultraviolet laser light is outputted, due to the first and second infra-red laser beams being wavelength converted by optical wavelength conversion elements.

Abstract: A light source device including a seed light generation device, a light amplification unit which optically amplifies seed light generated by the seed light generation device, and a wavelength conversion unit which converts the wavelength of the light optically amplified by the light amplification unit. The seed light generation device includes a pulsed light generation unit which generates pulsed light having a single wavelength, a pulse modulation unit which selectively passes and extracts a part of the pulsed light, and a timing adjustment unit which relatively adjusts the extracting timing of the pulsed light by the pulse modulation unit during the generation period of the pulsed light by the pulse generation unit, according to an operation.

Abstract: An ultraviolet laser device equips a laser beam output unit that includes first, second and third amplifiers that output first through third infrared laser beams, and first through third optical systems into which the first through third infrared laser beams through which the first through third infrared laser beams are propagated. A wavelength conversion unit includes a fourth optical system into which the combined first through third laser beams are incident through which they are propagated. The first optical system wavelength converts and generates the first infrared laser beam to a predetermined harmonic wave as the first laser beam, the fourth optical system includes a first wavelength conversion element that generates an earlier stage ultraviolet laser beam between the predetermined harmonic wave and the second laser beam, and the second wavelength conversion element generates an ultraviolet laser beam between the earlier stage ultraviolet laser beam and the third laser beam.

Abstract: A laser device includes: a signal light source that outputs seed light; an electro-optic modulator that chops a portion of the seed light outputted from the signal light source and outputs signal light; an optical amplifier that amplifies the signal light outputted from the electro-optic modulator; a wavelength conversion optical element that wavelength converts the signal light amplified by the optical amplifier; a converted light detector that detects the signal light that has been wavelength converted by the wavelength conversion optical element; and an EU control unit that controls the operation of the electro-optic modulator, wherein the EU control unit is adapted, in the state in which the seed light is being outputted, to adjust bias voltage of the electro-optic modulator on the basis of the applied voltage when the intensity of the signal light after wavelength conversion detected by the converted light detector becomes substantially maximum.

Abstract: A laser device includes: an optical fiber amplifier that amplifies and emits a signal light; a control unit that controls pumping power for pumping the optical fiber amplifier; and a signal light detector that detects signal light being propagated to the optical fiber amplifier or an ASE photodetector that detects light that is emitted from the optical fiber amplifier and that has wavelength for which the gain is higher than for the signal light, wherein the control unit suppresses the pumping power for pumping the optical fiber amplifier, when the intensity of the signal light detected by the signal light detector becomes less than or equal to a predetermined signal reference value, or when the intensity of the spontaneously emitted light detected by the ASE photodetector becomes greater than or equal to a predetermined ASE reference value.

Abstract: An ultraviolet laser device comprises a laser beam output unit that outputs infra-red laser beams, and a wavelength conversion unit that wavelength converts the infra-red laser beams. The laser beam output unit comprises a first laser beam output unit that outputs a first infra-red laser beam whose wavelength is 1900-2000 nm, and a second laser beam output unit that outputs a second infra-red laser beam whose wavelength is 1000-1100 nm. The wavelength conversion unit comprises a first element series that the first infra-red light beam is incident upon and propagated through, and a second element series that the laser light propagated through the first element series and the second infra-red laser beam are incident upon, combined in, and propagated through, and constructed so that ultraviolet laser light is outputted, due to the first and second infra-red laser beams being wavelength converted by optical wavelength conversion elements.

Abstract: A polarization state adjusting optical element is formed by a ½ wavelength plate and a ¼ wavelength plate and its polarization direction and elliptic degree are adjusted. By adjusting the polarization state adjusting optical element in advance, even if the output of a pump light source is changed, the polarization characteristic (polarization direction and elliptic degree) of the output light of an FDFA amplifier will not change or the change is sufficiently small. In this state, a polarization state adjusting optical element adjusts the polarization state of the laser beam coming into a wavelength conversion optical system so that the wavelength conversion optical system has the maximum conversion efficiency. Thus, it is possible to provide an FDFA having a small change of the polarization state of the output light even if the pump light intensity is changed.

Abstract: An ultraviolet laser device equips a laser beam output unit that includes first, second and third amplifiers that output first through third infrared laser beams, and first through third optical systems into which the first through third infrared laser beams through which the first through third infrared laser beams are propagated. A wavelength conversion unit includes a fourth optical system into which the combined first through third laser beams are incident through which they are propagated. The first optical system wavelength converts and generates the first infrared laser beam to a predetermined harmonic wave as the first laser beam, the fourth optical system includes a first wavelength conversion element that generates an earlier stage ultraviolet laser beam between the predetermined harmonic wave and the second laser beam, and the second wavelength conversion element generates an ultraviolet laser beam between the earlier stage ultraviolet laser beam and the third laser beam.

Abstract: A polarization state adjusting optical element is formed by a ½ wavelength plate and a ¼ wavelength plate and its polarization direction and elliptic degree are adjusted. By adjusting the polarization state adjusting optical element in advance, even if the output of a pump light source is changed, the polarization characteristic (polarization direction and elliptic degree) of the output light of an FDFA amplifier will not change or the change is sufficiently small. In this state, a polarization state adjusting optical element adjusts the polarization state of the laser beam coming into a wavelength conversion optical system so that the wavelength conversion optical system has the maximum conversion efficiency. Thus, it is possible to provide an FDFA having a small change of the polarization state of the output light even if the pump light intensity is changed.

Abstract: When the laser light source is caused to standby, the temperatures of semiconductor lasers are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by the semiconductor lasers change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifiers, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.

Abstract: A fundamental wavelength light generating unit generates light of a fundamental wavelength in accordance with an output wavelength instruction signal. An optical amplifier unit amplifies the light of the fundamental wavelength. A wavelength converting part includes nonlinear optical crystals that each perform wavelength conversion and temperature regulators that each regulate the temperature of the corresponding nonlinear optical crystal, wherein the wavelength converting part converts the light amplified by the optical amplifier unit to light of the wavelength indicated by the output wavelength instruction signal. A storage unit stores correspondence information that indicates a correspondence relationship between the wavelength of the output light and the temperature of each of the nonlinear optical crystals based on the corresponding wavelength.

Abstract: A light source device including a seed light generation device, a light amplification unit which optically amplifies seed light generated by the seed light generation device, and a wavelength conversion unit which converts the wavelength of the light optically amplified by the light amplification unit. The seed light generation device includes a pulsed light generation unit which generates pulsed light having a single wavelength, a pulse modulation unit which selectively passes and extracts a part of the pulsed light, and a timing adjustment unit which relatively adjusts the extracting timing of the pulsed light by the pulse modulation unit during the generation period of the pulsed light by the pulse generation unit, according to an operation.

Abstract: When the laser light source is caused to standby, the temperatures of semiconductor laser 1 and semiconductor laser 9 are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by semiconductor lasers 1 and 9 change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifier 2 and optical fiber amplifier 10, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.

Abstract: The present invention greatly reduces the likelihood that fiber fusion will occur. A laser apparatus comprises an excitation light source and an optical amplifier unit, which optically amplifies by receiving excitation light that is output from the excitation light source and that transits an optical fiber. A monitor unit monitors the power level of the excitation light transmitted from the excitation light source to the optical amplifier unit side via the optical fiber.

Abstract: A fifth harmonic wave is formed from a fundamental wave of p-polarized light via a second harmonic wave forming optical element 3, a third harmonic wave forming optical element 4, and a fifth harmonic wave forming optical element 6 and a second harmonic wave of p-polarized light is formed from a fundamental wave of s-polarized light by a second harmonic wave forming optical element 9. The fifth harmonic wave of p-polarized light that is subjected to beam shaping by cylindrical lenses 7 and 8, the fundamental wave of s-polarized light, and the second harmonic wave of p-polarized light are combined by a dichroic mirror 10, and are incident on a seventh harmonic wave forming optical element 11.

Abstract: A polarization state adjusting optical element is formed by a ½ wavelength plate and a ¼ wavelength plate and its polarization direction and elliptic degree are adjusted. By adjusting the polarization state adjusting optical element in advance, even if the output of a pump light source is changed, the polarization characteristic (polarization direction and elliptic degree) of the output light of an FDFA amplifier will not not change or the change is sufficiently small. In this state, a polarization state adjusting optical element adjusts the polarization state of the laser beam coming into a wavelength conversion optical system so that the wavelength conversion optical system has the maximum conversion efficiency. Thus, it is possible to provide an FDFA having a small change of the polarization state of the output light even if the pump light intensity is changed.