Abstract: A charged particle beam device suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface. The charged particle beam device includes the electrostatic chuck mechanism; a stage (200) which moves a sample, which is to be irradiated with a charged particle beam, relative to an irradiation position of the charged particle beam; an insulating body (203) which is disposed on the stage and constitutes a dielectric layer of the electrostatic chuck; a first support member (402) which supports the insulating body on the stage; a ring-shaped electrode (400) which encloses the surroundings of the sample and is installed on the insulating body in a contactless manner, and to which a predetermined voltage is applied; and a second support member (405) which supports the ring-shaped electrode.

Abstract: Provided are a vacuum treatment device and a vacuum treatment method with which it is possible to suppress deterioration of the degree of vacuum in a conveyance destination vacuum chamber when conveying a sample between two vacuum chambers. In this regard, a control device 30 controls conveyance of a wafer 600 from LC 102 to SC 101 via a LC-SC gate valve 510. At this time, the control device stops vacuum evacuation, which is being performed by a TMP 401A for a first duration of time, after having controlled the LC-SC gate valve 510 to close, measures an internal pressure of the LC 102 by using a pressure gauge 103 in a condition in which the vacuum evacuation is stopped, and controls the LC-SC gate valve 510 to open if the measured internal pressure has reached a first reference value.

Abstract: A charged particle beam device suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface. The charged particle beam device includes the electrostatic chuck mechanism; a stage (200) which moves a sample, which is to be irradiated with a charged particle beam, relative to an irradiation position of the charged particle beam; an insulating body (203) which is disposed on the stage and constitutes a dielectric layer of the electrostatic chuck; a first support member (402) which supports the insulating body on the stage; a ring-shaped electrode (400) which encloses the surroundings of the sample and is installed on the insulating body in a contactless manner, and to which a predetermined voltage is applied; and a second support member (405) which supports the ring-shaped electrode.

Abstract: The purpose of the present invention is to provide a charged particle beam device which suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface.

Abstract: The purpose of the present invention is to provide a charged particle beam device which suppresses sample deformation caused by placing a sample on a suctioning surface of an electrostatic chuck mechanism, the sample having a temperature different from the suctioning surface.

Abstract: The invention provides a component supply device which is small and can supply electronic components efficiently. The component supply device 1 mounts a component supply tape T and exposes the electronic components out of the component supply tape T to provide to a component installation device 7 which mounts the electronic components on a circuit board. The component supply device 1 has a replenishment device 2 which replenishes a new component supply tape (Tb) when a preceding component supply tape Ta runs out, and a sensor S which detects the run-out of the preceding component supply tape Ta. The replenishment device 2 has a reel holding section 21 on which reels 20 wound with the component supply tape T are inserted, and a standby section 5 of the component supply tape T. When the sensor S detects that the preceding component supply tape Ta runs out and issues a detection signal, the component supply tape T is moved from the standby section to be replenished.

Abstract: A component supply device loaded with a component supply tape for exposing and supplying an electronic component from the component supply tape with respect to a component mounting device mounting the electronic component on a substrate includes a replenishing unit performing replenishment of a new component supply tape when a preceding component supply tape is exhausted and a sensor senses exhaustion of the preceding component supply tape while a confluent portion where a channel for the preceding component supply tape and a channel for the new component supply tape join with each other is formed between the sensor and the replenishing unit. A buckling prevention mechanism moves in response to an operation of the preceding component supply tape or the new component supply tape for preventing buckling when the new component supply tape is transported to the component supply device by the replenishing unit is arranged on the confluent portion.

Abstract: A component feeding device transports a tape (a component feeding tape) in which electronic components are stored with some transportation device, and exposes the components. Transportation of the component feeding tape may be performed by fitting a sprocket with a feed hole of the component feeding tape. It has been found that sprocket does not necessarily fit with the feed hole of the component feeding tape. It has been found that this phenomenon takes place in a case of driving at least two or more sprockets with a driving device. When the sprocket does not fit with the feed hole, transportation of the tape is not correctly performed, but exerts an undesirable influence such as reduction of mounting efficiency on feeding of the components and subsequent mounting of the components. One feature resides in rendering a backlash of an upstream-side sprocket larger than a backlash of a downstream-side sprocket.

Abstract: A component feeding device transports a tape (a component feeding tape) in which electronic components are stored with some transportation device, and exposes the components. Transportation of the component feeding tape may be performed by fitting a sprocket with a feed hole of the component feeding tape. It has been found that sprocket does not necessarily fit with the feed hole of the component feeding tape. It has been found that this phenomenon takes place in a case of driving at least two or more sprockets with a driving device. When the sprocket does not fit with the feed hole, transportation of the tape is not correctly performed, but exerts an undesirable influence such as reduction of mounting efficiency on feeding of the components and subsequent mounting of the components. One feature resides in rendering a backlash of an upstream-side sprocket larger than a backlash of a downstream-side sprocket.

Abstract: In order to provide a stage apparatus with high speed stability in addition to being able to achieve positioning with a high degree of accuracy, and a sample observation apparatus, such as an optical microscope and a scanning electron microscope, including the stage apparatus, the stage apparatus and the sample observation apparatus of the present invention correct a command voltage value of standard waveform data or an output timing of a command voltage value such that a difference between a first time history response and a second time history response is reduced to zero, the first time history response for displacement or speed when the stage mechanism is driven with use of the standard waveform data showing the command voltage value at each predetermined time and the second time history response for displacement or speed when a speed of the stage mechanism is constant, to be set as drive waveform data to be outputted to a drive unit of the stage mechanism.

Abstract: In order to provide a stage apparatus with high speed stability in addition to being able to achieve positioning with a high degree of accuracy, and a sample observation apparatus, such as an optical microscope and a scanning electron microscope, including the stage apparatus, the stage apparatus and the sample observation apparatus of the present invention correct a command voltage value of standard waveform data or an output timing of a command voltage value such that a difference between a first time history response and a second time history response is reduced to zero, the first time history response for displacement or speed when the stage mechanism is driven with use of the standard waveform data showing the command voltage value at each predetermined time and the second time history response for displacement or speed when a speed of the stage mechanism is constant, to be set as drive waveform data to be outputted to a drive unit of the stage mechanism.

Abstract: The invention provides a component supply device which is small and can supply electronic components efficiently. The component supply device 1 mounts a component supply tape T and exposes the electronic components out of the component supply tape T to provide to a component installation device 7 which mounts the electronic components on a circuit board. The component supply device 1 has a replenishment device 2 which replenishes a new component supply tape (Tb) when a preceding component supply tape Ta runs out, and a sensor S which detects the run-out of the preceding component supply tape Ta. The replenishment device 2 has a reel holding section 21 on which reels 20 wound with the component supply tape T are inserted, and a standby section 5 of the component supply tape T. When the sensor S detects that the preceding component supply tape Ta runs out and issues a detection signal, the component supply tape T is moved from the standby section to be replenished.

Abstract: A component supply device loaded with a component supply tape for exposing and supplying an electronic component from the component supply tape with respect to a component mounting device mounting the electronic component on a substrate includes a replenishing unit performing replenishment of a new component supply tape when a preceding component supply tape is exhausted and a sensor senses exhaustion of the preceding component supply tape while a confluent portion where a channel for the preceding component supply tape and a channel for the new component supply tape join with each other is formed between the sensor and the replenishing unit. A buckling prevention mechanism moves in response to an operation of the preceding component supply tape or the new component supply tape for preventing buckling when the new component supply tape is transported to the component supply device by the replenishing unit is arranged on the confluent portion.

Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Abstract: A technique for improving impact resistance performance of a panel is provided in a module or display apparatus with a flat display panel. In a PDP module, a filter is bonded onto a front surface side of a PDP, and a base chassis is bonded to a rear surface side with a two-sided tape. In an attaching portion for the base chassis and a casing, a spring structure portion having a sloped portion and a space is provided in an area of the base chassis so as to correspond to a connecting part of the casing. Impact to glass of the PDP is buffered to an impact force in a direction vertical to a surface of the PDP due to a spring property of the spring structure portion.

Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Abstract: A technique for improving impact resistance performance of a panel is provided in a module or display apparatus with a flat display panel. In a PDP module, a filter is bonded onto a front surface side of a PDP, and a base chassis is bonded to a rear surface side with a two-sided tape. In an attaching portion for the base chassis and a casing, a spring structure portion having a sloped portion and a space is provided in an area of the base chassis so as to correspond to a connecting part of the casing. Impact to glass of the PDP is buffered to an impact force in a direction vertical to a surface of the PDP due to a spring property of the spring structure portion.

Abstract: A technique for improving impact resistance performance of a panel is provided in a module or display apparatus with a flat display panel. In a PDP module, a filter is bonded onto a front surface side of a PDP, and a base chassis is bonded to a rear surface side with a two-sided tape. In an attaching portion for the base chassis and a casing, a spring structure portion having a sloped portion and a space is provided in an area of the base chassis so as to correspond to a connecting part of the casing. Impact to glass of the PDP is buffered to an impact force in a direction vertical to a surface of the PDP due to a spring property of the spring structure portion.

Abstract: A plasma display system capable of enhancing stiffness against deformation. The system comprising a plasma display panel (PDP) 1; a sheet-like chassis 2 bonded to a back surface of the PDP 1; a circuit board 3 outputting an electric signal to the PDP 1; a casing 4 accommodating therein the PDP 1, the chassis 2, and the circuit board 3; a reinforcement member 5 disposed as an adjunct at a back surface of the chassis 2, the reinforcement member 5 extending in a plane direction of the chassis 2 to stick outwardly therefrom; and a fixing means (e.g. through holes 7a to 7d) disposed in each of overhangs 6a to 6d of the reinforcement member 5 sticking out in a plurality of directions from the chassis 2, the fixing means fixing the casing 4 in place.

Abstract: A technique for improving impact resistance performance of a panel is provided in a module or display apparatus with a flat display panel. In a PDP module, a filter is bonded onto a front surface side of a PDP, and a base chassis is bonded to a rear surface side with a two-sided tape. In an attaching portion for the base chassis and a casing, a spring structure portion having a sloped portion and a space is provided in an area of the base chassis so as to correspond to a connecting part of the casing. Impact to glass of the PDP is buffered to an impact force in a direction vertical to a surface of the PDP due to a spring property of the spring structure portion.