Patents by Inventor Akitoshi Toda
Akitoshi Toda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7010966Abstract: Disclosed herein is SPM cantilever having a support portion, a lever portion extended from the support portion and a probe portion formed at a free end of the lever portion, said probe portion having a generally plate-like form and the probe portion having an additionally sharpened terminal end portion. The terminal end portion has its length greater than the plate thickness thereof and is reduced in thickness toward a tip of the terminal end portion, and the tip is located inwardly of the planes extended from the front and back sides of a base portion of the plate-like probe portion.Type: GrantFiled: October 28, 2003Date of Patent: March 14, 2006Assignee: Olympus CorporationInventors: Masashi Kitazawa, Koichi Shiotani, Akitoshi Toda
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Publication number: 20050160802Abstract: Disclosed herein is SPM cantilever having a support portion, a lever portion extended from the support portion and a probe portion formed at a free end of the lever portion, said probe portion having a generally plate-like form and the probe portion having an additionally sharpened terminal end portion. The terminal end portion has its length greater than the plate thickness thereof and is reduced in thickness toward a tip of the terminal end portion, and the tip is located inwardly of the planes extended from the front and back sides of a base portion of the plate-like probe portion.Type: ApplicationFiled: March 16, 2005Publication date: July 28, 2005Applicant: Olympus CorporationInventors: Masashi Kitazawa, Koichi Shiotani, Akitoshi Toda
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Patent number: 6809306Abstract: A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.Type: GrantFiled: July 10, 2003Date of Patent: October 26, 2004Assignees: Olympus Optical Co., Ltd.Inventors: Toshio Ando, Akitoshi Toda
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Publication number: 20040084737Abstract: Disclosed herein is SPM cantilever having a support portion, a lever portion extended from the support portion and a probe portion formed at a free end of the lever portion, said probe portion having a generally plate-like form and the probe portion having an additionally sharpened terminal end portion. The terminal end portion has its length greater than the plate thickness thereof and is reduced in thickness toward a tip of the terminal end portion, and the tip is located inwardly of the planes extended from the front and back sides of a base portion of the plate-like probe portion.Type: ApplicationFiled: October 28, 2003Publication date: May 6, 2004Applicant: OLYMPUS CORPORATIONInventors: Masashi Kitazawa, Koichi Shiotani, Akitoshi Toda
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Publication number: 20040065819Abstract: A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.Type: ApplicationFiled: July 10, 2003Publication date: April 8, 2004Applicants: Olympus Optical Co., Ltd., Toshio AndoInventors: Toshio Ando, Akitoshi Toda
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Patent number: 6694805Abstract: A cantilever for Scanning Probe Microscopy including: a support portion; a lever portion extended from the support portion; and a probe portion provided at an free end of the lever portion, said probe portion being configured by two triangular thin plates each having one side respectively being one of the different two sides of a V-like notch formed on the free end of the lever, where the thin plates are caused to face each other while having the other side in common.Type: GrantFiled: April 16, 2002Date of Patent: February 24, 2004Assignee: Olympus Optical Co., Ltd.Inventors: Koichi Shiotani, Masashi Kitazawa, Kenji Sato, Akitoshi Toda
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Patent number: 6617761Abstract: A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.Type: GrantFiled: March 9, 2001Date of Patent: September 9, 2003Assignees: Olympus Optical Co, Ltd.Inventors: Toshio Ando, Akitoshi Toda
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Publication number: 20020152804Abstract: A cantilever for Scanning Probe Microscopy including: a support portion; a lever portion extended from the support portion; and a probe portion provided at an free end of the lever portion, said probe portion being configured by two triangular thin plates each having one side respectively being one of the different two sides of V-like notch formed on the free end of the lever, where the thin plates are caused to face each other while having the other side in common. The cantilever for Scanning Probe Microscopy is thereby achieved as having a probe portion which is light in weight and high in rigidity and is readily positioned in alignment and by which measurement at high resolution is steadily possible.Type: ApplicationFiled: April 16, 2002Publication date: October 24, 2002Applicant: Olympus Optical Co., Ltd.Inventors: Koichi Shiotani, Masashi Kitazawa, Kenji Sato, Akitoshi Toda
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Publication number: 20020017615Abstract: A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.Type: ApplicationFiled: March 9, 2001Publication date: February 14, 2002Applicant: Olympus Optical Co., Ltd.Inventors: Toshio Ando, Akitoshi Toda
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Patent number: 6246054Abstract: A probe chip suitable for observing the vertical walls of steps in a specimen includes a cantilever-like elastic member section extending from a support section, and a probe section at the free end of the elastic member section. The probe section is in the form of a triangular flat plate. Three ridges are terminated at two vertexes at the tip of the probe section. The direction normal to the plane of the probe section section is parallel to the ridge connecting the two points at the tip. These two terminal points at the tip of the probe section act as a virtual probe and interact with the surface of the specimen. The direction normal to the plane of the elastic member section is nonparallel to the direction normal to the plane of the probe section.Type: GrantFiled: June 5, 1998Date of Patent: June 12, 2001Assignee: Olympus Optical Co., Ltd.Inventors: Akitoshi Toda, Shuzo Mishima
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Patent number: 5859364Abstract: A slide glass with a sample rested thereon is placed on an interior total reflection prism with a matching oil between them. A laser beam is applied through a prism to the sample, and evanescent light is generated on the sample surface. Above the sample, a probe supported at a free end of a cantilever is located, and an objective is provided above the probe. The objective has an angular aperture exceeding a vertical angle of the probe, where the angular aperture indicates an angle from a focal point of the objective to a diameter of entrance pupil. A scattering light detection lens barrel is provided above the objective, and cooperates with the objective to constitute a scattering light detection optical system. The optical system detects scattering light generated when the probe is introduced to the evanescent light.Type: GrantFiled: May 31, 1996Date of Patent: January 12, 1999Assignee: Olympus Optical Co., Ltd.Inventors: Akitoshi Toda, Takeshi Konada
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Patent number: 5835251Abstract: A scanner system includes, a tube type piezoelectric scanner having a free end displaceable in X, Y and Z directions and supporting a sample at its free end, a driven for applying voltages to the scanner for displacing the sample an optical unit for optically detecting the X, Y and Z direction displacements of the free end and for outputting corresponding displacement signals, and a scan controller for computing correction signals based on the displacement signals so as to apply voltages which correct the voltage-displacement nonlinear characteristic of the scanner to the scanner and for supplying them to the driver.Type: GrantFiled: July 18, 1997Date of Patent: November 10, 1998Assignee: Olympus Optical Co., Ltd.Inventors: Akitoshi Toda, Shuichi Ito, Hirofumi Miyamoto, Akira Yagi
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Patent number: 5675145Abstract: A scanning probe microscope includes a probe having a minute aperture formed in a distal end thereof. The probe allows light to propagate therethrough and is located close to a sample. A moving device is provided for relatively moving the probe across a surface of the sample, and an observation optical system is provided for optically observing the sample. A light source emits a light beam for generating evanescent waves, and a beam irradiation device is provided for irradiating the light beam on the sample so that the light beam is totally reflected by an optical interface of the sample. The beam irradiation means and the observation optical system share an objective located on a side of the sample opposite to the probe. A light detecting device is provided for detecting an intensity of the light introduced into the probe through the aperture formed in the distal end of the probe.Type: GrantFiled: July 3, 1995Date of Patent: October 7, 1997Assignee: Olympus Optical Co., Ltd.Inventors: Akitoshi Toda, Takeshi Konada
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Patent number: 5526165Abstract: A scanner system includes, a tube type piezoelectric scanner having a free end displaceable in X, Y and Z directions and supporting a sample at its free end, a driver for applying voltages to the scanner for displacing the sample, an optical unit for optically detecting the X, Y and Z direction displacements of the free end and for outputting corresponding displacement signals, and a scan controller for computing correction signals based on the displacement signals so as to apply voltages which correct the voltage-displacement nonlinear characteristic of the scanner to the scanner and for supplying them to the driver.Type: GrantFiled: February 9, 1995Date of Patent: June 11, 1996Assignee: Olympus Optical Co., Ltd.Inventors: Akitoshi Toda, Shuichi Ito, Hirofumi Miyamoto, Akira Yagi
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Patent number: 5386720Abstract: An integrated AFM sensor includes a cantilever which has two beams extending from a support portion. The beams are integrated with each other at their ends to form a triangular free end, and a probe having a sharp distal end is arranged at the free end. The cantilever is formed by stacking a passivation layer, a piezoresistive layer, and a silicon layer. Electrodes electrically connected to the piezoresistive layer are formed at the fixed end of the cantilever through contact holes.Type: GrantFiled: February 16, 1994Date of Patent: February 7, 1995Assignee: Olympus Optical Co., Ltd.Inventors: Akitoshi Toda, Michio Takayama, Katsuhiro Matsuyama, Nobuaki Sakai, Yasushi Nakamura
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Patent number: 5386110Abstract: A method of making a cantilever chip for a scanning probe microscope wherein the cantilever chip includes a cantilever portion, a probe portion formed at a free end of the cantilever portion, a mirror portion formed on the cantilever portion on a side opposite to a side where the probe portion is formed, and a support portion for supporting the proximal end of the cantilever portion. A step is formed between the cantilever portion and the support portion, so that the support portion is set back from the surface of the cantilever portion on the side where the probe portion is formed. Semiconductors manufacturing processes and etching processes are used.Type: GrantFiled: August 9, 1993Date of Patent: January 31, 1995Assignee: Olympus Optical Co., Ltd.Inventor: Akitoshi Toda
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Patent number: 5367165Abstract: A cantilever chip has a holding substrate, and a cantilever having the shape of a hollow triangle extends from the holding substrate. A probe is arranged at the distal end portion of the cantilever. An axis of the probe is inclined at a predetermined angle with respect to a normal extending from the surface of the cantilever. This angle is set such that the axis of the probe is perpendicular to a sample surface when the cantilever chip is mounted on an atomic force microscope.Type: GrantFiled: January 12, 1993Date of Patent: November 22, 1994Assignee: Olympus Optical Co., Ltd.Inventors: Akitoshi Toda, Katsuhiro Matsuyama
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Patent number: 5319961Abstract: A cantilever chip has a hold substrate and a film member bonded to the substrate. The film member has a rectangular cantilever portion and a triangular cantilever portion having an inner portion removed. These portions are formed by patterning. Each of the portions has an end fixed to the hold substrate, and a free end provided with a probe. The film member has an alignment end used as a mark to determine the position of the side end face of the hold substrate at the time of the film being bonded to the substrate. The alignment end is divided by notches into the cantilever portions.Type: GrantFiled: September 8, 1992Date of Patent: June 14, 1994Assignee: Olympus Optical Co., Ltd.Inventors: Katsuhiro Matsuyama, Akitoshi Toda
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Patent number: 5294790Abstract: A hole is formed in a silicon substrate, passing through the substrate. An insulating film is formed on one face of the silicon substrate and one open end of the hole is thus closed by the insulating film. An antireflection film is attached to that area of the insulating film by which the one open end of the hole is closed. An optical fiber is fitted and fixed in the hole. An optically-transparent conical probe is formed on the area of the insulating film which corresponds to the hole in the silicon substrate and the probe is coated by a metal film while leaving a tip of the probe not coated. A fine aperture is thus formed at the tip of the probe to allow light to enter into the probe through the fine aperture. The metal film prevents light reflected from entering into the probe and light from being leaked from the probe, and it is connected to an electrode to use tunnel current to position the fine aperture near a sample.Type: GrantFiled: October 6, 1992Date of Patent: March 15, 1994Assignee: Olympus Optical Co., Ltd.Inventors: Yoshinori Ohta, Hiroshi Kajimura, Akitoshi Toda, Tsugiko Takase
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Patent number: 5289408Abstract: A scanning tunneling microscope memory apparatus comprises first and second integrated circuit (IC) substrates. First and second cantilevers, which can be moved by piezoelectric elements, are arranged on the first and second IC substrates, respectively. Tunnel current probes are provided on a free end of the first cantilever, and a recording element is provided on a free end of the second cantilever. The first and second cantilevers are spaced from each other and overlap such that the tunnel current probes face the recording element. The first or second substrate includes a charge coupled device (CCD) circuit, a control circuit for controlling the CCD circuit and cantilevers, and a drive circuit having a preamplifier, a write circuit, and a servo circuit.Type: GrantFiled: April 23, 1992Date of Patent: February 22, 1994Assignee: Olympus Optical Co., Ltd.Inventors: Yoshiyuki Mimura, Hiroshi Kajimura, Toshihito Kouchi, Akitoshi Toda, Yasuo Isono, Hiroko Ohta, Ryouhei Shimizu