Patents by Inventor Akitake Tamura
Akitake Tamura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11117144Abstract: There is provided a cyclone collector which can securely collect particles from an intake gas and can prevent discharge of a water mist. The cyclone collector 12 includes a container 21, a liquid-film forming section 23 for forming a liquid film 40 in the container 21, a gas inlet 33 provided in a lid 32, and an exhaust pipe 24b. The gas inlet 33 extends downward at an angle with an orthogonal plane 21B perpendicular to the axis 21A of the container 21. The opening 33a of the gas inlet 33 opens in an area at a distance from the liquid film 40. An intake gas is ejected from the gas inlet 33 toward the liquid film 40.Type: GrantFiled: January 29, 2018Date of Patent: September 14, 2021Assignee: Tokyo Electron LimitedInventor: Akitake Tamura
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Publication number: 20210187519Abstract: There is provided a cyclone collector which can securely collect particles from an intake gas and can prevent discharge of a water mist. The cyclone collector 12 includes a container 21, a liquid-film forming section 23 for forming a liquid film 40 in the container 21, a gas inlet 33 provided in a lid 32, and an exhaust pipe 24b. The gas inlet 33 extends downward at an angle with an orthogonal plane 21B perpendicular to the axis 21A of the container 21. The opening 33a of the gas inlet 33 opens in an area at a distance from the liquid film 40. An intake gas is ejected from the gas inlet 33 toward the liquid film 40.Type: ApplicationFiled: January 29, 2018Publication date: June 24, 2021Applicant: Tokyo Electron LimitedInventor: Akitake TAMURA
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Patent number: 10509029Abstract: Provided is a measurement device, including: a droplet forming part configured to form aerosol-like liquid droplets from a liquid in which a fluorescent substance specifically bondable to detection target particles and a specimen are mixed with each other; a droplet sorting part configured to sort droplets having a diameter smaller than a predetermined value from the droplets formed by the droplet forming part; and a measurement part configured to irradiate light onto the droplets sorted by the droplet sorting part and configured to measure the fluorescence intensity of the droplets.Type: GrantFiled: May 1, 2015Date of Patent: December 17, 2019Assignee: TOKYO ELECTRON LIMITEDInventor: Akitake Tamura
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Patent number: 10222363Abstract: A measurement device includes: a capturing part for causing a liquid to capture detection target particles contained in a gas and causing a fluorescent substance specifically bondable to the detection target particles to be bonded to the detection target particles; a droplet forming part for forming aerosol-like droplets from the liquid; and a measurement part for irradiating light onto the droplets and measuring the fluorescence intensity of the droplets. The capturing part includes a cyclone which swirls the gas introduced from a gas introduction part in a circumferential direction, separates the detection target particles toward a wall surface of the cyclone body under a centrifugal force, introduces the liquid from the liquid introduction part, causes the liquid to capture the detection target particles separated toward the wall surface and continuously supplies the liquid to the droplet forming part.Type: GrantFiled: May 1, 2015Date of Patent: March 5, 2019Assignee: TOKYO ELECTRON LIMITEDInventor: Akitake Tamura
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Publication number: 20180362910Abstract: A laboratory system has a plurality of bottom opening sample transport pods for carrying one or more cassettes with cell culture vessels therein may have an aseptic interior environment and may cooperate with cell culture growing/processing stations having load ports allowing transfer of the cassettes with cell culture vessels into the stations while maintaining the aseptic integrity of the interior of the pods and the cassette and cell culture vessels. Internal environmental monitoring and control, purging, and tracking as well as automated robotic operation may be provided.Type: ApplicationFiled: June 15, 2016Publication date: December 20, 2018Inventors: Gregory Bores, Hisashi Gomi, Shigenori Ozaki, Akitake Tamura, Toshimitsu Fuji, Haruki Takeuchi
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Patent number: 10139334Abstract: A particulate measurement device includes: a nozzle which discharges liquid from an opening to form a flow of the liquid; a light emitter which emits light such that the light propagates in a region where the flow of the liquid is formed; a photodetector provided outside the region to receive the light from a partial region extending along a longitudinal direction of the region; and an air flow forming unit which forms a flow of gas along a direction in which the liquid flows, on an outer periphery of the region.Type: GrantFiled: March 17, 2016Date of Patent: November 27, 2018Assignee: TOKYO ELECTRON LIMITEDInventors: Akitake Tamura, Kaoru Fujihara
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Publication number: 20180120216Abstract: A particulate measurement device includes: a nozzle which discharges liquid from an opening to form a flow of the liquid; a light emitter which emits light such that the light propagates in a region where the flow of the liquid is formed; a photodetector provided outside the region to receive the light from a partial region extending along a longitudinal direction of the region; and an air flow forming unit which forms a flow of gas along a direction in which the liquid flows, on an outer periphery of the region.Type: ApplicationFiled: March 17, 2016Publication date: May 3, 2018Applicant: TOKYO ELECTRON LIMITEDInventors: Akitake TAMURA, Kaoru FUJIHARA
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Publication number: 20170191974Abstract: A measurement device includes: a capturing part for causing a liquid to capture detection target particles contained in a gas and causing a fluorescent substance specifically bondable to the detection target particles to be bonded to the detection target particles; a droplet forming part for forming aerosol-like droplets from the liquid; and a measurement part for irradiating light onto the droplets and measuring the fluorescence intensity of the droplets. The capturing part includes a cyclone which swirls the gas introduced from a gas introduction part in a circumferential direction, separates the detection target particles toward a wall surface of the cyclone body under a centrifugal force, introduces the liquid from the liquid introduction part, causes the liquid to capture the detection target particles separated toward the wall surface and continuously supplies the liquid to the droplet forming part.Type: ApplicationFiled: May 1, 2015Publication date: July 6, 2017Inventor: Akitake TAMURA
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Publication number: 20170191993Abstract: Provided is a measurement device, including: a droplet forming part configured to form aerosol-like liquid droplets from a liquid in which a fluorescent substance specifically bondable to detection target particles and a specimen are mixed with each other; a droplet sorting part configured to sort droplets having a diameter smaller than a predetermined value from the droplets formed by the droplet forming part; and a measurement part configured to irradiate light onto the droplets sorted by the droplet sorting part and configured to measure the fluorescence intensity of the droplets.Type: ApplicationFiled: May 1, 2015Publication date: July 6, 2017Inventor: Akitake TAMURA
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Publication number: 20170137765Abstract: A sealed container includes a container body having an opening, a lid removably installed in the opening of the container body, and a first seal member installed to seal a gap between the container body and the lid. A locking hole is formed in an inner peripheral portion of the container body. A first opening capable of facing the locking hole is formed in an outer peripheral portion of the lid. A second opening communicating with the first opening is formed in an end portion of the lid. The lid includes a locking member that can linearly move to protrude from and retract into the first opening, a rotatable rotary member positioned to face the second opening, a conversion mechanism configured to covert rotational motion of the rotary member to linear motion of the locking member, and a second seal member installed to seal the second opening.Type: ApplicationFiled: June 10, 2015Publication date: May 18, 2017Inventor: Akitake TAMURA
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Publication number: 20160201022Abstract: An automatic culture system includes a transfer part configured to transfer a first airtight container which accommodates cells in a sealed state, and an automatic culture device configured to receive the first airtight container transferred by the transfer part, take out the cells from the first airtight container and culture the taken-out cells. The automatic culture device is configured to automatically perform replacement of a culture medium.Type: ApplicationFiled: March 24, 2016Publication date: July 14, 2016Inventors: Shigenori OZAKI, Toshimitsu FUJI, Yoshio KINOSHITA, Akitake TAMURA
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Publication number: 20150217294Abstract: A sealed container device for hermetically accommodating cells includes a container body having an opening, a lid detachable from the opening of the container body, and a sealing structure positioned in gap formed between the container body and lid when the lid is inserted into the opening of the container body such that the sealing structure maintains sealed condition of the cells in the container body. The container body includes a step and a metal body positioned at the step such that the step is positioned to face peripheral edge of the lid on container-body side, and the lid includes a magnet positioned to face the metal body and a yoke structure movable relative to the magnet between a state where a magnetic circuit is formed between the magnet and the metal body and a state where the magnetic circuit is blocked.Type: ApplicationFiled: January 30, 2015Publication date: August 6, 2015Applicant: TOKYO ELECTRON LIMITEDInventor: Akitake TAMURA
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Publication number: 20150114562Abstract: Any particle adhesion onto the surface of a substrate to be processed is prevented. There is provided a substrate processing apparatus characterized by including a transfer chamber for, via a gate to which a substrate accommodating container for accommodation of the substrate is set, performing transfer of the substrate between the same and the substrate accommodating container, a processing chamber for applying a specific process to the substrate, a load-lock chamber for linking the processing chamber with the transfer chamber, and a temperature control unit for at the stage of transferring the substrate into at least one of the transfer chamber and the load-lock chamber, so as for the temperature of the substrate just before the transfer thereof to be higher than the temperature of the interior of the chamber, into which the substrate will be transferred, controlling at least one of the temperature of the substrate and the temperature of the interior of the chamber.Type: ApplicationFiled: December 24, 2014Publication date: April 30, 2015Applicant: TOKYO ELECTRON LIMITEDInventors: Akitake TAMURA, Teruyuki Hayashi
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Patent number: 8950999Abstract: Any particle adhesion onto the surface of a substrate to be processed is prevented. There is provided a substrate processing apparatus characterized by including a transfer chamber for, via a gate to which a substrate accommodating container for accommodation of the substrate is set, performing transfer of the substrate between the same and the substrate accommodating container, a processing chamber for applying a specific process to the substrate, a load-lock chamber for linking the processing chamber with the transfer chamber, and a temperature control unit for at the stage of transferring the substrate into at least one of the transfer chamber and the load-lock chamber, so as for the temperature of the substrate just before the transfer thereof to be higher than the temperature of the interior of the chamber, into which the substrate will be transferred, controlling at least one of the temperature of the substrate and the temperature of the interior of the chamber.Type: GrantFiled: January 31, 2008Date of Patent: February 10, 2015Assignee: Tokyo Electron LimitedInventors: Akitake Tamura, Teruyuki Hayashi
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Patent number: 8911955Abstract: A virus detection device includes a diffusion unit configured to diffuse a virus in a gas as an inspection target into an aqueous solution containing a fluorescent antibody specifically adsorptive to the virus by bringing the gas into contact with the aqueous solution and configured to adsorb the fluorescent antibody to the virus in the gas; an atomization unit configured to atomize the aqueous solution and generate a mist group of the aqueous solution in which the gas is diffused; a fluorescence measuring unit configured to measure a fluorescence intensity of the mist group; and an air current generator configured to form an air current flowing toward the fluorescence measuring unit from the atomization unit.Type: GrantFiled: April 26, 2013Date of Patent: December 16, 2014Assignee: Tokyo Electron LimitedInventors: Akitake Tamura, Kaoru Fujihara, Misako Saito
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Patent number: 8673086Abstract: In a cleaning method, a substrate having a pattern formed on the surface thereof can be cleaned by using a cleaning fluid, while preventing the pattern protrusions from being flattened when the cleaning fluid is removed or dried. The cleaning method includes the steps of: loading a substrate onto a loading platform inside a processing chamber; heating the substrate; and supplying a cleaning fluid onto the surface of the substrate. The substrate is heated in the substrate heating step so that the Leidenfrost phenomenon occurs and steam of the cleaning fluid is interposed between the substrate and droplets of the cleaning fluid supplied to the substrate in the cleaning fluid supply step.Type: GrantFiled: July 27, 2009Date of Patent: March 18, 2014Assignee: Tokyo Electron LimitedInventors: Akitake Tamura, Akinobu Kakimoto, Kazuya Dobashi
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Publication number: 20140073062Abstract: A specimen solution assay device includes a specimen solution dropping device which drops a specimen solution sequentially onto each of sample pads of immunochromatographic sensors positioned adjacent to each other in a transverse direction of each of the immunochromatographic sensors, and an image information acquisition device which acquires image information of a test area of each of the immunochromatographic sensors onto which the specimen solution is dropped by the specimen solution dropping device.Type: ApplicationFiled: September 11, 2013Publication date: March 13, 2014Applicant: TOKYO ELECTRON LIMITEDInventor: Akitake TAMURA
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Publication number: 20130244226Abstract: A virus detection device includes a diffusion unit configured to diffuse a virus in a gas as an inspection target into an aqueous solution containing a fluorescent antibody specifically adsorptive to the virus by bringing the gas into contact with the aqueous solution and configured to adsorb the fluorescent antibody to the virus in the gas; an atomization unit configured to atomize the aqueous solution and generate a mist group of the aqueous solution in which the gas is diffused; a fluorescence measuring unit configured to measure a fluorescence intensity of the mist group; and an air current generator configured to form an air current flowing toward the fluorescence measuring unit from the atomization unit.Type: ApplicationFiled: April 26, 2013Publication date: September 19, 2013Applicant: Tokyo Electron LimitedInventors: Akitake Tamura, Kaoru Fujihara, Misako Saito
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Publication number: 20120255193Abstract: A substrate drying apparatus which dries a substrate cleaned by a diamagnetic liquid includes a magnet unit for moving the liquid adhering to the substrate by means of a magnetic force; and a magnet transfer mechanism for moving the magnet unit along the substrate toward an edge of the substrate. A substrate drying method of drying a substrate cleaned by a diamagnetic liquid includes bringing a magnet unit close to the substrate, the magnet unit being configured to move the liquid adhering to the substrate by means of a magnetic force; and moving the magnet unit along the substrate toward the edge of the substrate.Type: ApplicationFiled: December 7, 2010Publication date: October 11, 2012Applicant: TOKYO ELECTRON LIMITEDInventor: Akitake Tamura
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Publication number: 20120094014Abstract: There is provided a vapor deposition apparatus and a vapor deposition method capable of efficiently sublimating/melting a granular organic material with high mobility. The vapor deposition apparatus for forming a thin film on a substrate by vapor deposition includes a depressurizable material supply apparatus configured to supply a material gas, and a film forming apparatus configured to form a thin film on the substrate. The material supply apparatus includes a quantity control unit configured to control a quantity of a material, and a material gas generating unit configured to vaporize the material supplied from the quantity control unit.Type: ApplicationFiled: April 21, 2010Publication date: April 19, 2012Applicant: TOKYO ELECTRON LIMITEDInventors: Yuji Ono, Tomohiko Edura, Teruyuki Hayashi, Akitake Tamura, Misako Saito, Hirotaka Kuwada, Shimon Otsuki