Abstract: A probing apparatus includes a mechanism apparatus. The mechanism apparatus includes a base body, a vibration absorber, a shifting mechanism, and a stage connected via the base body to a ground terminal. A probe, positioned over the stage, is connected to a measurement terminal of a measuring apparatus via a signal cable. The signal cable has a connecting terminal connected to the measurement terminal of the measuring apparatus. A shielding cover, positioned over a measured device on a glass substrate held on the stage, has an area not smaller than an area of the measured device and not greater than four times the area of the measured device. The shielding cover is grounded.

Abstract: There is provided a prober that includes a chuck, a support base that supports the chuck, a first inner shield that shields the chuck, and an outer shield that encloses the chuck and the first inner shield. The outer shield is connected to a chassis, the chuck is connected to a first connector by a first cable, and the first inner shield is connected to a second connector by a second cable with an impedance device in between.

Abstract: A test system comprises a first ground line for connecting a first ground terminal of a tester to a second ground terminal of a prober; a ground plane that covers the bottom surface of the tester and the bottom surface of the prober and is connected by a second ground line to the first ground terminal; and a connection box comprised of a power supply block that supplies the power supply to the tester and the prober each time, receives a first power supply line from the power distribution panel and branches to second and third ground lines for the tester and the prober, and a ground terminal block that receives the third ground line from the power distribution panel and is connected by a fourth ground line to the first ground terminal.

Abstract: A probing apparatus includes a mechanism apparatus. The mechanism apparatus includes a base body, a vibration absorber, a shifting mechanism, and a stage connected via the base body to a ground terminal. A probe, positioned over the stage, is connected to a measurement terminal of a measuring apparatus via a signal cable. The signal cable has a connecting terminal connected to the measurement terminal of the measuring apparatus. A shielding cover, positioned over a measured device on a glass substrate held on the stage, has an area not smaller than an area of the measured device and not greater than four times the area of the measured device. The shielding cover is grounded.

Abstract: A prober includes a frame having a frame ground terminal, a chuck stage, servo motors for driving the chuck stage, servo amplifiers connected to the servo motors, first floating mounts on which the servo amplifiers are provided, a second floating mount on which the servo motor is provided. The first floating mounts are electrically insulated from the frame and have first ground terminals connected to the ground terminals of the servo amplifiers. The second floating mount is electrically insulated from the frame and has a second ground terminal connected to the ground terminal of the servo motor. The prober further includes shielded cables connecting the servo amplifiers and the servo motors, a first wire connecting the first ground terminal and the frame ground terminal and also connecting the first ground terminal and the second floating mount, and second wires connecting the shielded cables and the frame ground terminal.

Abstract: A prober includes a frame having a frame ground terminal, a chuck stage, servo motors for driving the chuck stage, servo amplifiers connected to the servo motors, first floating mounts on which the servo amplifiers are provided, a second floating mount on which the servo motor is provided. The first floating mounts are electrically insulated from the frame and have first ground terminals connected to the ground terminals of the servo amplifiers. The second floating mount is electrically insulated from the frame and has a second ground terminal connected to the ground terminal of the servo motor. The prober further includes shielded cables connecting the servo amplifiers and the servo motors, a first wire connecting the first ground terminal and the frame ground terminal and also connecting the first ground terminal and the second floating mount, and second wires connecting the shielded cables and the frame ground terminal.

Abstract: The system for producing a display device controlled by a formula comprises a device for producing a panel substrate, which forms a thin film of a semiconductor material and forms the drive circuits for the pixels; a testing device for testing the resulting panel substrate; and a mounting device for mounting a display vehicle containing organic EL or liquid crystal material on a tested panel substrate. The testing apparatus having the testing device determine the threshold voltage of the drive circuits of each pixel during testing and these threshold values serve as the criteria for determining the parameters for substrate manufacture of the panel substrate manufacturing device.

Abstract: A prober that comprises a chuck, a support base that supports the chuck, a first inner shield that shields the chuck, and an outer shield that encloses the chuck and the first inner shield, wherein the outer shield is connected to a chassis, the chuck is connected to a first connector by a first cable 136, and the first inner shield is connected to a second connector by a second cable with an impedance device in between.