Abstract: An object of the present invention is to provide a compact air flow rate measuring device with improved stain resistance. A physical quantity detecting device of the present invention includes: a semiconductor element having a flow rate detection unit 205; a circuit board 207 supporting the semiconductor element; and a conductive cover 202 fixing the circuit board 207, and the semiconductor element is fixed to the circuit board 207 such that the flow rate detection unit 205 faces the cover 202.

Abstract: Provided is a highly reliable thermal flow meter. In a thermal flow meter 20, a flow rate detection element 321 that detects an air flow rate, and a conductive coating film 400 containing a conductive substance and a resin as constituent elements are provided on at least a part of a portion provided in an auxiliary passage 135 on a surface facing a detection surface 322 of the flow rate detection element 321.

Abstract: An object is to improve measurement accuracy of a thermal air flow meter. A flow-rate measuring device comprising: a sensor assembly having a flow-rate detecting element; a circuit board on which the sensor assembly is mounted; and a housing on which the circuit board is mounted, wherein the sensor assembly is mounted on the circuit board such that a detection portion side of the flow-rate detecting element is closer to the housing, and the sensor assembly includes a contact portion in contact with the housing on the detection portion side.

Abstract: A physical quantity detection device for reducing an influence of a sound wave generated in a turbocharger and suppressing a decrease in detection accuracy of a physical quantity including a flow rate of gas. The device detects a physical quantity of air from an intake passage of an engine equipped with a turbocharger. The physical device includes a sub-passage that takes in part of air flowing from an upstream to a downstream side of the intake passage along a first direction, and a flow rate detection unit that detects a flow rate of the air taken in the sub-passage. The sub-passage includes an inlet that opens toward the upstream side in the first direction, an outlet that opens toward the downstream side in the first direction, and an attenuation chamber that attenuates a sound wave propagating from the turbocharger to an inside of the outlet.

Abstract: An object of the present invention is to provide a physical quantity detection device configured to reduce an influence of a resonance phenomenon of sound pressure on flow rate characteristics. The physical quantity detection device according to the present invention includes: a housing arranged in the main passage; a sub-passage arranged in the housing; a flow rate detection unit arranged in the sub-passage; a circuit unit electrically connected to the flow rate detection unit; a circuit chamber arranged in the housing and accommodating the circuit unit; and a first introduction passage including one end open to the sub-passage and the other end open to the circuit chamber to communicate between the sub-passage and the circuit chamber.

Abstract: An object is to improve measurement accuracy of a flow rate measurement device. A flow rate measurement device including: a first void which is formed of one surface of the support body and one surface of the circuit board; a second void which is formed of a surface opposite to the one surface of the circuit board and the housing; and a third void which is formed of a surface opposite to the one surface of the support body and a cover.

Abstract: Provided is a highly reliable thermal flow meter. In a thermal flow meter 20, a flow rate detection element 321 that detects an air flow rate, and a conductive coating film 400 containing a conductive substance and a resin as constituent elements are provided on at least a part of a portion provided in an auxiliary passage 135 on a surface facing a detection surface 322 of the flow rate detection element 321.

Abstract: According to the present invention, it is possible to provide a flow rate measurement device capable of accurately measuring a flow rate of a measurement target gas by improving anti-contamination property. A flow rate measurement device (20) of the present invention includes a board (304) disposed along a flow direction of a measurement target gas (2) in a sub passage (134), a support body (401) that is disposed to face one surface (304a) of the board, and a flow rate sensor (411) that is supported by the support body, faces the one surface of the board, and measures a flow rate of the measurement target gas passing between the support body and the board.

Abstract: Provided is a physical quantity detection device that can improve physical quantity measurement accuracy over a conventional device. A physical quantity detection device 20 includes a detector including a flow rate detection unit 205, a circuit board 207, a housing 201, and a cover 202. The detector detects a physical quantity and is mounted on the circuit board 207. The housing 201 houses the circuit board 207. The cover 202 is fixed to the housing 201 and defines an auxiliary passage 234 in which the flow rate detection unit 205 is disposed. The housing 201 and the cover 202 include a positioning portion P that includes a pin P1 extending in a thickness direction Dt of the circuit board 207 and a fitting portion P2 into which an end portion P11 of the pin P1 is fitted for positioning between the housing 201 and the cover 202.

Abstract: The objective of the present invention is to obtain a flow rate measurement device capable of reducing variations in the flow rate detection accuracy by suppressing the inclination of a chip package relative to a circuit board. A flow rate measurement device 20 of the present invention includes a chip package 310 having a flow rate sensor 311 and a passage wall 314 formed therein, and a circuit board 300 on which the chip package 310 is mounted, in which the chip package 310 is mounted such that the flow rate sensor 311 faces a portion of the circuit board 300 and a portion of the passage wall 314 as a resin portion of the chip package 310 contacts the circuit board 300.

Abstract: Provided is a physical quantity detection device capable of improving noise performance of a flow rate detection unit as compared with the related art. The physical quantity detection device 20 includes a plate-like chip package 208 that is arranged to protrude from the flow path of the measurement target gas and has a width W along the flow direction of the measurement target gas. The chip package 208 includes a flow rate detection unit 205, an accelerating flow path 208c, a measurement surface 208a, a non-measurement surface 208b, and a separation flow portion 208d. The cross sectional area of the accelerating flow path 208c is reduced, and the flow rate detection unit 205 is arranged. The separation flow portion 208d partitions the second sub-passage 234b into a measurement flow path facing the measurement surface 208a and a non-measurement flow path facing the non-measurement surface 208b.

Abstract: In the physical quantity detection device, the occurrence of the measurement error is reduced by suppressing the flow bias in the sub-passage and reducing the resistance in the passage. A physical quantity detection device 30 of the present invention includes a measuring portion 310 disposed in a main passage, a sub-passage 330 that takes a gas to be measured from the main passage, a support member 603 that divides a part of the sub-passage into two flow paths of one surface side and the other surface side in a direction intersecting a passage width direction, and a flow rate detection element 602 disposed on one surface of the support member. The sub-passage includes a straight portion 321 in which the support member is disposed and a downstream curved portion 322 that is curved to one side in the passage width direction of the straight portion.

Abstract: Provided is a thermal flow rate meter capable of individually correcting different pulsation errors generated in an upstream side temperature sensor and a downstream side temperature sensor. A thermal flow rate meter 1 which measures a flow rate of a gas based on a temperature difference between an upstream side temperature sensor 12 and a downstream side temperature sensor 13, which are arranged on the upstream side and the downstream side of a heating element 11. The thermal flow rate meter includes: a detection element 10 that individually outputs an output signal of the upstream side temperature sensor 12 and an output signal of the downstream side temperature sensor 13; and compensator 20 that individually performs response compensation of the output signal of the upstream side temperature sensor 12 and the output signal of the downstream side temperature sensor 13.

Abstract: To obtain a physical quantity detection device capable of reducing an intake amount of air accompanied by foreign matter. A physical quantity detection device (20) of the invention includes a housing arranged in a main passage through which a measurement target gas (2) flows. The housing is provided with a second sub-passage (B) that takes in a part of the measurement target gas (2) flowing in the main passage, a circuit chamber (135) that accommodates a pressure sensor (320) that detects a pressure of the measurement target gas (2), and a pressure introduction passage (170) having one end opened in the middle of the second sub-passage (B) and the other end opened in the circuit chamber (135) and capable of introducing the pressure of the measurement target gas (2) from the second sub-passage (B) into the circuit chamber (135). In the pressure introduction passage (170), an introduction port (171) is arranged at a position offset outward from a side wall surface (152b) of the second sub-passage (B).

Abstract: An object is to improve measurement accuracy of a flow rate measurement device. A flow rate measurement device including: a first void which is formed of one surface of the support body and one surface of the circuit board; a second void which is formed of a surface opposite to the one surface of the circuit board and the housing; and a third void which is formed of a surface opposite to the one surface of the support body and a cover.

Abstract: To obtain a low-pressure-loss physical quantity detection device that can detect a plurality of physical quantities of intake air. A physical quantity detection device of the present invention that detects a plurality of physical quantities of a measured gas flowing in a main passage, the physical quantity detection device includes: a circuit board on which a sensor that detects the plurality of physical quantities and an electronic component that controls the physical quantities are mountable; a circuit board accommodating unit that accommodates the circuit board; and a sub-passage in which a flow sensor is disposed. The circuit board is accommodated in the circuit board accommodating unit on an upstream side of the sub-passage, and disposed in parallel with the measured gas flowing through the main passage.

Abstract: Provided is a physical quantity detection device capable of achieving both rigidity improvement and sealability improvement. A physical quantity detection device (20) of the invention includes a housing (100), a cover (200), a chip package (310), and a flow rate sensor (311) supported by the chip package and arranged in a sub-passage. The housing includes: a first adhesive groove 160A which is an adhesive groove to which an adhesive for bonding the cover is applied, extends along a proximal end of the housing, extends in the protruding direction of the housing from the proximal end of the housing to a position on a more distal end side of the housing than the chip package, and is applied with the first adhesive 401; and a second adhesive groove 160B which extends along the sub-passage 134 and is applied with the second adhesive 402. The first adhesive has a higher Young's modulus, and the second adhesive has a higher thixotropy.

Abstract: Provided is a physical quantity detection device capable of improving noise performance of a flow rate detection unit as compared with the related art. The physical quantity detection device 20 includes a plate-like chip package 208 that is arranged to protrude from the flow path of the measurement target gas and has a width W along the flow direction of the measurement target gas. The chip package 208 includes a flow rate detection unit 205, an accelerating flow path 208c, a measurement surface 208a, a non-measurement surface 208b, and a separation flow portion 208d. The cross sectional area of the accelerating flow path 208c is reduced, and the flow rate detection unit 205 is arranged. The separation flow portion 208d partitions the second sub-passage 234b into a measurement flow path facing the measurement surface 208a and a non-measurement flow path facing the non-measurement surface 208b.

Abstract: A compact physical quantity detecting device is provided since it is possible to lower the mounting height of a chip package by accommodating the chip package in a notched board. In the physical quantity detecting device of the present invention, a part in a thickness direction of a support body on which a flow rate detection unit and a processing unit are mounted is accommodated in a notch provided in a printed board.

Abstract: Provided is a physical quantity detection device capable of electrically connecting with a neutralization region arranged at a place through which a measurement target gas passes in a simple process. A physical quantity detection device 300 of the invention includes a housing 301 having a terminal 303 and a passage portion 100 through which a measurement target gas passes, and a support body 600 that supports a flow rate detection element 601. A neutralization region 500 is formed on the bottom surface of the passage portion of the housing, and the support body is supported by the housing such that the detection unit of the flow rate detection element faces the neutralization region.