Abstract: A simulated gas supply apparatus includes a raw gas source group including a plurality of raw gas sources, a plurality of flow controller groups, each of which includes a plurality of flow controllers, a flow control system including the flow controller groups, a primary supply pipe for supplying a simulated gas to an evaluation device, a primary exhaust pipe for exhausting the simulated gas, a switching valve system including a plurality of switching valves so as to switch the simulated gas flow between the primary supply pipe and the primary exhaust pipe, and a controlling unit that controls the flow control system and the switching valve system.

Abstract: A simulated gas supply apparatus includes a raw gas source group including a plurality of raw gas sources, a plurality of flow controller groups, each of which includes a plurality of flow controllers, a flow control system including the flow controller groups, a primary supply pipe for supplying a simulated gas to an evaluation device, a primary exhaust pipe for exhausting the simulated gas, a switching valve system including a plurality of switching valves so as to switch the simulated gas flow between the primary supply pipe and the primary exhaust pipe, and a controlling unit that controls the flow control system and the switching valve system.